scholarly journals Automated Linescan Analysis for CMP Modeling

2020 ◽  
pp. 122-130
Author(s):  
Ruben Ghulghazaryan ◽  
Davit Piliposyan ◽  
Suren Alaverdyan
Keyword(s):  
Model Building ◽  
Turnaround Time ◽  
Mechanical Polishing ◽  
Semiconductor Chip ◽  
Requirements Modeling ◽  
Correct Pattern ◽  
Test Chips ◽  
The Cost ◽  
Cmp Modeling ◽  
Cmp Model

Many of the process steps used in semiconductor chip manufacturing require planar (smooth) surfaces on the wafer to ensure correct pattern printing and generation of multilevel interconnections in the chips during manufacturing. Chemical-mechanical polishing/planarization (CMP) is the primary process used to achieve these surface planarity requirements. Modeling of CMP processes allows users to detect and fix large surface planarity variations (hotspots) in the layout prior to manufacturing. Fixing hotspots before tape-out may significantly reduce turnaround time and the cost of manufacturing. Creating an accurate CMP model that takes into account complicated chemical and mechanical polishing mechanisms is challenging. Measured data analysis and extraction of erosion and dishing data from profile linescans from test chips are important steps in CMP model building. Measured linescans are often tilted and noisy, which makes the extraction of erosion and dishing data more difficult. The development and implementation of algorithms used to perform automated linescan analysis may significantly reduce CMP model building time and improve the accuracy of the models. In this work, an automated linescan analysis (ALSA) tool is presented that performs automated linescan delineation, test pattern separation, and automatic extraction of erosion and dishing values from linescan data.

scholarly journals Kinetic mixing, dark photons and extra dimensions. Part III. Brane localized dark matter

2021 ◽  
Vol 2021 (3) ◽  
Author(s):  
Thomas G. Rizzo ◽  
George N. Wojcik
Keyword(s):  
Dark Matter ◽  
Extra Dimensions ◽  
Model Building ◽  
New Physics ◽  
Model Complexity ◽  
Complex Scalar ◽  
Dark Photon ◽  
Complex Models ◽  
The Cost ◽  
D Model

Abstract Extra dimensions have proven to be a very useful tool in constructing new physics models. In earlier work, we began investigating toy models for the 5-D analog of the kinetic mixing/vector portal scenario where the interactions of dark matter, taken to be, e.g., a complex scalar, with the brane-localized fields of the Standard Model (SM) are mediated by a massive U(1)D dark photon living in the bulk. These models were shown to have many novel features differentiating them from their 4-D analogs and which, in several cases, avoided some well-known 4-D model building constraints. However, these gains were obtained at the cost of the introduction of a fair amount of model complexity, e.g., dark matter Kaluza-Klein excitations. In the present paper, we consider an alternative setup wherein the dark matter and the dark Higgs, responsible for U(1)D breaking, are both localized to the ‘dark’ brane at the opposite end of the 5-D interval from where the SM fields are located with only the dark photon now being a 5-D field. The phenomenology of such a setup is explored for both flat and warped extra dimensions and compared to the previous more complex models.

Blade Diamond Disk for Conditioning CMP Polishing Pad

2010 ◽  
Vol 97-101 ◽  
pp. 3-6 ◽  
Author(s):  
Ming Yi Tsai
Keyword(s):  
Surface Roughness ◽  
Epoxy Resin ◽  
Chemical Mechanical Polishing ◽  
Polycrystalline Diamond ◽  
Mechanical Polishing ◽  
Height Variation ◽  
Surface Textures ◽  
Diamond Disk ◽  
Diamond Conditioner ◽  
The Cost

A diamond conditioner or dresser is needed to regenerate the asperity structure of the pad and recover its designed ability in chemical mechanical polishing (CMP) process. In this paper a new design of diamond conditioner is made by shaping a sintered matrix of polycrystalline diamond (PCD) to form teethed blades. These blades are arranged and embedded in epoxy resin to make a designed penetration angle, called the blade diamond disk. The dressing characteristics of pad surface textures are studied by comparison with conventional diamond conditioner. It is found that the height variation of the diamond tip of blade diamond disk is significantly smaller than the conventional diamond disk. The dressing rate of blade diamond disk is lower than that of the conventional diamond disk, and hence the pad life is prolonged. As a result, reduction of the cost CMP is expected. In addition the pad surface roughness Ra of about 3.79μm is less than Ra of about 4.15μm obtained after dressing using a conventional diamond disk.

