A Novel Z-Axis Capacitance Accelerometer with Highly Symmetrical 16-Beam Structure

2013 ◽  
Vol 562-565 ◽  
pp. 412-416
Author(s):  
Wei Li ◽  
Lu Feng Che ◽  
Xiao Lin Li ◽  
Jian Wu ◽  
Yue Lin Wang
Keyword(s):  
Proof Mass ◽  
Differential Capacitance ◽  
Wet Etching ◽  
Beam Structure ◽  
Element Analysis ◽  
Bias Stability ◽  
Maximum Range ◽  
Cross Axis ◽  
Highly Uniform ◽  
Micro Accelerometer

A novel highly symmetrical 16-beam sandwich structure Z-axis differential capacitance accelerometer is presented. In this design, the proof mass is suspended symmetrically by double-side of 16 straight beams with highly uniform dimension which can reduce the cross-axis sensitivity and rotational influences dramatically. Parameters of the beam-mass structure were analyzed and optimized by finite element analysis (FEA) software. The micro accelerometer is based on bulk-micromachining by DRIE and KOH anisotropic wet etching technologies. The beam-mass structure was released by anisotropic wet etching on both device layer sides simultaneously. The fabricated accelerometer was measured over the maximum range of 30g gravity field, results of measurement show that the close-loop sensitivity is 80mV/g, the nonlinearity is 0.27%, and the bias stability is 0.63mg for an hour.

A two degrees of freedom comb capacitive-type accelerometer with low cross-axis sensitivity

2019 ◽  
Vol 13 (3) ◽  
pp. 5334-5346
Author(s):  
M. N. Nguyen ◽  
L. Q. Nguyen ◽  
H. M. Chu ◽  
H. N. Vu
Keyword(s):  
Degrees Of Freedom ◽  
Proof Mass ◽  
Vibration Modes ◽  
Electrode Structure ◽  
Element Analysis ◽  
Mechanical Coupling ◽  
Fully Differential ◽  
Mode Effects ◽  
The Finite Element Analysis ◽  
Cross Axis

In this paper, we report on a SOI-based comb capacitive-type accelerometer that senses acceleration in two lateral directions. The structure of the accelerometer was designed using a proof mass connected by four folded-beam springs, which are compliant to inertial displacement causing by attached acceleration in the two lateral directions. At the same time, the folded-beam springs enabled to suppress cross-talk causing by mechanical coupling from parasitic vibration modes. The differential capacitor sense structure was employed to eliminate common mode effects. The design of gap between comb fingers was also analyzed to find an optimally sensing comb electrode structure. The design of the accelerometer was carried out using the finite element analysis. The fabrication of the device was based on SOI-micromachining. The characteristics of the accelerometer have been investigated by a fully differential capacitive bridge interface using a sub-fF switched-capacitor integrator circuit. The sensitivities of the accelerometer in the two lateral directions were determined to be 6 and 5.5 fF/g, respectively. The cross-axis sensitivities of the accelerometer were less than 5%, which shows that the accelerometer can be used for measuring precisely acceleration in the two lateral directions. The accelerometer operates linearly in the range of investigated acceleration from 0 to 4g. The proposed accelerometer is expected for low-g applications.

scholarly journals Design and optimization of differential capacitive micro accelerometer for vibration measurement

2021 ◽  
Vol 30 (1) ◽  
pp. 19-27
Author(s):  
Kumar Gomathi ◽  
Arunachalam Balaji ◽  
Thangaraj Mrunalini
Keyword(s):  
Software Design ◽  
Proof Mass ◽  
Vibration Measurement ◽  
Design Parameters ◽  
Mechanical Sensitivity ◽  
Design And Optimization ◽  
Capacitive Accelerometer ◽  
Cross Axis ◽  
Micro Accelerometer

Abstract This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity even in a wide acceleration range (0–100 g). The linearity is improved by designing a U-folded suspension. The movable mass of the accelerometer is designed with many fingers connected in parallel and suspended over the stationary electrodes. This arrangement gives the differential comb-type capacitive accelerometer. The area changed capacitive accelerometer is designed using Intellisuite 8.6 Software. Design parameters such as spring width and radius, length, and width of the proof mass are optimized using Minitab 17 software. Mechanical sensitivity of 0.3506 μm/g and Electrical sensitivity of 4.706 μF/g are achieved. The highest displacement of 7.899 μm is obtained with a cross-axis sensitivity of 0.47%.

Design and Simulation of a Capacitive Biaxial Microaccelerometer

2012 ◽  
Vol 503 ◽  
pp. 194-198
Author(s):  
Yu Liu ◽  
Zhi Yu Wen ◽  
Li Chen ◽  
Hong Yun Yang
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Theoretical Analysis ◽  
Proof Mass ◽  
Experimental Results ◽  
Element Analysis ◽  
Good Linearity ◽  
Cross Axis

This paper presents a capacitive biaxial microaccelerometer with a single proof mass. The theoretical analysis results are confirmed by finite element analysis. The experimental results indicate the biaxial accelerometer with uniform axial sensitivities, good linearity and high cross-axis sensitivity immunity to the z-axis input.

