Effect of oxygen flow rate on microstructure properties of SiO2 thin films prepared by ion beam sputtering
2018 ◽
Vol 482
◽
pp. 203-207
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Keyword(s):
Ion Beam
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2008 ◽
Vol 74
(10)
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pp. 1097-1100
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Keyword(s):
2014 ◽
Vol 1024
◽
pp. 64-67
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Keyword(s):
Keyword(s):
2011 ◽
Vol 46
(11)
◽
pp. 1975-1979
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Keyword(s):
2019 ◽
Vol 37
(3)
◽
pp. 031505
Keyword(s):
Keyword(s):