Optimization of the dielectric layer for electrowetting on dielectric

Integration ◽  
2019 ◽  
Vol 67 ◽  
pp. 50-59
Author(s):  
Semih Türk ◽  
Alexander Schug ◽  
Reinhard Viga ◽  
Andreas Jupe ◽  
Holger Vogt
2018 ◽  
Vol 281 ◽  
pp. 604-609
Author(s):  
Yu Hao Piao ◽  
Wei Qiang Wang

In this paper, we study the electrowetting effect of superhydrophobic SU-8 film as the dielectric for Electrowetting-on-Dielectric (EWOD). The change of apparent contact angle (APCA) on superhydrophobic surface in electrowetting systems was measured and analyzed using a modified Lippmann-Yong equation. The variation of APCA between droplet and device surface under various DC voltage and AC voltage of different frequencies was fully experimented. The experimental results were in good agreement with the theoretical predictions. This study shows the potential of using superhydrophobic SU-8 film as the dielectric layer in high-performance EWOD devices.


Micromachines ◽  
2018 ◽  
Vol 9 (12) ◽  
pp. 649 ◽  
Author(s):  
Gowtham Sathyanarayanan ◽  
Markus Haapala ◽  
Tiina Sikanen

This work describes the interfacing of electrowetting-on-dielectric based digital microfluidic (DMF) sample preparation devices with ambient mass spectrometry (MS) via desorption atmospheric pressure photoionization (DAPPI). The DMF droplet manipulation technique was adopted to facilitate drug distribution and metabolism assays in droplet scale, while ambient mass spectrometry (MS) was exploited for the analysis of dried samples directly on the surface of the DMF device. Although ambient MS is well-established for bio- and forensic analyses directly on surfaces, its interfacing with DMF is scarce and requires careful optimization of the surface-sensitive processes, such as sample precipitation and the subsequent desorption/ionization. These technical challenges were addressed and resolved in this study by making use of the high mechanical, thermal, and chemical stability of SU-8. In our assay design, SU-8 served as the dielectric layer for DMF as well as the substrate material for DAPPI-MS. The feasibility of SU-8 based DMF devices for DAPPI-MS was demonstrated in the analysis of selected pharmaceuticals following on-chip liquid-liquid extraction or an enzymatic dealkylation reaction. The lower limits of detection were in the range of 1–10 pmol per droplet (0.25–1.0 µg/mL) for all pharmaceuticals tested.


Polymers ◽  
2018 ◽  
Vol 10 (10) ◽  
pp. 1119 ◽  
Author(s):  
Jiaxin Hou ◽  
Yancong Feng ◽  
Jinglun Liao ◽  
Wenwen Ding ◽  
Lingling Shui ◽  
...  

Electrowetting-on-dielectric is a preferred option in practical applications of the electrowetting phenomenon but limited by dielectric and breakdown performances of the dielectric layer. In the present work, a ceramic/polymer nanocomposite as a novel dielectric layer is developed to intensify the overall electrowetting performances by multiscale interface effect. Hereinto, surface fluoro-modified ZrO2 nanoparticles (mZrO2) are dispersed well in AF 1600 matrix to form a mZrO2@AF 1600 nanocomposite. The small addition of mZrO2 improves the dielectric constant of the nanocomposite, and the experimental value is larger than the theoretical value calculated by Maxwell–Garnett model, but fits well with the Rahaman–Khastgir model. The molecular dynamics simulations with the explicit model further verify the interfacial effect. Meanwhile, double contact angle modulation and higher breakdown field strength (Eb) are obtained. For the three-layer sandwich structure, both the top and bottom AF 1600 layer decrease the surface roughness for better electrowetting reproducibility and wider wettability modulation. The Forlani–Minnaja theory related to the empirical relationship between Eb and thickness of dielectric layer fit well with the monolayer structure, but cannot be applied in multi-layer structures. A new relationship is proposed to guide the design of dielectric multi-layers with high breakdown field strength.


2016 ◽  
Vol 697 ◽  
pp. 227-230 ◽  
Author(s):  
Jia Qi Niu ◽  
Zhen Kun Xie ◽  
Zhen Xing Yue ◽  
Wei Qiang Wang

In this paper, the dielectric and electrowetting properties of Pb (Zr0.4Ti0.6)O3 (PZT) ferroelectric thin film are studied as the dielectric layer in electrowetting-on-dielectric (EWOD) device. The PZT thin film is formed by spin-coating, pyrolysis and annealing. The characterization results show that PZT thin film can serve as the dielectric of EWOD with a high dielectric constant and a great electrowetting performance when used in silicon oil bath environment. To test the electrowetting effect, a EWOD device with 200nm thick PZT ferroelectric thin film dielectric layer is fabricated. The variation of contact angle between droplet and device surface achieved with DC voltage, AC voltage and AC frequency change of electrowetting on PZT are fully experimented. The EWOD device with PZT dielectric layer can manipulate water droplet at low driving voltages. This study shows the potential of using ferroelectric ceramic material as the dielectric layer in high-performance EWOD devices.


Author(s):  
Raj K. Dash ◽  
Theodorian Borca-Tasciuc

This work presents a design and proposed microfabrication steps for a two-liquid variable focal length capillary microlens. The capillary lens is actuated by electrowetting on dielectric effect. The microlens is made from a dielectric liquid whereas a conducting liquid serves as one of the electrodes for the actuation. The dependence of the microlens focal length on the properties of the dielectric materials is investigated using a model for electrowetting on dielectric effect. The model indicates that low voltage actuation (<20V) is possible by adjusting the dielectric layer thickness. The effect of the microlens size on the focal length is presented. The advantages of a two-liquid capillary microlens are briefly discussed.


2003 ◽  
Vol 766 ◽  
Author(s):  
Ahila Krishnamoorthy ◽  
N.Y. Huang ◽  
Shu-Yunn Chong

AbstractBlack DiamondTM. (BD) is one of the primary candidates for use in copper-low k integration. Although BD is SiO2 based, it is vastly different from oxide in terms of dielectric strength and reliability. One of the main reliability concerns is the drift of copper ions under electric field to the surrounding dielectric layer and this is evaluated by voltage ramp (V-ramp) and time dependent dielectric breakdown (TDDB). Metal 1 and Metal 2 intralevel comb structures with different metal widths and spaces were chosen for dielectric breakdown studies. Breakdown field of individual test structures were obtained from V-ramp tests in the temperature range of 30 to 150°C. TDDB was performed in the field range 0.5 – 2 MV/cm. From the leakage between combs at the same level (either metal 1 or metal 2) Cu drift through SiC/BD or SiN/BD interface was characterized. It was found that Cu/barrier and barrier/low k interfaces functioned as easy paths for copper drift thereby shorting the lines. Cu/SiC was found to provide a better interface than Cu/SiN.


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