Influence of residual stress on mechanical properties of TiAlN thin films
2013 ◽
Vol 228
◽
pp. S328-S330
◽
2009 ◽
Vol 113
(2)
◽
pp. 976-983
◽
2015 ◽
Vol 742
◽
pp. 773-777
2009 ◽
Vol 24
(9)
◽
pp. 2974-2985
◽
1999 ◽
Keyword(s):
2010 ◽
Vol 205
(5)
◽
pp. 1393-1397
◽
2011 ◽
Vol 2011
◽
pp. 1-16
◽
2012 ◽
Vol 92
(25-27)
◽
pp. 3392-3401
◽
Keyword(s):
Effect of Annealing on Microstructure and Mechanical Properties of Magnetron Sputtered Cu Thin Films
2015 ◽
Vol 2015
◽
pp. 1-8
◽
Keyword(s):
Cu Films
◽
2010 ◽
Vol 150-151
◽
pp. 599-602
◽