Research on some Key Mechanical Properties of Silicon Nitride Thin Films Deposited by PECVD

2015 ◽  
Vol 742 ◽  
pp. 773-777
Author(s):  
Qun Feng Yang ◽  
Jian Yi Zheng ◽  
Jun Qing Wang ◽  
Jun Hui Lin ◽  
Xue Nan Zhao ◽  
...  

The purpose of this work is to study the mechanical characteristics of the silicon nitride(SiNx) thin films prepared by PECVD technique, some researches as follows were carried out. First, the SiNx thin films were deposited on the two different substrates. Then, the atomic force microscope (AFM) was adopted to test the surface quality of the SiNxfilms, and the scanning electron microscope (SEM) was used to test the section morphology of the SiNxthin films. Finally, the rotating beam structures was applied to measure the residual stress in the SiNx films. The SiNxthin films with low stress can be fabricated through PECVD, in which the surface roughness values(Ra) are 1.261 nm and 2.383nm, and the residual stress is 43.5 kPa. Therefore, the SiNxthin films deposited by PECVD are suitable for the preparation of device dielectric films in MEMS.

2021 ◽  
Author(s):  
V. Sakthi Murugan ◽  
S. Madhu

Abstract The Silicon (Si) contained diamond like carbon (DLC) nanocomposite were prepared by using thermal chemical vapour deposition (CVD) technique by varying the acetylene (C2H2) flowrates. The scanning electron microscope (SEM) results showed a smoother surface of nanocomposite at low C2H2 flowrates. The atomic force microscope (AFM) reveals the increase of particle size and surface roughness of the composite with respect to the C2H2 flowrates. The mechanical properties were evaluated using the nanoindentation and it is observed that the hardness (H) and young’s modulus (E) of the nanocomposite increases with increase of the C2H2 flow rate. The internal stress (𝝈) was computed by using Stoney’s equation and it is noticed that due to the incorporation of Si the residual stress significantly decreased. The tribological properties of the nanocomposite were analysed by computing the H/E, H3/E2, plasticity index (PI) and elasticity index (EI). The results showed that the Si incorporated nanocomposite (Si-DLC) has an excellent tribological properties.


1997 ◽  
Vol 505 ◽  
Author(s):  
A. Karimi ◽  
O. R. Shojaei ◽  
J. L. Martin

ABSTRACTMechanical properties of titanium nitride (TiNx) thin films have been investigated using the bulge test and the depth sensing nanoindentation measurements. The bulge test was performed on the square free standing membranes made by means of standard micromachining of silicon wafers, while the nanoindentation was conducted on the films adhered to their supporting substrate. Thin layeres of titanium nitride (t = 300 – 1000 nm) were deposited in a r. f. magnetron sputtering system on the Si(100) wafers containing a layer of low stress LPCVD silicon nitride (SiNy). The bulge test was first conducted on the silicon nitride film to determine its proper residual stress and Young's modulus. Then, the composite membrane made of TiNx together with underlying silicon nitride was bulged and the related load-displacement variation was measured. Finally, using a simple rule of mixture formula the elastic mechanical properties of TiNx coatings were calculated. Both the Young's modulus and residual stress showed increasing values with negative bias voltage and nitrogen to titanium ratio, but the substrate temperature between 50–570°C was found less significant as compared to the other parameters. Nanoindentation data extracted from dynamically loading-unloading of TiN films converged to the bulge test measurements for compact coatings, but diverged from the bulge test data for porous coatings. Scanning electron microscopy observation of the cross sectioned specimens showed that TiN films first grow by formation of the nanocrystallites of size mostly between 10 – 15 nm. These nanocrystallites give rise to the columnar morphology beyond a thickness of 50–100 nm. The columns change their aspect with deposition parameters, but remain nearly perpendicular to the film surface. Relationship between microstructural evolution of columns and mechanical properties of coatings are discussed in terms of deposition parameters.


