The Electric Field Analysis of the Structure of New Micro-Machined Gyroscope
2010 ◽
Vol 43
◽
pp. 546-550
Keyword(s):
New Type
◽
The structure of current micro-machined gyroscope result in detection error and processing difficulty, which can be reduced by redesigning the structure such as a new type researched here to enhance the accuracy..The new structure for gyroscope and the method of driving force calculating for it is introduced in this paper. A 3D micro-machined gyroscope model has been built through CAD software, while finite model through CAE software. Besides, the driving structure has been analyzed to gain the size of driving force and electric-field distribution.
2012 ◽
Vol 516-517
◽
pp. 1517-1520
2014 ◽
Vol 521
◽
pp. 321-329
2014 ◽
Vol 1008-1009
◽
pp. 598-602
2011 ◽
Vol 291-294
◽
pp. 2352-2355
2013 ◽
Vol 347-350
◽
pp. 1276-1282
2011 ◽
Vol 2011
◽
pp. 1-8
◽
2013 ◽
Vol 562-565
◽
pp. 1218-1223
1993 ◽
Vol 113
(10)
◽
pp. 1088-1094
2001 ◽
Vol 51-52
◽
pp. 610-617
◽