Anisotropy of interfacial defects in the initial stage of MOVPE GaAs growth On Si

1990 ◽  
Vol 48 (4) ◽  
pp. 592-593
Author(s):  
C. Vannuffel ◽  
C. Schiller ◽  
J. P. Chevalier
Keyword(s):  
Early Stage ◽  
Threading Dislocations ◽  
Mbe Growth ◽  
Detailed Mechanism ◽  
Si Substrates ◽  
Initial Stage ◽  
Interfacial Defects ◽  
Interfacial Dislocations ◽  
Step Growth ◽  
Essential Problem

Recently, interest has focused on the epitaxy of GaAs on Si as a promising material for electronic applications, potentially for integration of optoelectronic devices on silicon wafers. The essential problem concerns the 4% misfit between the two materials, and this must be accommodated by a network of interfacial dislocations with the lowest number of threading dislocations. It is thus important to understand the detailed mechanism of the formation of this network, in order to eventually reduce the dislocation density at the top of the layers.MOVPE growth is carried out on slightly misoriented, (3.5°) from (001) towards , Si substrates. Here we report on the effect of this misorientation on the interfacial defects, at a very early stage of growth. Only the first stage, of the well-known two step growth process, is thus considered. Previously, we showed that full substrate coverage occured for GaAs thicknesses of 5 nm in contrast to MBE growth, where substantially greater thicknesses are required.

The Initial Stages of MBE Growth of InSb on GaAs(100) - A High Misfit Heterointerface

1989 ◽  
Vol 159 ◽  
Author(s):  
C.J. Kiely ◽  
A. Rockett ◽  
J-I. Chyi ◽  
H. Morkoc
Keyword(s):  
Three Dimensional ◽  
Misfit Strain ◽  
Threading Dislocations ◽  
Misfit Dislocations ◽  
Island Growth ◽  
Mbe Growth ◽  
Edge Type ◽  
Transmission Electron ◽  
Interfacial Defects ◽  
Square Array

ABSTRACTThe initial stages of heteroepitaxy of InSb on GaAs(100) grown by MBE have been studied by transmission electron microscopy. Three dimensional InSb island growth occurs in which the majority of the 14.6% misfit strain is accommodated by a square array of a/2<011= edge-type misfit dislocations. The implications of each island having a well defined defect array before coalescence into a continuous epilayer are discussed. Some 600-type a/2<101= interfacial defects and associated threading dislocations are also observed in coalesced films and possible reasons for their existence are explained. A strong asymmetrical distribution of planar defects in the InSb islands is observed and the origin of the asymmetry is discussed. Finally some evidence for local intermixing in the vicinity of the interface is presented.

Epitaxial Relationships and Electrical Properties of SrTiO3 Films on Various Thin -Fluoride/Si Structures

1994 ◽  
Vol 341 ◽  
Author(s):  
B. K. Moon ◽  
H. Ishiwara
Keyword(s):  
Buffer Layer ◽  
Buffer Layers ◽  
Breakdown Field ◽  
X Ray Diffraction ◽  
Dielectric Characteristics ◽  
X Ray ◽  
Si Substrates ◽  
Initial Stage ◽  
Growth Method ◽  
Step Growth

AbstractCrystalline strontium titanate (SrTiO3:STO) films were grown on Si(111) and Si(100) substrates using thin SrF2 and CaF2 buffer layers by two-step growth method. In all cases, fluoride buffer layers were effective in growing STO films on Si substrates, which is probably due to that fluoride buffer layers have excellent crystallinity and they can prevent formation of amorphous SiO2 layers on Si substrates at the initial stage of the STO deposition. It was found from X-ray diffraction and pole-figure measurements that (110)-oriented STO crystallites with three different positions to the substrate were grown on Si(111) substrates for both SrF2 and CaF2 buffer layers. In constrast, (100)-oriented STO films with 12-fold symmetry were grown on a SrF2/Si(100), and mixed (110)- and (100)-oriented STO crystallites were grown on a CaF2/Si(100) structure. It was concluded from these results that better crystallinity of STO films can be obtained on the SrF2 buffer layer in case of Si(111) and on the CaF2 buffer layer in case of Si(100). It was also found from I-V and C-V analyses that the STO films have good insulating and dielectric characteristics. For a SrTiO3 film on SrF2/Si(111) structure, the best values of breakdown field (at l.μA/cm2), resistivity (at IMV/cm) and dielectric constant were 2.3MV/cm, 8.2 × 1012 Ωcm and 72, respectively.

