Deep Implants by Means of Channeling: Ion Distribution and Radiation Damage in Angle Controlled N+ Implantation in Silicon
2020 ◽
Vol 12
(4)
◽
pp. 451-456
1978 ◽
Vol 36
(3)
◽
pp. 61-69
1982 ◽
Vol 40
◽
pp. 600-603
1973 ◽
Vol 31
◽
pp. 476-477
Keyword(s):
1974 ◽
Vol 32
◽
pp. 338-339
1970 ◽
Vol 28
◽
pp. 412-413
1972 ◽
Vol 30
◽
pp. 680-681
1978 ◽
Vol 36
(1)
◽
pp. 292-293
◽
Keyword(s):
1978 ◽
Vol 36
(1)
◽
pp. 222-223
◽
1975 ◽
Vol 33
◽
pp. 156-157