The Influence of the Temperature Increase on the Tribological Behavior of DLC Films by RF-PECVD

DLC (Diamond Like Carbon) films show very desirable surface interactions with high hardness, low friction coefficient, and good wear-resistance properties. The friction behavior of hydrogenated DLC film is dependent on tribological environment, especially surrounding temperature. In this work, the tribological behaviors of DLC (Diamond-like carbon) films, prepared by the radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method, were studied in elevated temperatures. The ball-on-disk tests with DLC films on steel specimens were conducted at a sliding speed of 60 rpm, a load of 10 N, and surrounding various temperatures of 25, 40, 55 and 75. The results show considerable dependency of DLC tribological parameters on temperature. The friction coefficient decreased as the surrounding temperature increased. After tests the wear tracks of hydrogenated DLC film were analyzed by optical microscope, scanning electron spectroscopy (SEM) and Raman spectroscopy. The surface roughness and 3-D images of wear track were also obtained by an atomic force microscope (AFM).

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The Effect of CNT Content on the Tribological Properties of CNTs Doped Diamond-Like Carbon Films

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.642.231 ◽

2015 ◽

Vol 642 ◽

pp. 231-235

Author(s):

Che Hung Wei ◽

Jui Feng Yang ◽

Chao I Wang

Keyword(s):

Friction Coefficient ◽

Critical Load ◽

Internal Stress ◽

Tribological Properties ◽

Chemical Vapor ◽

Carbon Films ◽

Diamond Like Carbon ◽

Element Analysis ◽

Multi Walled Carbon Nanotubes ◽

Walled Carbon Nanotubes

Diamond-like carbon (DLC) films is useful in many applications. To improve the tribological properties in DLC, we spin coat the multi-walled carbon nanotubes (CNTs) with different solution on (100) silicon. DLC was deposited by plasma enhanced chemical vapor deposition (PECVD) with C2H2and H2. The results show that the ID/IGratio is increasing with higher CNTs content while the friction coefficient and critical load are decreasing with larger CNTs contents. The decreasing friction coefficient results from graphitation on the surface due to higher sp2content. The decreasing critical load is attributed to higher internal stress. The effect of friction coefficient and CNT concentration on stress distribution is studied by a nanoscratch finite element analysis. The results indicate that low friction coefficient and high CNT concentration will reduce the stress magnitude in the film. Therefore, the decreasing friction coefficient in CNT doped DLC film with increasing CNT concentration should reduce stress in the film and is good for adhesion. The discrepancy between friction coefficient and critical load is explained in terms of high internal stress during deposition. A surface treatment on CNT before deposition to reduce internal stress is currently under investigation.

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In vivo biocompatibility of diamond-like carbon films containing TiO2 nanoparticles for biomedical applications

Journal of Materials Science Materials in Medicine ◽

10.1007/s10856-021-06596-6 ◽

2021 ◽

Vol 32 (9) ◽

Author(s):

C. C. Wachesk ◽

S. H. Seabra ◽

T. A. T. Dos Santos ◽

V. J. Trava-Airoldi ◽

A. O. Lobo ◽

...

Keyword(s):

Inflammatory Process ◽

Antimicrobial Properties ◽

Chemical Vapor ◽

High Hardness ◽

Carbon Films ◽

High Wear Resistance ◽

Diamond Like Carbon ◽

Dlc Coatings ◽

Inflammatory Reactions

AbstractHybrid diamond-like carbon (DLC) with incorporated titanium dioxide (TiO2) nanoparticle coatings have low friction coefficient, high wear resistance, high hardness, biocompatibility, and high chemical stability. They could be employed to modify biomedical alloys surfaces for numerous applications in biomedical engineering. Here we investigate for the first time the in vivo inflammatory process of DLC coatings with incorporated TiO2 nanoparticles. TiO2-DLC films were grown on AISI 316 stainless-steel substrates using plasma-enhanced chemical vapor deposition. The coated substrates were implanted in CF1 mice peritoneum. The in vivo cytotoxicity and biocompatibility of the samples were analyzed from macrophage lavage. Analysis in the first weeks after implantation could be helpful to evaluate the acute cytotoxicity generated after a possible inflammatory process. The in vivo results showed no inflammatory process. A significant increase in nitric oxide production on the uncoated substrates was confirmed through cytometry, and the coated substrates demonstrated biocompatibility. The presence of TiO2 nanoparticles enhanced the wound healing activity, due to their astringent and antimicrobial properties. DLC and TiO2-DLC coatings were considered biocompatible, and the presence of TiO2 nanoparticles reduced the inflammatory reactions, increasing DLC biocompatibility.