Investigation on the Threading Dislocations Formed by Lattice Misfits during Initial Stage of Sublimation Growth of 4H-SiC

2020 ◽  
Vol 1004 ◽  
pp. 51-56
Author(s):  
Tai Hee Eun ◽  
Im Gyu Yeo ◽  
Jang Yul Kim ◽  
Seung Seok Lee ◽  
Han Suk Seo ◽  
...  
Keyword(s):  
Gas Flow ◽  
Early Stage ◽  
Nitrogen Concentration ◽  
Threading Dislocations ◽  
Nitrogen Gas ◽  
Concentration Difference ◽  
Flow Rates ◽  
Initial Stage ◽  
Sublimation Growth ◽  
Nucleation Of Dislocations

We investigated the relation between the nucleation of dislocations and the lattice misfits by nitrogen concentration difference between seed and grown crystal during the initial stage of growth. 4H-SiC single crystals were grown with various nitrogen gas flow rates introduced into the crystal growing chamber under the same temperature and pressure to minimize the effect of thermal stress on the nucleation of dislocations. The nitrogen atomic concentrations of grown crystals depended on the introduced nitrogen gas ratios and they highly increased at the very early stage of growth. The generation of new threading dislocations at the interface also was affected by the nitrogen atomic concentrations differences between seed and grown crystals. Very few generated threading dislocations were observed in low nitrogen atomic concentration samples, however nucleation of threading dislocations at the interface were found in high nitrogen atomic concentrations samples. At initial stages of PVT growth process, the generation of threading dislocations induced by lattice misfits originated from nitrogen concentration difference between seed and grown crystals were investigated and found the appropriate nitrogen gas flow rates and profile at the heating and depressurized stage.

Hetero-Epitaxial Growth of 3C-SiC with Smooth Surface on Si(001) Using Acetylene Gas

2008 ◽  
Vol 600-603 ◽  
pp. 247-250 ◽  
Author(s):  
Yasuo Hirabayashi ◽  
Satoru Kaneko ◽  
Kensuke Akiyama
Keyword(s):  
Epitaxial Growth ◽  
Heating Rate ◽  
Smooth Surface ◽  
Early Stage ◽  
Low Pressure ◽  
Single Domain ◽  
Single Crystalline ◽  
Si Substrates

The carbonization conditions (acetylene pressure and heating rate) to obtain close carbonized layer covered on Si(001) substrate without thermal pits is studied. Subsequent hetero-epitaxial 3C-SiC with smooth surface have been grown by low-pressure CVD. Single-crystalline carbonized layers could be grown at 1050°C by using suitable carbonization processes. The surfaces of Si were covered with single-crystalline 3C-SiC layers at an early stage of carbonization, preventing out-diffusion of Si atoms from Si substrates. 3C-SiC epi-film have RMS = 0.4nm but no single domain. The protrusion density of the film was an order of 1000 cm-2.

Defect Reduction in GaAs Epilayers on Si Substrates Using Strained Layer Superlattices

1987 ◽  
Vol 91 ◽  
Author(s):  
N. El-Masry ◽  
N. Hamaguchi ◽  
J.C.L. Tarn ◽  
N. Karam ◽  
T.P. Humphreys ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Buffer Layers ◽  
Threading Dislocations ◽  
Defect Reduction ◽  
Strained Layer ◽  
Si Substrates ◽  
Density Of Dislocations ◽  
Strained Layer Superlattice ◽  
Strained Layer Superlattices

ABSTRACTInxGa11-xAs-GaAsl-yPy strained layer superlattice buffer layers have been used to reduce threading dislocations in GaAs grown on Si substrates. However, for an initially high density of dislocations, the strained layer superlattice is not an effective filtering system. Consequently, the emergence of dislocations from the SLS propagate upwards into the GaAs epilayer. However, by employing thermal annealing or rapid thermal annealing, the number of dislocation impinging on the SLS can be significantly reduced. Indeed, this treatment greatly enhances the efficiency and usefulness of the SLS in reducing the number of threading dislocations.

INTERACTION BETWEEN A FAMILY DOCTOR AND A DENTIST AT AN EARLY STAGE IN THE PREVENTION OF DISEASES OF THE GASTROINTESTINAL TRACT

2021 ◽  
Vol 2 (12(81)) ◽  
pp. 39-43
Author(s):  
M. Ibragimov ◽  
Y. Heydarova ◽  
A. Alizade ◽  
L. Ibragimova
Keyword(s):  
Gastrointestinal Tract ◽  
Oral Cavity ◽  
Early Stage ◽  
Family Doctor ◽  
Scientific Article ◽  
Oral Manifestations ◽  
Family Doctors ◽  
Long Period ◽  
Initial Stage ◽  
The Relationship

This scientific article discusses the oral manifestations of diseases of the gastrointestinal tract. This problem is relevant both for dentists and family doctors. In medicine, for a long period of time, the relationship between diseases affecting the gastrointestinal tract and their symptoms manifested in the oral cavity has been considered. Many scientists and physicians have dealt with this problem, their several opinions are presented in this article. There is a hypothesis among researchers that the oral cavity is a mirror in which all human diseases can be visible. In the oral cavity, most of the alterations occurring in the organism are manifested, due to which, with an attentive attitude to oral manifestations, the disease can be detected already at the initial stage.

