Microstructure, Interface and Hardness of Ti/TiN Nanolayered Coatings

2012 ◽  
Vol 531-532 ◽  
pp. 645-650 ◽  
Author(s):  
Xiao Ming Bai ◽  
Wei Tao Zheng ◽  
Xiu Juan Guo ◽  
Hui She

The polycrystalline Ti/TiN multilayer films were deposited by magnetron sputtering. We investigated the effects of mixed discharge gas pressure, bias voltage and substrate temperature on the microstructural, interfacial, and mechanical properties of the polycrystalline Ti/TiN multilayer films. X-ray reflectivity and diffraction (XRR and XRD), and nanoindentation were used to characterize the structures and mechanical properties for the films.The period of multilayer, interface width and grain size decrease with increaseing of deposition pressure. The multilayer coating at floating voltage shows TiN (111), Ti2N (103), and TiN (200) preferred crystalline orientation, whlie those at other different substrate biases show only TiN (111) and Ti2N (103) preferred crystalline orientation. It was found that the hardness increased with increasing substrate temperature. This hardness enhancement was probably caused by the modulus difference in the interface between layer Ti and TiN or the preferred crystalline orientation TiN(111).


1993 ◽  
Vol 297 ◽  
Author(s):  
R.I. Johnson ◽  
G.B. Anderson ◽  
J.B. Boyce ◽  
D.K. Fork ◽  
P. Mei ◽  
...  

This paper describes new results on the relationship between the grain size, mobility, and Si (111) x-ray peak intensity of laser crystallized amorphous silicon as a function of the laser fluence, shot density, substrate temperature, and film thickness. These observations include an unexpected narrow peak found in the silicon (111) x- ray peak intensity, which occurs at a specific laser fluence for a given film thickness and substrate temperature. Amorphous silicon materials processed at laser energy densities defined by this peak exhibit exceptionally large grain sizes and electron mobilities that cannot be obtained at any other energy and shot density combination above or below the energy at which the Si (111) x-ray peak intensity maximum occurs.



2011 ◽  
Vol 704-705 ◽  
pp. 1095-1099
Author(s):  
Peng Liu ◽  
Hao Ran Geng ◽  
Zhen Qing Wang ◽  
Jian Rong Zhu ◽  
Fu Sen Pan ◽  
...  

Effects of AlN addition on the microstructure and mechanical properties of as-cast Mg-Al-Zn magnesium alloy were investigated using optical microscopy (OM), scanning electron microscopy (SEM), X-ray diffraction (XRD) and tensile testing. Five different samples were made with different amounts of AlN(0wt%, 0.12wt%, 0.30wt%, 0.48wt%, 0. 60wt%). The results show that the phases of as-cast alloy are composed of α-Mg,β-Mg17Al12. The addition of AlN suppressed the precipitation of the β-phase. And, with the increase of AlN content, the microstructure of β-phase was changed from the reticulum to fine grains. When AlN content was up to 0.48wt% in the alloy, the β-phase became most uniform distribution. After adding 0.3wt% AlN to Al-Mg-Zn alloy, the average alloy grain size reduced from 102μm to 35μm ,the tensile strength of alloy was the highest. The average tensile strength increased from 139MPa to 169.91MPa, the hardness increased from 77.7HB to 98.4HB, but the elongation changes indistinctively. However, when more amount of AlN was added, the average alloy grain size did not reduce sequentially and increased to 50μm by adding 0.6wt% AlN and the β-phase became a little more. Keywords: Al-Mg-Zn alloy; AlN; β-Mg17Al12; Tensile strength



2007 ◽  
Vol 539-543 ◽  
pp. 1177-1182
Author(s):  
Richard Wuhrer ◽  
Wing Yiu Yeung

Development of complex ternary nitride coatings has attracted significant industrial interest in recent years. In deposition of complex ternary nitride coatings, the nitrogen deposition pressure plays an important role in structural evolution of the coatings leading to development of different mechanical properties. This paper summaries some successful analyses by the authors on the relationships amongst the deposition rate, grain size and hardness of the coatings against the nitrogen deposition pressure. It has been established that as the nitrogen pressure decreases, the deposition rate of the coatings increases and the grain size decreases. Hardness of the coatings increases due to the development of a refined and densified coating structure. Taking into account of the reaction kinetics at the targets, the interactions of the sputtered atoms occurred in their transfer to the substrate, the reaction kinetics at the substrate, the target material characteristics and the geometric arrangement of the sputter magnetron configuration, modelling to the relationships of deposition rate with nitrogen deposition pressure, grain size with deposition rate and hardness with grain size have been successfully established in this study. A limiting grain size of the coatings has also been identified in the grain refinement process.



