300 mm Wafer Development for Pattern Collapse Evaluations

2018 ◽  
Vol 282 ◽  
pp. 207-210
Author(s):  
Xiu Mei Xu ◽  
Tao Zheng ◽  
Mohamed Saib ◽  
Farid Sebaai ◽  
Jeroen van de Kerkhove ◽  
...  
Keyword(s):  
Mechanical Property ◽  
Quantitative Analysis ◽  
Aspect Ratio ◽  
Analysis Techniques ◽  
The Past ◽  
Drying Techniques ◽  
Wet Processing ◽  
Different Dimensions ◽  
Wafer Test ◽  
Collapse Rate

Over the past decade, many advanced drying techniques have been developed to reduce and prevent pattern collapse of high aspect ratio (HAR) structures after wet processing. However, different dimensions, profiles and materials of HAR structures used in literature make it difficult to compare the efficiency of different drying processes. In this work, standard 300 mm wafer test structures, characterization and analysis techniques have been developed for quantitative analysis of pattern collapse rate as a function of the intrinsic mechanical property of HAR structures. Such standardized single wafer evaluations are important for benchmarking different drying techniques.

Quantitative analysis of the effect of α-phase on mechanical property of Ti-6Al-4V alloy during hot working process

2015 ◽  
Vol 29 (10n11) ◽  
pp. 1540012
Author(s):  
Yuanfei Han ◽  
Xiaofang Yang ◽  
Weidong Zeng ◽  
Weijie Lu
Keyword(s):  
Mechanical Properties ◽  
Mechanical Property ◽  
Quantitative Analysis ◽  
Aspect Ratio ◽  
Volume Fraction ◽  
Aging Treatment ◽  
Hot Working ◽  
Working Process ◽  
Height Reduction ◽  
Α Phase

In this paper, the morphologic evolution of α-phases and their influence on mechanical properties during the hot working process of the Ti-6Al-4V alloy has been quantitatively investigated. Samples with a variety of different features of α-phase were obtained by hot working. A quantitative analysis of SEM/OM images is carried out to determine the features of α-phase before and after deformation, including the length, thickness, aspect ratio and volume fraction of α-phase. It was found that the α-phase platelet thickness increases with the increasing of forging height reduction on subsequent solution and aging treatment, larger height reduction would reduce the aspect ratio and length of α-phase and further makes the α-phase closest to equiaxed morphology. Moreover, the influence of the α-phase features on the mechanical properties was systematically investigated. The results indicate that the mechanical properties are strongly determined by the features of the α-phase, especially the thickness and volume fraction of the α-phase. This work will optimize the mechanical property by means of microstructural control and deepen the understanding of influence of α-phase features on the mechanical properties.

An example of spectrum imaging used for comparison of EELS quantitative analysis techniques on Al-Li

1991 ◽  
Vol 49 ◽  
pp. 726-727
Author(s):  
John A. Hunt
Keyword(s):  
Quantitative Analysis ◽  
Large Data ◽  
Difference Spectrum ◽  
Large Data Sets ◽  
Foil Thickness ◽  
Data Sets ◽  
Analysis Techniques ◽  
Spectrum Imaging ◽  
Normal Spectrum ◽  
Electron Energy Loss

Spectrum-imaging is a useful technique for comparing different processing methods on very large data sets which are identical for each method. This paper is concerned with comparing methods of electron energy-loss spectroscopy (EELS) quantitative analysis on the Al-Li system. The spectrum-image analyzed here was obtained from an Al-10at%Li foil aged to produce δ' precipitates that can span the foil thickness. Two 1024 channel EELS spectra offset in energy by 1 eV were recorded and stored at each pixel in the 80x80 spectrum-image (25 Mbytes). An energy range of 39-89eV (20 channels/eV) are represented. During processing the spectra are either subtracted to create an artifact corrected difference spectrum, or the energy offset is numerically removed and the spectra are added to create a normal spectrum. The spectrum-images are processed into 2D floating-point images using methods and software described in [1].

