ChemInform Abstract: Temperature Dependence of Majority Carrier Transport in Heavily Arsenic-Doped Polycrystalline Silicon Thin Films

ChemInform ◽  
1989 ◽  
Vol 20 (28) ◽  
Author(s):  
J. D. CRESSLER ◽  
W. HWANG ◽  
T.-C. CHEN
Keyword(s):  
Thin Films ◽  
Temperature Dependence ◽  
Polycrystalline Silicon ◽  
Carrier Transport ◽  
Majority Carrier ◽  
Silicon Thin Films

Deposition of Heterogeneous Silicon Thin Films-Structure and Electric States-

2000 ◽  
Vol 609 ◽  
Author(s):  
Isamu Shimizu
Keyword(s):  
Thin Films ◽  
Growth Rate ◽  
Glass Substrate ◽  
Polycrystalline Silicon ◽  
Carrier Transport ◽  
Gaseous Mixture ◽  
Silicon Thin Films ◽  
Step Growth ◽  
The Relationship ◽  
Carrier Transport Properties

ABSTRACTHeterogeneous silicon thin films exhibited various microstructures were prepared by plasma enhanced(PE)-CVD from gaseous mixture of SiF4+H2 (SiH4) on glass substrate. Efficient parameters for controlling the microstructures were reviewed together with the way to grow crystalline seeds on glass by repeating the deposition and etching. Two step growth where polycrystalline silicon thin films were epitaxially grown on the seeds made on glass was proposed to accelerated the growth rate. The relationship between the microstructure and the carrier-transport properties are addressed, as well.

scholarly journals Transient photocurrents as a spatially resolved probe of carrier transport and defect distributions in silicon thin films

2013 ◽  
Vol 178 (9) ◽  
pp. 568-573
Author(s):  
Steve Reynolds ◽  
Rudi Brüggemann ◽  
Björn Grootoonk ◽  
Vlad Smirnov
Keyword(s):  
Thin Films ◽  
Carrier Transport ◽  
Spatially Resolved ◽  
Silicon Thin Films

In situ excimer laser irradiation as cleaning tool for solid phase epitaxy of laser crystallized polycrystalline silicon thin films

2013 ◽  
Vol 210 (12) ◽  
pp. 2729-2735 ◽  
Author(s):  
Ingmar Höger ◽  
Thomas Schmidt ◽  
Anja Landgraf ◽  
Martin Schade ◽  
Annett Gawlik ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Solid Phase ◽  
Solid Phase Epitaxy ◽  
Silicon Thin Films ◽  
Excimer Laser Irradiation

Heat Treatment of Amorphous and Polycrystalline Silicon Thin Films with High-Pressure H2O Vapor

1998 ◽  
Vol 37 (Part 1, No. 8) ◽  
pp. 4254-4257 ◽  
Author(s):  
Toshiyuki Sameshima ◽  
Mitsuru Satoh ◽  
Keiji Sakamoto ◽  
Kentaro Ozaki ◽  
Keiko Saitoh
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
High Pressure ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films
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