Properties of SiO2CuOx Films for Nitrogen Dioxide Detection
2013 ◽
Vol 834-836
◽
pp. 112-116
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SiOxCuOythin films were prepared by the deposition on to the Si/SiO2substrates from the alcoholic solutions employing the sol-gel technique. The various analytic techniques were applied to characterize structure and properties of the films under study . The both X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) studies showed the presence CuO as well as CuO2phases and formation of a dual-oxide CuSiO3with the average crystallites sizes of 35-50 nm. The conductance of the films was rather sensitive to the presence of 1-20 ppm NO2concentration at the operating temperatures in the range of 20–200◦C.
2015 ◽
Vol 1088
◽
pp. 81-85
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2021 ◽
2000 ◽
Vol 15
(12)
◽
pp. 2653-2657
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