Application of parallel recorded EELS to analysis of beam-sensitive organic compounds
Electron energy loss spectroscopy (EELS) is the optimum technique for studying specific mass loss of light elements from organic compounds under irradiation in the electron microscope. The recent availability of parallel detection systems has provided a factor of approximately 1000 improvement in detection efficiency compared with serial detection. This implies a corresponding reduction in recording time or a reduction in the electron dose needed to obtain sufficient counting statistics for elemental detection. In addition, parallel detection allows us to perform “real-time” EELS, i.e. to observe the actual decay of characteristic peaks in the spectrum.EELS spectra have been recorded with a Gatan model 607 spectrometer fitted with a Gatan model 666 parallel detector based on a 1024 channel photodiode array. Data were transfered to a Tracor Northern TN5500 analysis system for display and processing. Samples were examined at 100 keV beam energy in a Hitachi H700H electron microscope operated in the TEM mode at 1000X to 10000X magnification and with a 30 mrad collection semi-angle defined by the objective aperture.