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Influence on the Proprieties of PET Coated Diamond-Like Carbon Film for Different Preparing Condition by PECVD

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.80-81.104 ◽

2011 ◽

Vol 80-81 ◽

pp. 104-107 ◽

Cited By ~ 2

Author(s):

Gai Mei Zhang ◽

Qiang Chen ◽

Wen Cai Xu ◽

Fei Pan ◽

Bao Ping Miao

Keyword(s):

Binding Capacity ◽

Carbon Film ◽

Chemical Vapor ◽

High Hardness ◽

Barrier Properties ◽

High Wear Resistance ◽

Diamond Like Carbon ◽

Dlc Coating ◽

Atomic Force ◽

Pet Film

Diamond-like carbon (DLC) films exhibit high hardness, high wear resistance and a low friction coefficient. They are extensively utilized in the mechanical, electronic and biomedical industries. Due to the gas barrier properties, it is used in the food industry also. To investigate the binding capacity of the DLC with the substrate and reduce the contamination for foods. The DLC (a-C: H) films on the glass slide and PET film were prepared successfully for different process parameters by plasma enhanced chemical vapor deposition (PECVD). In order to characterize the DLC film, the images of DLC was visualized by the atomic force microscope (AFM). The films were analyzed by Fourier transform infrared spectroscopy (RTIF). The contact angle and oxygen permeation analyzer (OTR) of the PET with and without the DLC coating were investigated experimentally. The results show that the DLC coating can improve the barriers and surface properties.

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An Study of Influence of Imperfections on the Delamination of Diamond-Like Carbon Films

MRS Proceedings ◽

10.1557/proc-719-f8.36 ◽

2002 ◽

Vol 719 ◽

Author(s):

Myoung-Woon Moon ◽

Kyang-Ryel Lee ◽

Jin-Won Chung ◽

Kyu Hwan Oh

Keyword(s):

Cross Sections ◽

Focused Ion Beam ◽

Imaging System ◽

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon ◽

Glass Substrates ◽

Atomic Force ◽

Initiation And Propagation

AbstractThe role of imperfections on the initiation and propagation of interface delaminations in compressed thin films has been analyzed using experiments with diamond-like carbon (DLC) films deposited onto glass substrates. The surface topologies and interface separations have been characterized by using the Atomic Force Microscope (AFM) and the Focused Ion Beam (FIB) imaging system. The lengths and amplitudes of numerous imperfections have been measured by AFM and the interface separations characterized on cross sections made with the FIB. Chemical analysis of several sites, performed using Auger Electron Spectroscopy (AES), has revealed the origin of the imperfections. The incidence of buckles has been correlated with the imperfection length.

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Surface studies of diamond-like carbon films grown by plasma-enhanced chemical vapor deposition

Surface and Interface Analysis ◽

10.1002/sia.3371 ◽

2010 ◽

Vol 42 (12-13) ◽

pp. 1702-1705 ◽

Cited By ~ 6

Author(s):

R. Maheswaran ◽

R. Sivaraman ◽

O. Mahapatra ◽

P. C. Rao ◽

C. Gopalakrishnan ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Carbon Films ◽

Diamond Like Carbon ◽

Surface Studies

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Effects of nitrogen trifluoride on the growth and properties of plasma-enhanced chemical-vapor-deposited diamond-like carbon films

Journal of Electronic Materials ◽

10.1007/bf02661661 ◽

1993 ◽

Vol 22 (4) ◽

pp. 347-352 ◽

Cited By ~ 9

Author(s):

S. S. Ang ◽

G. Sreenivas ◽

W. D. Brown ◽

H. A. Naseem ◽

R. K. Ulrich

Keyword(s):

Chemical Vapor ◽

Carbon Films ◽

Diamond Like Carbon ◽

Nitrogen Trifluoride ◽

Chemical Vapor Deposited

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Effect of RF Negative Bias on the Structure and Performance of Diamond-Like Carbon Films in ECR Plasma

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.423-426.756 ◽

2013 ◽

Vol 423-426 ◽

pp. 756-761

Author(s):

Li Jun Sang ◽

Qiang Chen ◽

Zhong Wei Liu ◽

Zheng Duo Wang

Keyword(s):

Friction Coefficient ◽

Electron Cyclotron Resonance ◽

Crystalline Silicon ◽

Carbon Films ◽

Diamond Like Carbon ◽

Negative Bias ◽

Film Property ◽

Ecr Plasma ◽

Peak Intensity ◽

Stretching Vibration

Diamond-like carbon films (DLC) were deposited on single crystalline silicon surface under different RF negative bias in microwave electron cyclotron resonance (ECR) plasma source. The chemical structure and morphology were characterized by Fourier transformation infrared spectroscopy (FTIR) and atomic force microscopy (AFM). The friction coefficient of films was measured to examine the film property later. The results show that the smooth and compact deposited films were typical hydrogenated diamond-like carbon with CHn stretching vibration in 2800-3000cm-1. It is noticed that with the increase of RF bias on the substrate the peak intensity for C-H stretching vibration in spectrum between 2800cm-1~3000cm-1 increased at the beginning and then decreased, which caused the friction coefficient of the film being smaller and then larger in reverse. In 50W RF biased power one can obtain the maximum-CHn peak intensity and the minimum friction coefficient.

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