Effect of Plating Current Density and Frequency on the Crystallographic Texture of Electrodeposited Copper

2010 ◽  
Vol 638-642 ◽  
pp. 2841-2845 ◽  
Author(s):  
Ya Wen Lin ◽  
Jui Chao Kuo ◽  
Kuan Tai Lui ◽  
Delphic Chen
Keyword(s):  
Current Density ◽  
Crystallographic Texture ◽  
Electron Backscatter Diffraction ◽  
Preferred Orientation ◽  
High Yield ◽  
Grain Boundary Character Distribution ◽  
Grain Boundary Character ◽  
Microelectronic Technology ◽  
Backscatter Diffraction ◽  
The Relationship

For interconnect materials in the microelectronic technology copper has replaced aluminum due to its lower resistivity, higher thermal conductivity and better electromigration resistance. Recently, it was found that nanotwinned copper exhibits ultra high yield strength, ductility and electrical conductivity. Therefore, in this study the effect of plating current density and frequency were investigated on the crystallographic texture of Cu electrodeposited to understand the twin character. Electron backscatter diffraction (EBSD) was used for characterizing the preferred orientation, grain size distribution, and grain boundary character distribution. Three kinds of <110>, <111> and <112> textures were found to be related with the electrodeposited parameters of current density and frequency. Here we will discuss the relationship between the preferred orientation and the electrodeposited parameters.

Grain Boundary Engineering: Progress and Challenges

2007 ◽  
Vol 539-543 ◽  
pp. 3389-3394 ◽  
Author(s):  
Wei Guo Wang
Keyword(s):  
Grain Boundary ◽  
Grain Boundaries ◽  
Electron Backscatter Diffraction ◽  
Coincidence Site Lattice ◽  
Grain Boundary Character Distribution ◽  
Grain Boundary Engineering ◽  
Special Boundaries ◽  
Grain Boundary Character ◽  
Proposed Model ◽  
Backscatter Diffraction

The progress of grain boundary engineering (GBE) is overviewed and the challenges for further investigations emphasized. It points out that, the electron backscatter diffraction (EBSD) reconstruction of grain boundaries, which gives the information of connectivity interruption of general high angle boundaries (HABs), is more significant than purely pursuing high frequency of so-called special boundaries. The criterion for the optimization of grain boundary character distribution (GBCD) needs to be established. The energy spectrum and the degradation susceptibility of grain boundaries of various characters including HABs and low Σ（Σ≤29） coincidence site lattice (CSL) needs to be studied and ascertained. And finally, the newly proposed model of non-coherent Σ3 interactions for GBCD optimization are discussed.

scholarly journals Recent Advances in EBSD Characterization of Metals

Metals ◽  
2020 ◽  
Vol 10 (8) ◽  
pp. 1097
Author(s):  
Íris Carneiro ◽  
Sónia Simões
Keyword(s):  
Grain Boundary ◽  
Electron Backscatter Diffraction ◽  
Microstructural Characterization ◽  
Grain Boundary Character Distribution ◽  
Grain Boundary Character ◽  
Recent Advances ◽  
Wide Range ◽  
Plane Distribution ◽  
Backscatter Diffraction

Electron backscatter diffraction (EBSD) has been attracting enormous interest in the microstructural characterization of metals in recent years. This characterization technique has several advantages over conventional ones, since it allows obtaining a wide range of characterization possibilities in a single method, which is not possible in others. The grain size, crystallographic orientation, texture, and grain boundary character distribution can be obtained by EBSD analysis. Despite the limited resolution of this technique (20–50 nm), EBSD is powerful, even for nanostructured materials. Through this technique, the microstructure can be characterized at different scales and levels with a high number of microstructural characteristics. It is known that the mechanical properties are strongly related to several microstructural aspects such as the size, shape, and distribution of grains, the presence of texture, grain boundaries character, and also the grain boundary plane distribution. In this context, this work aims to describe and discuss the possibilities of microstructural characterization, recent advances, the challenges in sample preparation, and the application of the EBSD in the characterization of metals.

