Determination of Thickness of PZO Films Deposited on ITO Glass Substrates
Keyword(s):
PZO (PbZrO3) coatings with different thicknesses were deposited onto Indium Tin Oxide ITO glass substrates at room temperature by magnetron sputtering technique. UV-Vis absorption spectra method and microhardness testing method were used to measure the thickness of coating. It was proved that the measuring results of film thickness by two kinds of methods were equivalent, and either one method can be alternatively used to determine the thickness of deposited films.
2020 ◽
Vol 20
(6)
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pp. 3356-3360
2014 ◽
Vol 32
(2)
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pp. 157-163
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2013 ◽
Vol 284-287
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pp. 250-254
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2018 ◽
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2017 ◽
Vol 20
(2)
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pp. 077-082
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