Receiver Initiated Deadline Aware Load Balancing Strategy (RDLBS) for Cloud Environment

2017 ◽  
Vol 8 (3) ◽  
pp. 53-73
Author(s):  
Raza Abbas Haidri ◽  
Chittaranjan Padmanabh Katti ◽  
Prem Chandra Saxena
Keyword(s):  
Cloud Computing ◽  
Performance Evaluation ◽  
Load Balancing ◽  
Virtual Machines ◽  
Turnaround Time ◽  
Cloud Environment ◽  
Computing Technology ◽  
Trade Off ◽  
The Cost ◽  
State Of Art

The emerging cloud computing technology is the attention of both commercial and academic spheres. Generally, the cost of the faster resource is more than the slower ones, therefore, there is a trade-off between deadline and cost. In this paper, the authors propose a receiver initiated deadline aware load balancing strategy (RDLBS) which tries to meet the deadline of the requests and optimizes the rate of revenue. RDLBS balances the load among the virtual machines (VMs) by migrating the request from the overloaded VMs to underloaded VMs. Turnaround time is also computed for the performance evaluation. The experiments are conducted by using CloudSim simulator and results are compared with existing state of art algorithms with similar objectives.

scholarly journals A Study on the Pattern Effects of Chemical Mechanical Planarization with CNN-Based Models

Electronics ◽  
2020 ◽  
Vol 9 (7) ◽  
pp. 1158
Author(s):  
Han Bao ◽  
Lan Chen ◽  
Bowen Ren
Keyword(s):  
Neural Network ◽  
Integrated Circuits ◽  
Surface Morphology ◽  
Chemical Mechanical Polishing ◽  
Chemical Mechanical Planarization ◽  
Important Process ◽  
Chip Surface ◽  
Atomic Force ◽  
Test Chips ◽  
Cmp Model

Chemical mechanical polishing (CMP) has become one of the most important process stages in the fabrication of advanced integrated circuits (IC). The CMP pattern effect strongly influences the planarization of the chip surface morphology after CMP, degrading the performance and the yield of the circuits. In this paper, we introduce a method to predict the post-CMP surface morphology with a convolutional neural network (CNN)-based CMP model. Then, CNN-based, density step height (DSH)-based, and common neural-network-based CMP models are built to compare the accuracy of the predictions. The test chips are designed and taped out and the predictions of the three models are compared with experimental results measured by an atomic force profiler (AFP) and scanning electron microscope (SEM). The results show that CNN-based CMP models have better accuracy by taking advantage of the CNN networks to extract features from images instead of the traditional equivalent pattern parameters. The effective planarization length (EPL) is introduced and defined to make better predictions with real-time CMP models and in dummy filling tasks. Experiments are designed to show a method to solve the EPL.

Some Mechanical Models of Chemical-Mechanical Polishing Processes

2012 ◽  
Vol 528 ◽  
pp. 33-44 ◽  
Author(s):  
Robert V. Goldstein ◽  
N.M. Osipenko
Keyword(s):  
Surface Layer ◽  
Chemical Mechanical Polishing ◽  
Mechanical Load ◽  
Mechanical Polishing ◽  
Polished Surface ◽  
Actual Problem ◽  
Current State ◽  
Mechanical Models ◽  
Analytical Review ◽  
Cmp Modeling

Chemical-mechanical polishing (CMP)-a perspective technology in fabrication of micro-and nanoelectronics elements, devices and systems. The development of models of CMP processes remains to be the actual problem. It is pointed out that known CMP models do not account for the features of chemical and mechanical mechanisms of interaction of active fluid and particles with a polished surface as well as an interaction of a viscoelastic pad with the surface. A description of the elementary acts of such interaction are absent in the available models. On the base of the analytical review of the current state of the theory and problems of (CMP) modeling some approaches were suggested to the problem accounting for the complex of the phenomena of different scales determining the polishing rate such as diffusion of slurry into the surface layer and restriction of time of chemical treatment of the surface by a rough pad being under the action of a mechanical load. A model of the CMP process was developed. Within the framework of this model a dependence of the polishing rate on the loading parameters was derived. The dependence generalizes the empirical Preston law.

CMP Modeling and Characterization for Polysilicon MEMS Structures

2004 ◽  
Vol 816 ◽  
Author(s):  
Brian Tang ◽  
Duane Boning
Keyword(s):  
Integrated Circuit ◽  
Chemical Mechanical Polishing ◽  
Model Development ◽  
Mechanical Polishing ◽  
Step Height ◽  
Mems Devices ◽  
Feature Size ◽  
Pattern Density ◽  
Specific Goal ◽  
Cmp Modeling

AbstractThe current bedrock technology for integrated circuit (IC) planarization, chemical-mechanical polishing is beginning to play an important role in microelectromechnical systems (MEMS). However, MEMS devices operate with bigger feature sizes in comparison to ICs, in order to fulfill mechanical functions. We present an experiment to characterize and model a polysilicon CMP process with the specific goal of examining MEMS-sized test structures. We utilize previously discussed CMP models and examine whether assumptions from IC CMP can be applied to MEMS CMP. An analysis of the data collected points to a polishing dependence on not only pattern density, but also partly on feature size or feature configuration. The existing pattern density and step height CMP models are able to capture the major trends in up and down area polishing. However, certain layout features relevant to MEMS are difficult to predict, motivating the need for further model development and application.