Characterization of Grain Boundaries in Recrystallized L12-Type Intermetallic Alloys

2005 ◽  
Vol 502 ◽  
pp. 151-156
Author(s):  
Yasuyuki Kaneno ◽  
Takayuki Takasugi
Keyword(s):  
Grain Boundaries ◽  
Electron Backscatter Diffraction ◽  
Stacking Fault ◽  
Grain Boundary Character Distribution ◽  
Grain Boundary Character ◽  
Disordered Alloys ◽  
Σ3 Boundary ◽  
Fcc Alloy ◽  
Backscatter Diffraction

Microstructural feature of the recrystallized Co-based (Co3Ti) and Ni-based (Ni3(Si,Ti) and Ni3Fe) ordered alloys with L12 structure was investigated by the electron backscatter diffraction (EBSD) method, with emphasis on grain boundary character distribution (GBCD). For comparison, the GBCDs of the recrystallized Co-Ni, Ni-Fe and 70/30 brass disordered alloys, and also copper, nickel and aluminum pure metals with A1 (fcc) structure, which have widely different stacking fault energies, were also determined. The frequency of Σ3 boundary for the Co-based alloys was higher than that for the Ni-based alloys, regardless of ordered L12 alloy or disordered fcc alloy, indicating that the frequency of Σ3 boundary was primarily dominated by stacking fault energy. Furthermore, the effect of ordering energy on structure and energy of the grain boundaries including Σ3 boundary in the ordered L12 alloys was discussed.

Rietveld texture analysis from TOF neutron diffraction data

2010 ◽  
Vol 25 (3) ◽  
pp. 283-296 ◽  
Author(s):  
H.-R. Wenk ◽  
L. Lutterotti ◽  
S. C. Vogel
Keyword(s):  
Neutron Diffraction ◽  
Texture Analysis ◽  
Electron Backscatter Diffraction ◽  
Computer Code ◽  
Preferred Orientation ◽  
Complex Data ◽  
Ambient Conditions ◽  
Science Center ◽  
Step Procedure ◽  
Backscatter Diffraction

One of the advantages of a multidetector neutron time-of-flight diffractometer such as the high pressure preferred orientation diffractometer (HIPPO) at the Los Alamos Neutron Science Center is the capability to measure efficiently preferred orientation of bulk materials. A routine experimental method for measurements, both at ambient conditions, as well as high or low temperatures, has been established. However, only recently has the complex data analysis been streamlined to make it straightforward for a noninitiated user. Here, we describe the Rietveld texture analysis of HIPPO data with the computer code Materials Analysis Using Diffraction (MAUD) as a step-by-step procedure and illustrate it with a metamorphic quartz rock. Postprocessing of the results is described and neutron diffraction results are compared with electron backscatter diffraction measurements on the same sample.

scholarly journals Using electron backscatter diffraction to measure full crystallographic orientation in Antarctic land-fast sea ice

2018 ◽  
Vol 64 (247) ◽  
pp. 771-780 ◽  
Author(s):  
PAT WONGPAN ◽  
DAVID J. PRIOR ◽  
PATRICIA J. LANGHORNE ◽  
KATHERINE LILLY ◽  
INGA J. SMITH
Keyword(s):  
Sea Ice ◽  
Crystallographic Orientation ◽  
Electron Backscatter Diffraction ◽  
Preferred Orientation ◽  
Angle Distribution ◽  
Crystal Preferred Orientation ◽  
Electron Backscatter ◽  
Backscatter Diffraction ◽  
First Time ◽  
Platelet Ice