2009 ◽  
Vol 113 (2) ◽  
pp. 976-983 ◽  
Author(s):  
Wonbong Jang ◽  
Jongchul Seo ◽  
Choonkeun Lee ◽  
Sang-Hyon Paek ◽  
Haksoo Han

Coatings ◽  
2021 ◽  
Vol 11 (6) ◽  
pp. 652
Author(s):  
Divine Sebastian ◽  
Chun-Wei Yao ◽  
Lutfun Nipa ◽  
Ian Lian ◽  
Gary Twu

In this work, a mechanically durable anticorrosion superhydrophobic coating is developed using a nanocomposite coating solution composed of silica nanoparticles and epoxy resin. The nanocomposite coating developed was tested for its superhydrophobic behavior using goniometry; surface morphology using scanning electron microscopy and atomic force microscopy; elemental composition using energy dispersive X-ray spectroscopy; corrosion resistance using atomic force microscopy; and potentiodynamic polarization measurements. The nanocomposite coating possesses hierarchical micro/nanostructures, according to the scanning electron microscopy images, and the presence of such structures was further confirmed by the atomic force microscopy images. The developed nanocomposite coating was found to be highly superhydrophobic as well as corrosion resistant, according to the results from static contact angle measurement and potentiodynamic polarization measurement, respectively. The abrasion resistance and mechanical durability of the nanocomposite coating were studied by abrasion tests, and the mechanical properties such as reduced modulus and Berkovich hardness were evaluated with the aid of nanoindentation tests.


1999 ◽  
Vol 594 ◽  
Author(s):  
T. Y. Zhang ◽  
Y. J. Su ◽  
C. F. Qian ◽  
M. H. Zhao ◽  
L. Q. Chen

AbstractThe present work proposes a novel microbridge testing method to simultaneously evaluate the Young's modulus, residual stress of thin films under small deformation. Theoretic analysis and finite element calculation are conducted on microbridge deformation to provide a closed formula of deflection versus load, considering both substrate deformation and residual stress in the film. Silicon nitride films fabricated by low pressure chemical vapor deposition on silicon substrates are tested to demonstrate the proposed method. The results show that the Young's modulus and residual stress for the annealed silicon nitride film are respectively 202 GPa and 334.9 MPa.


2016 ◽  
Vol 857 ◽  
pp. 79-82
Author(s):  
Roslina Ismail ◽  
Fuaida Harun ◽  
Azman Jalar ◽  
Shahrum Abdullah

This work is a contribution towards the understanding of wire bond integrity and reliability in relation to their microstructural and mechanical properties in semiconductor packaging.The effect of surface roughness and hardness of leadframe on the bondability of Au wedge bond still requires detail analysis. Two type of leadframes namely leadframe A and leadframe B were chosen and scanning electron microscope (SEM) and optical microscope were used to inspect the surface morphology of leadframes and the quality of created Au wedge bond after wire bonding process. It was found that there were significant differences in the surface morphologies between these two leadframes. The atomic force microscopy (AFM) which was utilized to measure the average roughness, Ra of lead finger confirms that leadframe A has the highest Ra with value of 166.46 nm compared to that of leadframe B with value of 85.89 nm. While hardness value of different lead finger from the selected leadframe A and B obtained using Vicker microhardness tester are 180.9 VH and 154.2VH respectively.


Author(s):  
M.O. Kaptakov

In this work, the mechanical properties of composite samples prepared using a conventional and nanomodified matrix were studied. The thickness of the monolayers in the samples was 0,2 μm. It was found in experiments, that the addition of fullerene soot as a nanomodifierled to an increase in the mechanical properties of the samples along the direction of reinforcement. At the same time, an improvement in the quality of the contact of the matrix with the fibers in the samples with the nanomodifier was observed: on the fracture surface, the nanomodified matrix envelops the fibers, while the usual matrix completely exfoliates. The obtained effects of changing the strength of composites can be associated, among other things, with a change in the level of residual stresses arising in composites during nanomodification. Analytical and numerical modeling methods are used to explain these effects.