scholarly journals Clinical Yield of Routine Use of Molecular Testing for Adult Outpatients with Diarrhea

2017 ◽  
Vol 4 (suppl_1) ◽  
pp. S33-S33
Author(s):  
Stephen Clark ◽  
Michael Sidlak ◽  
Amy Mathers ◽  
Melinda Poulter ◽  
James Platts-Mills
Keyword(s):  
Change Management ◽  
Salt Lake ◽  
Salt Lake City ◽  
Turnaround Time ◽  
Antimicrobial Treatment ◽  
Molecular Testing ◽  
Travel History ◽  
E Coli ◽  
Lake City ◽  
The Cost

Abstract Background Molecular diagnostics for enteropathogens increase yield while reducing turnaround time. However, many pathogens do not require specific therapy, and the cost is substantial. Methods We reviewed the use of the FilmArray GI Panel (BioFire Diagnostics, Salt Lake City, Utah) in adult outpatients at the University of Virginia and identified clinical features that could limit testing without reducing yield. We defined yield as (a) detection of a pathogen, (b) detection of a pathogen for which antimicrobial therapy is indicated, or (c) detection of a pathogen that can change management, which additionally included viral pathogens in immunocompromised patients. Results Between March 23, 2015 and February 25, 2016, we reviewed 452 tests from adult outpatients with diarrhea. A pathogen was detected in 88/452 (19.5%). The most common pathogens were: enteropathogenic E. coli (36; 8.0%), norovirus (17; 3.8%), Campylobacter (7, 1.5%), enteroaggregative E. coli (6, 1.3%), Giardia (6; 1.3%), and sapovirus (5; 1.1%). Based on clinical guidelines, antimicrobial treatment was clearly indicated for 19/452 subjects (4.2%). Limiting testing to patients with an additional enteric symptom (abdominal pain, nausea, vomiting, fecal urgency, tenesmus, or flatulence), a travel history, or an immunocompromising condition would reduce testing by 25.9%, with a treatable pathogen identified in 18/331 (5.4%) (sensitivity 94.7%, specificity 27.7%). Further modifying testing criteria to exclude subjects with vomiting, 18/288 (6.3%) had a treatable pathogen (sensitivity 94.7%, specificity 37.3%), and a pathogen which could change management was detected in 28/288 (9.7%) (sensitivity 96.6%, specificity 38.5%). Excluding immunocompromised subjects or those with a travel history, American College of Gastroenterology guidelines for testing were met by 293/348 (84.2%) with a documented duration of diarrhea, and a treatable pathogen was detected in 8/293 (2.7%) vs. 3/55 (5.5%) who did not meet testing guidelines. Conclusion Testing could be reduced by 36.3% without decreasing clinical yield by limiting testing to patients with diarrhea with an additional enteric symptom and no history of vomiting, a travel history, or an immunocompromising condition. ACG guidelines did not improve testing efficiency. Disclosures All authors: No reported disclosures.

scholarly journals Actualization of innovative technologies in road construction

2019 ◽  
Vol 6 (3) ◽  
Author(s):  
Kabanov Aleksandr ◽  
Irina Kolos ◽  
Viktoriya Chernyaeva ◽  
Aleksey Ilin ◽  
Olga Medvedeva ◽  
...  
Keyword(s):  
Economic Efficiency ◽  
Asphalt Concrete ◽  
Mechanical Performance ◽  
Road Construction ◽  
Turnaround Time ◽  
Operational Parameters ◽  
The Road ◽  
Fine Grained ◽  
Concrete Mix ◽  
The Cost