ABSTRACTWe have mapped the full crystallographic orientation of sea ice using electron backscatter diffraction (EBSD). This is the first time EBSD has been used to study sea ice. Platelet ice is a feature of sea ice near ice shelves. Ice crystals accumulate as an unconsolidated sub-ice platelet layer beneath the columnar ice (CI), where they are subsumed by the advancing sea–ice interface to form incorporated platelet ice (PI). As is well known, in CI the crystal preferred orientation comprises dominantly horizontal c-axes, while PI has c-axes varying between horizontal and vertical. For the first time, this study shows the a-axes of CI and PI are not random. Misorientation analysis has been used to illuminate the possible drivers of these alignments. In CI the misorientation angle distribution from random pairs and neighbour pairs of grains are indistinguishable, indicating the distributions are a consequence of crystal preferred orientation. Geometric selection during growth will develop the a-axis alignment in CI if ice growth in water is fastest parallel to the a-axis, as has previously been hypothesised. In contrast, in PI random-pair and neighbour-pair misorientation distributions are significantly different, suggesting mechanical rotation of crystals at grain boundaries as the most likely explanation.

Determining the orientation of parent β grain from one α variant in titanium alloys

2018 ◽  
Vol 51 (4) ◽  
pp. 1125-1132 ◽  
Author(s):  
Z. B. Zhao ◽  
Q. J. Wang ◽  
H. Wang ◽  
J. R. Liu ◽  
R. Yang
Keyword(s):  
Titanium Alloys ◽  
Habit Plane ◽  
Electron Backscatter Diffraction ◽  
Three Dimensional ◽  
Dimensional Structure ◽  
Plane Normal ◽  
Β Phase ◽  
Microstructural Morphology ◽  
Backscatter Diffraction ◽  
The Relationship

The relationship between the crystallographic orientation and habit plane normal of transformed α laths in titanium alloys is discussed according to the Burgers orientation relationship and the three-dimensional structure of the α lath. A new method (orientation–trace method) is developed to determine the orientation of the parent β phase using the orientation of the α lath, which was measured by electron backscatter diffraction, and the microstructural morphology of that α variant. This approach is validated in a near-α titanium alloy. Moreover, the habit plane normal direction of the transformed α lath can be obtained from the crystallographic orientations of the α lath itself and its parent β grain. The verification and the corresponding discussion show the reliability of this approach.

scholarly journals Coupling Automated Electron Backscatter Diffraction with Transmission Electron and Atomic Force Microscopies

2000 ◽  
Vol 6 (S2) ◽  
pp. 940-941
Author(s):  
A.J. Schwartz ◽  
M. Kumar ◽  
P.J. Bedrossian ◽  
W.E. King
Keyword(s):  
Grain Boundary ◽  
Grain Boundaries ◽  
Thermomechanical Processing ◽  
Electron Backscatter Diffraction ◽  
Grain Boundary Character Distribution ◽  
Atomic Force ◽  
Transmission Electron ◽  
Electron Backscatter ◽  
Network Engineering ◽  
Backscatter Diffraction

Grain boundary network engineering is an emerging field that encompasses the concept that modifications to conventional thermomechanical processing can result in improved properties through the disruption of the random grain boundary network. Various researchers have reported a correlation between the grain boundary character distribution (defined as the fractions of “special” and “random” grain boundaries) and dramatic improvements in properties such as corrosion and stress corrosion cracking, creep, etc. While much early work in the field emphasized property improvements, the opportunity now exists to elucidate the underlying materials science of grain boundary network engineering. Recent investigations at LLNL have coupled automated electron backscatter diffraction (EBSD) with transmission electron microscopy (TEM)5 and atomic force microscopy (AFM) to elucidate these fundamental mechanisms.An example of the coupling of TEM and EBSD is given in Figures 1-3. The EBSD image in Figure 1 reveals “segmentation” of boundaries from special to random and random to special and low angle grain boundaries in some grains, but not others, resulting from the 15% compression of an Inconel 600 polycrystal.