Bence-albee after 25 years: A new superior α-factor correction procedure for the quantitative analysis of oxides and silicates

1992 ◽  
Vol 50 (2) ◽  
pp. 1744-1745
Author(s):  
John T. Armstrong
Keyword(s):  
Quantitative Analysis ◽  
Electron Microprobe ◽  
Binary Systems ◽  
Correction Procedure ◽  
Geological Samples ◽  
The Past ◽  
Large Matrix ◽  
Computational Speed ◽  
Microprobe Data ◽  
Geological Sciences

One of the most cited papers in the geological sciences has been that of Albee and Bence on the use of empirical " α -factors" to correct quantitative electron microprobe data. During the past 25 years this method has remained the most commonly used correction for geological samples, despite the facts that few investigators have actually determined empirical α-factors, but instead employ tables of calculated α-factors using one of the conventional "ZAF" correction programs; a number of investigators have shown that the assumption that an α-factor is constant in binary systems where there are large matrix corrections is incorrect (e.g, 2-3); and the procedure’s desirability in terms of program size and computational speed is much less important today because of developments in computing capabilities. The question thus exists whether it is time to honorably retire the Bence-Albee procedure and turn to more modern, robust correction methods. This paper proposes that, although it is perhaps time to retire the original Bence-Albee procedure, it should be replaced by a similar method based on compositiondependent polynomial α-factor expressions.

Quantitative surface damage studies by H.R.E.M.

1989 ◽  
Vol 47 ◽  
pp. 632-633
Author(s):  
S. R. Singh ◽  
H. J. Fan ◽  
L. D. Marks
Keyword(s):  
Solar Wind ◽  
Quantitative Analysis ◽  
Surface Science ◽  
Surface Damage ◽  
Space Environment ◽  
Oxygen Desorption ◽  
The Past ◽  
Diffusion Controlled ◽  
Original Observation ◽  
Substantial Interest

Since the original observation that the surfaces of materials undergo radiation damage in the electron microscope similar to that observed by more conventional surface science techniques there has been substantial interest in understanding these phenomena in more detail; for a review see. For instance, surface damage in a microscope mimics damage in the space environment due to the solar wind and electron beam lithographic operations.However, purely qualitative experiments that have been done in the past are inadequate. In addition, many experiments performed in conventional microscopes may be inaccurate. What is needed is careful quantitative analysis including comparisons of the behavior in UHV versus that in a conventional microscope. In this paper we will present results of quantitative analysis which clearly demonstrate that the phenomena of importance are diffusion controlled; more detailed presentations of the data have been published elsewhere.As an illustration of the results, Figure 1 shows a plot of the shrinkage of a single, roughly spherical particle of WO3 versus time (dose) driven by oxygen desorption from the surface.

The wellness habits of men and women in the Northern Great Plain Region

2020 ◽  
Vol 13 (2) ◽  
pp. 123-130
Author(s):  
Péter HIDVÉGI ◽  
◽  
Andrea Puskás LENTÉNÉ ◽  
József Márton PUCSOK ◽  
Melinda BÍRÓ ◽  
...  
Keyword(s):  
Great Plain ◽  
Social Changes ◽  
Northern Great Plain ◽  
Health Tourism ◽  
The Past ◽  
Self Confidence ◽  
Plain Region ◽  
Body And Soul ◽  
Different Dimensions ◽  
Time Changes

In the past decades, the harmony of body and soul was getting more and more important,the balance, the self-confidence, and the positive-being, which is supported mostly by health tourism,so this section is improving with huge steps to serve the increasing needs fluently. For the effect of the consecutive social changes, the rules of genders have also changed. At the same time changes could be realized in the consumption habits of different genders. The resource took place from September to December 2018. It happened with a questionnaire survey; we asked the customers of hotels in the Northern Great Plain Region, and the answering was optional – they do it on their own choice. We investigated the participants' data through different dimensions and look for the answer to the question along these dimensions that which specifies had the service customers.

Fluorocarbon Precursor for High Aspect Ratio via Milling in Focused Ion Beam Modification of Integrated Circuits

2004 ◽  
Author(s):  
Valery Ray
Keyword(s):  
Side Effects ◽  
Aspect Ratio ◽  
Integrated Circuits ◽  
High Aspect Ratio ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Enabling Technology ◽  
Si Substrate ◽  
Ion Beam Modification ◽  
The Past