An XYZ Parallel Kinematic Flexure Mechanism With Geometrically Decoupled Degrees of Freedom

2011 ◽  
Author(s):  
Shorya Awtar ◽  
John Ustick ◽  
Shiladitya Sen
Keyword(s):  
Degrees Of Freedom ◽  
Element Analysis ◽  
Motion Direction ◽  
Form Analysis ◽  
Flexure Mechanism ◽  
Non Linear ◽  
Decoupled Motion ◽  
Motion Range ◽  
Parallel Kinematic ◽  
Cross Axis

We present the constraint-based design of a novel parallel kinematic flexure mechanism that provides highly decoupled motions along the three translational directions (X, Y, and Z) and high stiffness along the three rotational directions (θx, θy, and θz). The geometric decoupling ensures large motion range along each translational direction and enables integration with large-stroke ground-mounted linear actuators or generators, depending on the application. The proposed design, which is based on a systematic arrangement of multiple rigid stages and parallelogram flexure modules, is analyzed via non-linear finite element analysis. A proof-of-concept prototype of the flexure mechanism is fabricated to validate its large range and decoupled motion capability. The analyses as well as the hardware demonstrate an XYZ motion range of 10 mm × 10 mm × 10 mm. Over this motion range, the non-linear FEA predicts a cross-axis error of less than 3%, parasitic rotations less than 2 mrad, less than 4% lost motion, actuator isolation less than 1.5%, and no perceptible motion direction stiffness variation. Ongoing work includes non-linear closed-form analysis and experimental measurement of these error motion and stiffness characteristics.

Study and Analysis of MEMS Pressure Sensor Based on Applied Mechanics

2013 ◽  
Vol 771 ◽  
pp. 159-162
Author(s):  
Li Feng Qi ◽  
Zhi Min Liu ◽  
Xing Ye Xu ◽  
Guan Zhong Chen ◽  
Xue Qing
Keyword(s):  
Finite Element Analysis ◽  
Pressure Sensor ◽  
High Sensitivity ◽  
Scientific Basis ◽  
Sensor Chip ◽  
Applied Mechanics ◽  
Beam Structure ◽  
Element Analysis ◽  
Sensor Development ◽  
Piezoresistive Pressure Sensor

The relative research of low range and high anti-overload piezoresistive pressure sensor is carried out in this paper and a new kind of sensor chip structure, the double ends-four beam structure, is proposed. Trough the analysis, the sensor chip structure designed in this paper has high sensitivity and linearity. The chip structure is specially suit for the micro-pressure sensor. The theoretical analysis and finite element analysis is taken in this paper, which provide important scientific basis for the pressure sensor development.

A New Design of a Piezoelectric Triaxial Micro-Accelerometer

2015 ◽  
Vol 645-646 ◽  
pp. 841-846 ◽  
Author(s):  
Jian Yan Wang ◽  
Ting Ting Wang ◽  
Hang Guo
Keyword(s):  
Simulation Analysis ◽  
Structural Parameters ◽  
Sol Gel ◽  
Triaxial Accelerometer ◽  
Response Frequency ◽  
Pzt Films ◽  
New Type ◽  
The Cross ◽  
Cross Axis ◽  
Micro Accelerometer

Accelerometer in MEMS always is made by capacitive or piezoresistive, whose dynamic response is not good, the operating frequency is narrow, and the cross-axis sensitivity is low. A new type of piezoelectric micro-accelerometer is designed, and its structure is “x” type. The sensing unit is piezoelectric PZT films, which is achieved by sol-gel method. The accelerometer is a triaxial accelerometer. The theoretical and simulation analysis is used to achieve the charge sensitivity and response frequency, and also get the optimal structural parameters. A new circuit connection is proposed to improve the sensitivity and avoid the cross-axis sensitivity. The design achieves the z-axis sensitivity with more than 40 pC/g, x, y-axis sensitivity with more than 8pC/g, and the response frequency is about 3000Hz.