Local Texture and Electromigration in Fine Line Microelectronic Aluminum Metallization

1994 ◽  
Vol 343 ◽  
Author(s):  
J. L. Hurd ◽  
K. P. Rodbell ◽  
D. B. Knorr ◽  
N. L. Koligman
Keyword(s):  
Electron Backscatter Diffraction ◽  
Fiber Texture ◽  
X Ray Diffraction ◽  
Aluminum Films ◽  
Pole Figures ◽  
Grain Orientations ◽  
Aluminum Metallization ◽  
Backscatter Diffraction ◽  
Relationship Of ◽  
The Relationship

ABSTRACTAluminum films 1 μm thick were deposited on oxidized silicon by sputtering and partially ionized beam evaporation to vary the crystallographic texture. These films were patterned into lines and subsequently annealed at 400 °C for 1 h. A strong correlation between the electromigration behavior and the blanket film texture (X-ray diffraction (XRD) / pole figures) has been reported previously for these films. In this work, an Electron Backscatter Diffraction (EBSD) a.k.a. Backscatter Kikuchi Diffraction (BKD) technique was employed using a scanning electron microscope (SEM) to interrogate individual grain orientations. BKD pole figures were acquired for lines ≥0.3 μm wide and for blanket (pad) regions. Identical, inverse pole figures were found for blanket films measured using both XRD and BKD (pads). Furthermore, the BKD (111) fiber texture shows a line width dependency, with narrow lines having a slightly improved texture over blanket (pad) regions. Local grain orientations were investigated near and within electromigration testing sites with characteristic void and hillock morphologies. The relationship of neighboring grain orientations to electromigration damage is shown.

Transpressional deformation in the mantle below the North Anatolian fault system, Turkey

2020 ◽  
Author(s):  
Basil Tikoff ◽  
Vasili Chatzaras ◽  
Timothy Chapman ◽  
Naomi Barshi ◽  
Ercan Aldanmaz ◽  
...  
Keyword(s):  
Fault Zone ◽  
Electron Backscatter Diffraction ◽  
Preferred Orientation ◽  
North Anatolian Fault ◽  
Mantle Xenoliths ◽  
Fault System ◽  
Alkali Basalts ◽  
Crystallographic Preferred Orientation ◽  
The North ◽  
Backscatter Diffraction

&lt;p&gt;The North Anatolian Fault Zone (NAFZ) is a 1200-km-long, dextral intracontinental transform fault zone, and initiated ca. 13&amp;#8211;11 Ma ago.&amp;#160; The NAFZ formed in response to the N-S convergence of the Eurasian and Arabian plates, accommodated by the westward motion of the Anatolia plate relative to Eurasia plate.&amp;#160; Mantle xenoliths were sampled in late Miocene (11.68&amp;#177;0.25 to 6.47&amp;#177;0.47 Ma) alkali basalts and basanites, immediately N of the trace of the North Anatolian fault, and were previously interpreted to sample the mantle portion of the North Anatolian fault/shear zone at depth.&amp;#160; The studied xenoliths are mainly spinel lherzolites and harzburgites.&amp;#160; Equilibration temperatures estimated from two-pyroxene geothermometers range from 775 to 975 &amp;#176;C, while pressures estimated from the Cr in clinopyroxene geobarometer and pseudosection modelling range from 12 to 22 kbar, which correspond to depths of 40&amp;#8211;80 km.&amp;#160; We used high&amp;#8208;resolution X-ray computed tomography to quantify the xenolith fabric defined by the 3D shape preferred orientation of spinel grains.&amp;#160; Spinel displays dominantly oblate fabric ellispoids, consistent with flattening strain.&amp;#160; Olivine has two main crystallographic preferred orientation patterns, the axial-[010] and the A-type, determined with electron backscatter diffraction.&amp;#160; The axial-[010] pattern is consistent with the spinel fabric and other microstructures that show flattening strains.&amp;#160; To further constrain the strain path, we analyze the crystallographic vorticity axes in olivine, which show a complex pattern.&amp;#160; Our results are consistent with an interpretation of transpressional deformation in the upper mantle below the NAFZ, during the early stages of the development of the transform system.&amp;#160; Transpressional deformation is consistent with collision-induced, strike-slip extrusion of Anatolia.&lt;/p&gt;

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