Abstract Gas Assisted Etching (GAE) is the enabling technology for High Aspect Ratio (HAR) circuit access via milling in Focused Ion Beam (FIB) circuit modification. Metal interconnect layers of microelectronic Integrated Circuits (ICs) are separated by Inter-Layer Dielectric (ILD) materials, therefore HAR vias are typically milled in dielectrics. Most of the etching precursor gases presently available for GAE of dielectrics on commercial FIB systems, such as XeF2, Cl2, etc., are also effective etch enhancers for either Si, or/and some of the metals used in ICs. Therefore use of these precursors for via milling in dielectrics may lead to unwanted side effects, especially in a backside circuit edit approach. Making contacts to the polysilicon lines with traditional GAE precursors could also be difficult, if not impossible. Some of these precursors have a tendency to produce isotropic vias, especially in Si. It has been proposed in the past to use fluorocarbon gases as precursors for the FIB milling of dielectrics. Preliminary experimental evaluation of Trifluoroacetic (Perfluoroacetic) Acid (TFA, CF3COOH) as a possible etching precursor for the HAR via milling in the application to FIB modification of ICs demonstrated that highly enhanced anisotropic milling of SiO2 in HAR vias is possible. A via with 9:1 aspect ratio was milled with accurate endpoint on Si and without apparent damage to the underlying Si substrate.

FAKTOR YANG MEMPENGARUHI BEHAVIOR INTENTION UNTUK PENGGUNAAN APLIKASI DOMPET DIGITAL MENGGUNAKAN MODEL UTAUT2

2020 ◽  
Vol 25 (2) ◽  
pp. 111-122
Author(s):  
Aries Andrianto
Keyword(s):  
Sem Analysis ◽  
Electronic Money ◽  
Analysis Techniques ◽  
Behavior Intention ◽  
The Past ◽  
Performance Expectancy ◽  
Effort Expectancy ◽  
Facilitating Conditions ◽  
Positive Effect ◽  
Digital Wallet

Based on Bank Indonesia data, electronic money transactions have grown rapidly in the past 10 years. Throughout 2018, the volume of electronic money transactions was 2.92 billion transactions, growing 16,600 times compared to 2009.This study aims to analyze the factors that influence interest in using the LinkAja digital wallet using the UTAUT 2 method. The object of this study is the LinkAja digital wallet user who is domiciled in Jakarta. The independent variables examined in this study were Performance Expectancy, Effort Expectancy, Social Influence, Facilitating Conditions, Hedonic Motivation, and Habit on Behavior Intention using PLS-SEM analysis techniques. The results of this study indicate that Price Value has a positive effect on Behavior Intention.

Pattern Collapse of High-Aspect-Ratio Silicon Nanostructures - A Parametric Study

2016 ◽  
Vol 255 ◽  
pp. 136-140 ◽  
Author(s):  
Nandi Vrancken ◽  
Guy Vereecke ◽  
Stef Bal ◽  
Stefanie Sergeant ◽  
Geert Doumen ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Silicon Nanostructures ◽  
Complete Structure ◽  
Chemically Modified ◽  
Chemically Modified Surfaces ◽  
Modified Surfaces ◽  
Wet Processing ◽  
Modification Of The Surface

This work focuses on capillary-induced collapse of high-aspect-ratio silicon nanopillars. Modification of the surface chemistry is demonstrated to be an efficient approach for reducing capillary forces and consequently reduce pattern collapse. Special effort is spent on determination of the wetting state of chemically modified surfaces as complete structure wetting is of utmost importance in wet processing. In light of this, an ATR-FTIR based method has been developed to unambiguously distinguish between wetting and non-wetting states.

scholarly journals ISLAM YANG RAHMAT DALAM MEMBANGUN UMAT STUDI TERHADAP DAKWAH PAIF KABUPATEN SLEMAN

2014 ◽  
Vol 4 (3) ◽  
Author(s):  
H.M. Kholili, Syamsul Hadi, dan Subejo
Keyword(s):  
Quantitative Analysis ◽  
Mixed Method ◽  
Sem Analysis ◽  
Muslim Population ◽  
Analysis Techniques ◽  
Competence Factor

Islamic that mercy has been encouraging for his people, therefore Islamic concept that was delivered by Islamicpreachers has given benefit and welfare of the inner and outer life. In fact, poor Muslim population reaches23 %, while most of them have not been routinely practicing the tought of Islam. This paper aims to analyzethe competence factor of preachers (PAIF) effect on the activity of preaching; and analyze the preachingcomponents a PAIF affects to preaching effects. This research was conducted in Sleman Yogyakarta by usinga mixed method of quantitative analysis that is supported by SEM analysis techniques. The research resultsshowed that: a PAIF required to has competence in understanding the socio-cultural and communicate well sothat he can design the preaching messages that fit to the needs of targeted community. Encouraging preachingactivities can be organized through: setting the theme of preaching messages that support the needs of followers;presented by giving motivation; balancing the use of preaching methods and the preaching extension methods,as well as utilizing other forms of communication appropriately and optimally.

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