This paper presents the mechanical properties of 3C-SiC thin film according to 0, 7, and 10
% carrier gas (H2) concentrations using Nano-Indentation. When carrier gas (H2) concentration was
10 %, it has been proved that the mechanical properties, Young’s Modulus and Hardness, of 3C-SiC
are the best of them. In the case of 10 % carrier gas (H2) concentration, Young’s Modulus and
Hardness were obtained as 367 GPa and 36 GPa, respectively. When the surface roughness according
to carrier gas (H2) concentrations was investigated by AFM (atomic force microscope), when carrier
gas (H2) concentration was 10 %, the roughness of 3C-SiC thin was 9.92 nm, which is also the best of
them. Therefore, in order to apply poly 3C-SiC thin films to MEMS applications, carrier gas (H2)
concentration’s rate should increase to obtain better mechanical properties and surface roughness.