Retarded Growth of Sputtered HfO2 Films on Germanium

2004 ◽  
Vol 811 ◽  
Author(s):  
Koji Kita ◽  
Masashi Sasagawa ◽  
Masahiro Toyama ◽  
Kentaro Kyuno ◽  
Akira Toriumi
Keyword(s):  
Film Growth ◽  
Early Stage ◽  
Gate Oxide ◽  
Interface Layer ◽  
Film Deposition ◽  
Si Substrate ◽  
Equivalent Thickness ◽  
Ternary Compounds ◽  
Si Substrates

ABSTRACTHfO2 films were deposited by reactive sputtering on Ge and Si substrates simultaneously, and we found not only the interface layer but the HfO2 film was thinner on Ge substrate compared with that on Si substrate. A metallic Hf layer has a crucial role for the thickness differences of both interface layer and HfO2 film, since those thickness differences were observed only when an ultrathin metallic Hf layer was predeposited before HfO2 film deposition. The role of metallic Hf is understandable by assuming a formation of volatile Hf-Ge-O ternary compounds at the early stage of film growth. These results show an advantage of HfO2/Ge over HfO2/Si systems from the viewpoint of further scaling of electrical equivalent thickness of the gate oxide films.

scholarly journals Morphofunctional characteristics of endothelial cells in coronary atherosclerosis

2011 ◽  
Vol 63 (4) ◽  
pp. 921-932 ◽  
Author(s):  
Vesna Lackovic ◽  
Irena Tanaskovic ◽  
Dj. Radak ◽  
Vesna Nesic ◽  
Z. Gluvic ◽  
...  
Keyword(s):  
Endothelial Cells ◽  
Coronary Atherosclerosis ◽  
Complex Disease ◽  
Early Stage ◽  
Intercellular Junctions ◽  
Vascular Wall ◽  
Functional Changes ◽  
Initial Stage ◽  
Numerous Data

Atherosclerosis represents a complex disease which encompasses all the components of the vascular wall. Nevertheless, according to all known theories of the pathogenesis of atherosclerosis, the key role in this process belongs to the endothelial cells, i.e. the changes that they are subjected to especially during the initial stage of the lesion. In this review we have attempted, according to the results of our continuous research and numerous data from available modern literature, to show the cytohistological characteristics of endothelial cells, as well as the changes they are subjected to in all stages of atherosclerosis. In the first part we have reviewed the ultrastructure, function and pathology of the endothelium, subcellular organization of the endothelial cells, their specific characteristics, micro compartments and intercellular junctions. In the second part we have described the morphological and functional changes of endothelial cells during atherosclerosis. Special attention is given to the role of endothelial cells in the development of the initial stage of lesion: endothelial dysfunction, factors that cause the increased expression of adhesion molecules in endothelial cells and mechanisms that cause leukocytes to migrate through the endothelial layer to subendothelial connective tissue in the early stage of atherosclerosis.

Observation of GaAs/Si Epitaxial Interfaces by Atomic Resolution Electron Microscopy

1986 ◽  
Vol 67 ◽  
Author(s):  
N. Otsuka ◽  
C. Choi ◽  
Y. Nakamura ◽  
S. Nagakura ◽  
R. Fischer ◽  
...  
Keyword(s):  
Substrate Surface ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Threading Dislocations ◽  
Misfit Dislocations ◽  
Si Substrates ◽  
Voltage Electron ◽  
Resolution Electron ◽  
Gaas Films ◽  
Substrate Surfaces

ABSTRACTRecent studies have shown that high quality GaAs films can be grown by MBE on Si substrates whose surfaces are slightly tilted from the (100) plane. In order to investigate the effect of the tilting of substrate surfaces on the formation of threading dislocations, the GaAs/Si epitaxial interfaces have been observed with a 1 MB ultra-high vacuum, high voltage electron microscope. Two types of misfit dislocations, one with Burgers vectors parallel to the interface and the other with Burgers vectors inclined from the interface, were found in these epitaxial interfaces. The observation of crosssectional samples perpendicular to each other has shown that the tilting of the substrate surface directly influences the generation of these two types of misfit dislocations. The mechanism of the reduction of threading dislocations by the tilting of the substrate surface is discussed based on these observations.

Preparation of pzt thin films on Pt/Ti/SiO2 and Pt/SiO2 Substrates by ECR Plasma Enhanced DC Magnetron Multi-target Reactive Sputtering

1996 ◽  
Vol 441 ◽  
Author(s):  
Sung-Tae Kim ◽  
Hyun-Ho Kim ◽  
Moon-Yong Lee ◽  
Won-Jong Lee
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Electron Cyclotron Resonance ◽  
Perovskite Phase ◽  
Early Stage ◽  
Reactive Sputtering ◽  
Deposition Process ◽  
Pzt Thin Films ◽  
Si Substrates ◽  
Ecr Plasma

AbstractPerovskite-phase lead zirconate titanate (PZT) thin films were fabricated at 4751C by the electron cyclotron resonance (ECR) plasma enhanced DC magnetron multi-target reactive sputtering method on Pt/Ti/SiO2/Si and Pt/SiO2/Si substrates. Stoichiometric perovskite PZT films were readily obtained on Pt/Ti/SiO2/Si substrates because Ti atoms which were out-diffused to the Pt surface facilitated Pb incorporation by forming lead titanate at the early stage of deposition process. Activation of oxygen by ECR plasma facilitated the oxidation reaction and Pb incorporation into the film. Thus perovskite-phase PZT can be obtained on the Pt/SiO2/Si substrate.

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