2017 ◽  
Vol 4 ◽  
pp. 43-51
Author(s):  
Yuriy Suсhenko ◽  
Vladislav Suсhenko ◽  
Mikhail Mushtruk ◽  
Vladimir Vasyliv ◽  
Yuriy Boyko

Studies were conducted of the stressed-strained state of biopolymers of meat, which were exposed to the processes of elastic, residual and highly elastic deformation at cutting and mincing. Analysis of the structure of this natural biopolymer and the evaluation of mechanical characteristics of meat under normal and low temperatures are important factors that are taken into account for the rational selection of meat mincing machines and tools in the production of meat products, minced meat, semi-finished and sausage products. The structure of meat is a system of structured protein fibers, impregnated with tissue fluid, which is protein sol that contains organic and inorganic substances, soluble in it. The tissues that the meat is composed of belong to natural biopolymers, so conducting analytical studies into mechanical properties of meat within the framework of our understanding of the mechanics of polymers will make it possible to improve mincing processes, employed during manufacturing of meat products. In order to prevent meat overheating, the mincing process is performed at several stages. For example, in cutting mechanisms of choppers, they use a row of knives and grids with holes, diameter of which gradually changes from the original size of0.06 mto 0.003-0.002 min the outlet grids. Quality indicators of the finished products are affected by mechanical characteristics of raw materials and the way the cutting process is carried out. In the course of conducted analysis it was found that in modern food production there remain unresolved important problems, which address current issues, related to rheological and structural mechanical properties of meat raw material. First of all, it concerns theoretical and practical developments that enhance an understanding of physico-chemical and mechanical properties of raw materials, which will make it possible to develop theoretical foundations and experimentally substantiate the new conceptual approach to solving the task of improving the quality of semi-finished products and durability of equipment at meat processing enterprises of APC. The research is the basis for constructive and technological solutions, choice of mode, kinematic and dynamic parameters of cutting devices, steel and wear resistant coatings for cutting tools that provide saving of energy and materials at meat mincing, high quality of minced meat. and finished products and appropriate service life of the equipment. It was established that in order to determine characteristics of the strained state of meat, it is necessary to apply a circular diagram of loading-unloading, which allows analysis of behavior of the sample in a closed cycle of changing in external load. An analysis indicates a very large dependence of meat elasticity module on temperature. Dependences of this kind are generally characteristic of polymer bodies.


2019 ◽  
Vol 26 (04) ◽  
pp. 1850177 ◽  
Author(s):  
YINQIAO PENG ◽  
JICHENG ZHOU ◽  
GUIBIN LEI ◽  
YUANJU GAN ◽  
YUEFENG CHEN

Hydrogenated silicon carbonitride (SiCN:H) thin films were deposited by sputtering of silicon carbide target in hydrogen-doped argon and nitrogen atmospheres. The properties of the SiCN:H films were analyzed by scanning electron microscopy with energy dispersive spectrometer, atomic force microscope, Fourier transform infrared spectroscopy, X-ray diffraction and fluorescence spectrophotometer. No distinct crystal was formed in the SiCN:H films as-deposited and annealed at 600∘C and 800∘C. The SiCN:H films were mainly composed of Si–N, Si–C, Si–O, C–C, C–N, C[Formula: see text]N, N–Hn bonds and SiCxNy network structure. The strong blue photoluminescence observed from the SiCN:H film annealed at 600∘C was attributed to SiCxNy network structure.


2011 ◽  
Vol 254 ◽  
pp. 74-77 ◽  
Author(s):  
Lynn Khine ◽  
Lionel Y.L. Wong ◽  
Jeffrey B.W. Soon ◽  
Ming Lin Julius Tsai

This paper presents an effective evaluation of piezoelectric coefficients (d31 and d33) and other mechanical properties of AlN thin films using resonator structures fabricated on a single wafer. The extracted value for d31 is 1.60pm/V and the d33 value is 3.15pm/V, which are comparable to the coefficient values published in literature. Fabrication of these resonator structures is straightforward and can be incorporated with other more complex steps. Hence, these resonators can serve as an excellent test structures to evaluate and predict the quality of AlN growth and piezoelectric properties of thin AlN films.


Sign in / Sign up

Export Citation Format

Share Document