Design and Simulation of a Capacitive Biaxial Microaccelerometer
Keyword(s):
This paper presents a capacitive biaxial microaccelerometer with a single proof mass. The theoretical analysis results are confirmed by finite element analysis. The experimental results indicate the biaxial accelerometer with uniform axial sensitivities, good linearity and high cross-axis sensitivity immunity to the z-axis input.
2011 ◽
Vol 287-290
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pp. 603-607
2016 ◽
Vol 230
(15)
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pp. 2720-2727
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2014 ◽
Vol 580-583
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pp. 2134-2140
2011 ◽
Vol 121-126
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pp. 3431-3436
2014 ◽
Vol 228
(17)
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pp. 3156-3169
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2018 ◽
Vol 32
(19)
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pp. 1840043
1997 ◽
Vol 34
(2)
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pp. 149-155
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