Development of Controlled Micro-Mirrors with Large Rotation Angle

2012 ◽  
Vol 630 ◽  
pp. 339-343
Author(s):  
Sergei Timoshenkov ◽  
S. Evstafyev ◽  
I. Britkov

Development of micro-mechanical sensors and systems based on them is one of the development branches in microelectronic technology and labeled as one of the technologies of the 21-st century. The relevance and significance of the paper related to the methodology creation for the development and manufacture of micro-mirror with large rotation angle. Methodology was based on an integrated approach to solving such problems as the processes of surface preparation, etching of the complex profile surfaces, matching the silicon structures, etc. which allows to create MOEMS elements.

2021 ◽  
Vol 11 (15) ◽  
pp. 6872
Author(s):  
Chien-Sheng Liu ◽  
Yi-Hsuan Lin ◽  
Chiu-Nung Yeh

In keeping with consumers’ preferences for electromagnetic motors of ever smaller power consumption, it is necessary to improve the power efficiency of the electromagnetic motors used in unmanned aerial vehicles and robots without sacrificing their performance. Three-degree-of-freedom (3-DOF) spherical motors have been developed for these applications. Accordingly, this study modifies the 3-DOF spherical motor proposed by Hirata’s group in a previous study (Heya, A.; Hirata, K.; Niguchi, N., Dynamic modeling and control of three-degree-of-freedom electromagnetic actuator for image stabilization, IEEE Transactions on Magnetics 2018, 54, 8207905.) to accomplish a 3-DOF spherical motor for camera module with higher torque output in the large rotation angle. The main contribution of this study is to improve the static torque in the X- and Y-axes with an improved electromagnetic structure and a particular controlling strategy. In the structural design, eight symmetrical coils with specific coil combination are used instead of conventional four symmetrical coils. In this study, the development of the proposed 3-DOF spherical motor was constructed and verified by using a 3D finite-element method (3D FEM). The simulation results show that the proposed 3-DOF spherical motor has higher torque output in the large rotation angle when compared to the original 3-DOF spherical motor.


Author(s):  
Jing Zhang ◽  
Kai Yan ◽  
Ziming Kou

Two stiffness models for a flexible hinge with large rotation angle are established based on the pseudo-rigid body method and the series or parallel relationship of flexible units. Finite element simulation of the flexible hinge is conducted in ANSYS to verify the two stiffness models of the flexible hinge. A multi-objective optimization method is used to optimize the design parameters of the hinge. The stiffness models of the flexible hinge are used to establish the optimized objective function of an optimization model to improve the rotation angle of the hinge under a certain radial stiffness. After optimization, the rotation angle can reach 70 deg when the rotational and radial stiffnesses are 1.29 N·mm/rad and 1.37 N/mm.


Mathematics ◽  
2021 ◽  
Vol 9 (18) ◽  
pp. 2269
Author(s):  
Xiao-Ting He ◽  
Xue Li ◽  
Bin-Bin Shi ◽  
Jun-Yi Sun

The closed-form solution of circular membranes subjected to gas pressure loading plays an extremely important role in technical applications such as characterization of mechanical properties for freestanding thin films or thin-film/substrate systems based on pressured bulge or blister tests. However, the only two relevant closed-form solutions available in the literature are suitable only for the case where the rotation angle of membrane is relatively small, because they are derived with the small-rotation-angle assumption of membrane, that is, the rotation angle θ of membrane is assumed to be small so that “sinθ = 1/(1 + 1/tan2θ)1/2” can be approximated by “sinθ = tanθ”. Therefore, the two closed-form solutions with small-rotation-angle assumption cannot meet the requirements of these technical applications. Such a bottleneck to these technical applications is solved in this study, and a new and more refined closed-form solution without small-rotation-angle assumption is given in power series form, which is derived with “sinθ = 1/(1 + 1/tan2θ)1/2”, rather than “sinθ = tanθ”, thus being suitable for the case where the rotation angle of membrane is relatively large. This closed-form solution without small-rotation-angle assumption can naturally satisfy the remaining unused boundary condition, and numerically shows satisfactory convergence, agrees well with the closed-form solution with small-rotation-angle assumption for lightly loaded membranes with small rotation angles, and diverges distinctly for heavily loaded membranes with large rotation angles. The confirmatory experiment conducted shows that the closed-form solution without small-rotation-angle assumption is reliable and has a satisfactory calculation accuracy in comparison with the closed-form solution with small-rotation-angle assumption, particularly for heavily loaded membranes with large rotation angles.


2017 ◽  
Vol 14 (8) ◽  
pp. 1188-1192
Author(s):  
Chun Wu ◽  
Qianqing Qin ◽  
Guorui Ma ◽  
Zhitao Fu ◽  
Zhenliang Xu

1994 ◽  
Vol 6 (2) ◽  
pp. 139-150 ◽  
Author(s):  
Christoph M. Michel ◽  
Lloyd Kaufman ◽  
Samuel J. Williamson

Electric and magnetic recordings of average power within the high a band (10–12 Hz) were made over the parietal and occipital areas of the scalp while subjects were engaged in the mental imagery task of Cooper and Shepard. The subject had to determine whether an abstract probe figure was identical to a memory figure presented earlier at a different orientation, or whether it was the mirror image of the memory figure. Alpha power was found to be suppressed while the subjects were engaged in the comparison, and the duration of suppression increased with the minimum rotation angle to achieve a match. Strong correlations between suppression duration and reaction time give further evidence that the visual cortex is engaged in the process of mental imagery. Moreover, for large rotation angles of the probe figures, where the task is markedly more difficult, a shift in the spatial pattern of suppression indicates some additional activity in left occipital areas.


2011 ◽  
Vol 103 ◽  
pp. 51-56
Author(s):  
Ming Yang Guan ◽  
Ming Li Dong ◽  
Lian Qing Zhu ◽  
Yang Kuan Guo ◽  
Qing Shan Chen

An in-site measurement method for big gears based on laser tracking and coordinate measurement technology is proposed in this paper. The coordinate transformation method, in which direction cosine are used as parameters, is suitable for large rotation angle transformation. The coordinate transformation with large rotation angle in the in-site measurement, hence, can be realized. The experimental results show that the proposed coordinate transformation method has the advantages of high accuracy and stability, and can meet the requirements of the laser tracking in-site measurement system for big gears.


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