This article discusses the problems that arise in the operation of road structures. One of the most important is rutting. Indicators of resistance to rutting depend on the method of design of non-rigid pavement and operational parameters, which allows to obtain the applied method of volumetric design of asphalt mix «Superpave» (SP-19), which in our country was called «SPAS». The authors, together with the staff of the laboratory of asphalt Concrete plant – 1, monitored asphalt concrete mixtures designed according to the «Superpave» system on the asphalt mixing plant. Then tests were carried out according to the method of PNST 181-2016 on the susceptibility of asphalt concrete materials to shear deformations arising under the action of repeated passes of the loaded wheel at ambient temperature. The result of the study of rutting showed that the mixture SP-19 have predominantly traditional. More detailed research results are presented in this article. Based on the data obtained from the results, conclusions were formulated: the Studies show that the method of «Superpeyv» is updated to the requirements of technical supervision at the objects of the road complex of the Russian Federation. In conclusion, the authors have formulated conclusions on the research: a comparison of physical and mechanical performance of asphalt concrete mix SP-19 on PNST 114 and fine-grained asphalt concrete mix type A brand I shows that the shear stability in terms of the average depth of the track is higher for the brand SP-19 by 38 %; set the required mixing temperature and compaction of asphalt concrete mixture on the system «Superpeyv»; the release of a pilot batch of asphalt concrete mix of SP-19 brand at the production site of JSC «ABZ-1» showed that the recipe selected in the laboratory is reproduced in the ABZ; cores selected within the framework of technical supervision from the experimental coating and tested in the laboratory showed corresponding to the requirements of ODM 218.4.038-2017; assessment of economic efficiency at the cost of asphalt concrete mix of SP-19 brand showed a decrease of 2.2 % relative to the cost of fine-grained asphalt concrete mix; the increase in the service life of the road surface h 30–50 % by reducing rutting increases its turnaround time. At the same time, economic efficiency can reach 50 % per m2.

scholarly journals Methodology for estimating the resource of the friction vibration damper of a freight car trolley

2021 ◽  
Vol 2094 (5) ◽  
pp. 052064
Author(s):  
Oleg Cherepov ◽  
Aleksandr Antropov ◽  
Vitaliy Karmatskiy ◽  
Andrey Arkhipov ◽  
Vasiliy Lapshin
Keyword(s):  
Life Cycle ◽  
Turnaround Time ◽  
Technical Condition ◽  
Friction Model ◽  
Design Stage ◽  
Vibration Damper ◽  
Digital Twin ◽  
Scientific Substantiation ◽  
Freight Car ◽  
The Cost

Abstract The concept of digitalization of railway transport and the introduction of digital technologies provides for the creation of a “Digital Railway” based on a “Digital Twin”, including a “Digital Twin” of a car, which implements a number of information and organizational measures aimed at assessing the current technical condition of a real car during its operation; reducing the cost of the life cycle of the car; increasing the reliability of assemblies and parts (increasing the overhaul life); reduced maintenance costs; creation of a service maintenance system for freight cars throughout the life cycle. However, the wear of vibration damper parts is the most important parameter that determines the turnaround time, the volume of repairs and the dynamic qualities of the car, which requires more detailed and reliable scientific substantiation. The assessment of the wear of vibration damper parts (friction bar, friction wedge, bolster) is carried out in two ways - by direct examination of them in operation (in this case, wear is estimated by changing the linear dimensions, i.e., in mm over the service life) and according to the results of bench tests of models of vibration damper or testing samples on friction machines (in this case, wear is estimated by the mass of the worn-out material). The proposed method for predicting the wear of parts of frictional vibration dampers implements the Archard friction model, takes into account the variability of loads acting on the working surfaces, for which a method for determining the friction path under various driving conditions has been developed. The developed methodology makes it possible to evaluate their service interval at the design stage of the car’s running gears.

Four-Year Experience of Digital Slide Telepathology for Intraoperative Frozen Section Consultations in a Two-Site French Academic Department of Pathology

2020 ◽  
Vol 154 (3) ◽  
pp. 414-423
Author(s):  
Astrid Laurent-Bellue ◽  
Eric Poullier ◽  
Jean-François Pomerol ◽  
Eric Adnet ◽  
Marie-José Redon ◽  
...  
Keyword(s):  
Performance Metrics ◽  
Frozen Section ◽  
Turnaround Time ◽  
Digital Slide ◽  
Intraoperative Frozen Section ◽  
Period 2 ◽  
Implementation Period ◽  
Current Context ◽  
The Cost ◽  
Over Time

Abstract Objectives To share our experience with digital slide telepathology for intraoperative frozen section consultations (IOCs) and to describe its evolution over time by reporting performance metrics and addressing organizational and economic aspects. Methods Since 2013, a technician has been alone at the surgical site. At the other site, the pathologist opens the digital slide from a local server via the intranet. Three periods were compared: a 6-month period of conventional IOC (period 1), a 24-month period of telepathology at 6 months after implementation (period 2), and a 12-month period of telepathology at 3.5 years after implementation (period 3). Results In total, 87 conventional IOCs and 464 and 313 IOCs on digital slides were performed respectively during periods 1, 2, and 3; mean turnaround time was 27, 36, and 38 minutes, respectively, and there were a mean number of 1.1, 1.1, and 1.3 slides, respectively, per IOC. Diagnostic accuracy was achieved in 95.4%, 92.7%, and 93.9%, respectively, of IOCs (not significant). The additional cost is in the same range as the cost of urgent transport by courier. Conclusions Developing IOC with digital slides is a challenge but is necessary to optimize medical time in the current context of pathologist shortage and budget restrictions.

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