Transient Vibrations of Two-Dimensional Beam Frames at Mid- and High-Frequencies

2019 ◽  
Author(s):  
Yichi Zhang ◽  
Bingen Yang
Keyword(s):  
Frequency Analysis ◽  
High Frequency ◽  
Transfer Functions ◽  
Flexible Structures ◽  
Frame Structure ◽  
Inverse Laplace Transform ◽  
Two Dimensional ◽  
Beam Structure ◽  
Element Analysis ◽  
High Frequencies

Abstract Transient vibrations of flexible structures at mid- and high-frequencies have important applications in aerospace, civil, auto and ship engineering. In this paper, a new method is developed for the determination of the transient vibration solutions of two-dimensional beam frames in mid- and high-frequency regions. In the development, the governing equations of a beam frame structure are formulated by an augmented Distributed Transfer Function Method (DTFM), without the need for discretization and approximation. The augmented DTFM differs from the traditional DTFM in that it does not contain the singularities of subsystem transfer functions, which is crucially important in a mid- or high-frequency analysis. The proposed method delivers exact eigensolutions of a beam structure from low- to high-frequencies without numerical instability. With the platform provided by the augmented DTFM, the transient response of a beam structure can be conveniently estimated by either modal expansion or the residue formula for inverse Laplace transform. A highlight of the augmented DTFM lies in that detailed information at mid- and high-frequencies, such as local displacement, slope, bending moment and shear force at any point, can be obtained, which otherwise may be difficult with conventional methods for mid- and high-frequency analysis. The proposed method is illustrated on several examples and is computationally efficient and stable from low- to high-frequency regions. In the numerical simulation, the augmented DTFM is shown to produce more accurate results than traditional finite element analysis (FEA). The proposed method is extensible to three-dimensional beam structures.

Numerical Simulation of Welding for Box Beam Structure on Bogie of High Speed Train

2011 ◽  
Vol 399-401 ◽  
pp. 1816-1819
Author(s):  
Huan Jun Liu ◽  
Jian Xin Liu ◽  
Hui Chen ◽  
Hua Ji ◽  
Zhi Yi Zhang
Keyword(s):  
Numerical Simulation ◽  
Residual Stress ◽  
High Speed ◽  
Weathering Steel ◽  
Beam Structure ◽  
Element Analysis ◽  
Box Beam ◽  
Welding Sequence ◽  
Side Beam ◽  
Welding Sequences

In this paper a typical box beam structure on certain high speed power car was taken as study object, Based on the finite element analysis software SYSWELD, established the material parameters database for SMA490BW weathering steel, and performed the numerical simulation for the welding of typical box beam structure of side beam of high speed bogie, comparison between the simulation results and that of experiment test verified the existing welding procedures. For the purpose of studying the influence of welding sequence on the residual stress and providing theoretical support for actual production, the residual stress under different welding sequences was investigated then.

Research on Deforming Law of Beam Structure

2011 ◽  
Vol 101-102 ◽  
pp. 1114-1118
Author(s):  
Feng Xu
Keyword(s):  
Concrete Beam ◽  
Plain Concrete ◽  
Bending Test ◽  
Damage Effect ◽  
Analysis Software ◽  
Beam Structure ◽  
Element Analysis ◽  
New Methods ◽  
Concrete Damage ◽  
Beam Bending

The equations of damage evolution of cross-section and the deflection deformation of concrete beam were established. Through the plain concrete beam bending test, the formula for calculating the deflection was verified. It is proved that the formula established in this paper is more accurate than the equation that doesn’t consider the damage effect. The concrete beam was modelled and analyzed by means of finite element analysis software, and comparison was carried out between the numerical simulation result and the experimental data. On the basis, new methods and ideas about concrete-damage were proposed.

Design of Heating Coils Based on Space-Filling Fractal Curves for Highly Uniform Temperature Distribution

MRS Advances ◽  
2020 ◽  
Vol 5 (18-19) ◽  
pp. 1007-1015
Author(s):  
Karnati Kumar Sai Charan ◽  
Seshadri Reddy Nagireddy ◽  
Sumana Bhattacharjee ◽  
Aftab M Hussain
Keyword(s):  
Performance Indicator ◽  
Target Area ◽  
Temperature Uniformity ◽  
Hilbert Curve ◽  
Space Filling ◽  
Element Analysis ◽  
Heating Coil ◽  
Peano Curve ◽  
Heating Coils ◽  
Highly Uniform

AbstractHeating coils utilize the concept of resistive heating to convert electrical energy into thermal energy. Uniform heating of the target area is the key performance indicator for heating coil design. Highly uniform distribution of temperature can be achieved by using a dense metal distribution in the area under consideration, however, this increases the cost of production significantly. A low-cost and efficient heating coil should have excellent temperature uniformity while having minimum metal consumption. In this work, space-filling fractal curves, such as Peano curve, Hilbert curve and Moore curve of various orders, have been studied as geometries for heating coils. In order to compare them in an effective way, the area of the geometries has been held constant at 30 mm × 30 mm and a constant power of 2 W has been maintained across all the geometries. Further, the thickness of the metal coils and their widths have been kept constant for all geometries. Finite Element Analysis (FEA) results show Hilbert and Moore curves of order-4, and Peano curve of order-3 outperform the typical double-spiral heater in terms of temperature uniformity and metal coil length.

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