1995 ◽  
Vol 400 ◽  
Author(s):  
H. Van Swygenhoven ◽  
W. Wagner ◽  
J. Löffler

AbstractMechanical properties of nanostructured intermetallic Ni3Al synthesized by the inert-gas condensation technique are studied by means of instrumental indentation using the ICT-CSEMEX indenter. This instrument is a microindenter which continously measures load and displacement. Load-displacement curves are performed as function of grain size, consolidation- and annealing temperature. The mean grain size of the samples are studied by means of x-ray diffraction and small-angle neutron scattering.



2012 ◽  
Vol 516-517 ◽  
pp. 1902-1905 ◽  
Author(s):  
Abd Rashid Amirul ◽  
Yusoff Mahani

Copper alloy C194 lead frame occasionally has been observed creates non-sticking defect at wire bond process in typical microelectronic assembly line. The effect was significantly assessed as process variation during die attach. In this study, microstructure and mechanical properties of copper alloy lead frames were investigated. The copper alloy lead frames were selected from different batches in the production line that produced sticking (typical performance) and non-sticking defect. The micro structural and structural properties were investigated by means of optical microscopy (OM) and X-ray diffraction (XRD), respectively. The hardness and tensile strength were also determined. The result revealed that non-sticking lead frame has larger grain size of 43.8 nm than typical performance lead frame. Due to lower dislocation density, tensile strength and hardness of typical lead frame with smaller grain size were higher than that of defect lead frame. Elongation of defect lead frame was reached above 10% as compared to typical performance lead frame groups with the value below 4%.



2012 ◽  
Vol 1426 ◽  
pp. 359-364
Author(s):  
Siva Konduri ◽  
Max Noack ◽  
Vikram Dalal

ABSTRACTIn this paper, we report on deposition and properties of nanocrystalline Ge:H films . The films were grown from germane and hydrogen mixtures using Radio frequency Plasma-enhanced chemical vapor deposition (RF-PECVD) process using ∼45 MHz frequency. The crystallinity of the films was measured using Raman measurements and from x-ray diffraction techniques, it was found that the grain size was a strong function of deposition pressure, temperature and hydrogen/germane ratios. High hydrogen ratios and high powers led to films with smaller grains. Higher pressures and smaller hydrogen/germane ratio led to films with larger grain sizes, as did higher growth temperatures. The mobility of electrons and holes was measured using space charge limited current (SCLC) techniques in n+-n-n+ devices. It was found that nominally undoped films were generally n type with carrier concentrations in the 1E14/cm3 range. Mobility was found to increase with grain size, with 60 nm grains showing mobility in the 2-3 cm2/V-s range.



2015 ◽  
Vol 817 ◽  
pp. 192-197
Author(s):  
Xin Zhang ◽  
Ze Hua Wang ◽  
Ze Hua Zhou ◽  
Jian Ming Xu ◽  
Zhao Jun Zhong ◽  
...  

A series of Al-3.2Mg alloys with addition of 0~1.6 wt.% rare earth (Ce and La) were prepared. The microstructure of as-cast Al-3.2Mg alloys was investigated by optical microscopy (OM), scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS), and the tensile strength was measured. The results indicated that the addition of rare earth elements refined grain size and secondary dendrite arm spacing (SDAS), and the tensile strength was affected by means of the second-phase precipitation and the grain boundary. Accordingly, the ductility of Al-3.2Mg alloys reduced with the increasing of RE addition due to the more second-phase formation.



2012 ◽  
Vol 626 ◽  
pp. 672-676
Author(s):  
Boon Hoong Ong ◽  
Heng Choy Lee ◽  
Sharifah Bee Abdul Hamid

Nanostructured SnO2 thin films were deposited on glass substrate using chemical spray pyrolysis technique. Three influent synthesis parameters, namely (i) the precursor concentration (0.2M and 0.5M), (ii) the substrate temperature (250°C and 350°C) and (iii) doping with zinc (Zn) were investigated in term of their effects on the morphology and structure of SnO2 thin films. These films were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM) and energy dispersive X-ray spectrometry (EDX) techniques. The grain size of the films was observed to increase as the concentration of the precursors is increased. Substrate temperature is proved to be crucial in determining the crystallinity of the films as the films are reported to grow at temperature above 270°C. Besides, the addition of dopant was found to reduce the grain size of the film.



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