Preparation and characteristic analysis of nanofacula array

AbstractThe development of nanofacula array is an effective methods to improve the performance of Near-field Scanning Optical Microscopy (NSOM) and achieve high-throughput array scanning. The nanofacula array is realized by preparing metal nanopore array through the "two etching-one development" method of double-layer resists and the negative lift-off process after metal film coating. The shading property of metal film plays important rules in nanofacula array fabrication. We investigate the shading coefficient of three kinds of metal films (gold–palladium alloy (Au/Pd), platinum (Pt), chromium (Cr)) under different coating times, and 3.5 min Au/Pd film is determined as the candidate of the nanofacula array fabrication for its lower thickness (about 23 nm) and higher shading coefficient (≥ 90%). The nanofacula array is obtained by irradiating with white light (central wavelength of 500 nm) through the metal nanopore array (250/450 nm pore diameter, 2 μm pore spacing and 7 μm group spacing). Moreover, the finite difference and time domain (FDTD) simulation proves that the combination of nanopore array and microlens array achieves high-energy focused nanofacula array, which shows a 3.2 times enhancement of electric field. It provides a new idea for NSOM to realize fast super-resolution focusing facula array.

Download Full-text

Microlens array fabrication by laser interference lithography for super-resolution surface nanopatterning

Applied Physics Letters ◽

10.1063/1.2374809 ◽

2006 ◽

Vol 89 (19) ◽

pp. 191125 ◽

Cited By ~ 45

Author(s):

C. S. Lim ◽

M. H. Hong ◽

Y. Lin ◽

Q. Xie ◽

B. S. Luk’yanchuk ◽

...

Keyword(s):

Super Resolution ◽

Microlens Array ◽

Interference Lithography ◽

Laser Interference Lithography ◽

Laser Interference ◽

Array Fabrication

Download Full-text

Double moiré localized plasmon structured illumination microscopy

Nanophotonics ◽

10.1515/nanoph-2020-0521 ◽

2020 ◽

Vol 0 (0) ◽

Author(s):

Ruslan Röhrich ◽

A. Femius Koenderink

Keyword(s):

Near Field ◽

Super Resolution ◽

Reconstruction Algorithm ◽

Structured Illumination ◽

Structured Illumination Microscopy ◽

Experimental Realization ◽

Spatial Frequencies ◽

Wide Range ◽

Localized Plasmon ◽

Plasmonic Grating

AbstractStructured illumination microscopy (SIM) is a well-established fluorescence imaging technique, which can increase spatial resolution by up to a factor of two. This article reports on a new way to extend the capabilities of structured illumination microscopy, by combining ideas from the fields of illumination engineering and nanophotonics. In this technique, plasmonic arrays of hexagonal symmetry are illuminated by two obliquely incident beams originating from a single laser. The resulting interference between the light grating and plasmonic grating creates a wide range of spatial frequencies above the microscope passband, while still preserving the spatial frequencies of regular SIM. To systematically investigate this technique and to contrast it with regular SIM and localized plasmon SIM, we implement a rigorous simulation procedure, which simulates the near-field illumination of the plasmonic grating and uses it in the subsequent forward imaging model. The inverse problem, of obtaining a super-resolution (SR) image from multiple low-resolution images, is solved using a numerical reconstruction algorithm while the obtained resolution is quantitatively assessed. The results point at the possibility of resolution enhancements beyond regular SIM, which rapidly vanishes with the height above the grating. In an initial experimental realization, the existence of the expected spatial frequencies is shown and the performance of compatible reconstruction approaches is compared. Finally, we discuss the obstacles of experimental implementations that would need to be overcome for artifact-free SR imaging.

Download Full-text

A New Approach to Polymeric Microlens Array Fabrication Using Soft Replica Molding

IEEE Photonics Technology Letters ◽

10.1109/lpt.2004.833892 ◽

2004 ◽

Vol 16 (9) ◽

pp. 2078-2080 ◽

Cited By ~ 46

Author(s):

T.-K. Shin ◽

J.-R. Ho ◽

J.-W.J. Cheng

Keyword(s):

Microlens Array ◽

New Approach ◽

Replica Molding ◽

Array Fabrication

Download Full-text

Improvement of Electric-Field-Assisted Ion Exchange Method for Planar Microlens Array Fabrication

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.775 ◽

1999 ◽

Vol 38 (Part 1, No. 2A) ◽

pp. 775-776 ◽

Cited By ~ 3

Author(s):

Takeo Katayama ◽

Yuki Munetaka ◽

Kenichi Iga

Keyword(s):

Ion Exchange ◽

Electric Field ◽

Microlens Array ◽

Exchange Method ◽

Planar Microlens ◽

Ion Exchange Method ◽

Array Fabrication

Download Full-text

Nonlinear Optical Absorption in the AgOx-Type Super-Resolution Near-Field Structure

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.4101 ◽

2001 ◽

Vol 40 (Part 1, No. 6A) ◽

pp. 4101-4102 ◽

Cited By ~ 16

Author(s):

Fu Han Ho ◽

Wei Yi Lin ◽

Hsun Hao Chang ◽

Yu Hsaun Lin ◽

Wei-Chih Liu ◽

...

Keyword(s):

Optical Absorption ◽

Nonlinear Optical ◽

Near Field ◽

Super Resolution ◽

Field Structure ◽

Nonlinear Optical Absorption

Download Full-text

The FDTD Analysis of Near-Field Response for Microgroove Structure With Standing Wave Illumination for the Realization of Coherent Structured Illumination Microscopy

Volume 1: Additive Manufacturing; Advanced Materials Manufacturing; Biomanufacturing; Life Cycle Engineering; Manufacturing Equipment and Automation ◽

10.1115/msec2021-60409 ◽

2021 ◽

Author(s):

Yizhao Guan ◽

Hiromasa Kume ◽

Shotaro Kadoya ◽

Masaki Michihata ◽

Satoru Takahashi

Keyword(s):

Standing Wave ◽

Incident Angle ◽

Near Field ◽

Super Resolution ◽

Structured Illumination ◽

Field Phase ◽

Structured Illumination Microscopy ◽

Depth Measurement ◽

Field Response ◽

Depth Dependency

Abstract Microstructures are widely used in the manufacture of functional surfaces. An optical-based super-resolution, non-invasive method is preferred for the inspection of surfaces with massive microstructures. The Structured Illumination Microscopy (SIM) uses standing-wave illumination to reach optical super-resolution. Recently, coherent SIM is being studied. It can obtain not only the super-resolved intensity distribution but also the phase and amplitude distribution of the sample surface beyond the diffraction limit. By analysis of the phase-depth dependency, the depth measurement for microgroove structures with coherent SIM is expected. FDTD analysis is applied for observing the near-field response of microgroove under the standing-wave illumination. The near-field phase shows depth dependency in this analysis. Moreover, the effects from microgroove width, the incident angle, and the relative position between the standing-wave peak and center of the microgroove are investigated. It is found the near-field phase change can measure depth until 200 nm (aspect ratio 1) with an error of up to 20.4 nm in the case that the microgroove width is smaller than half of the wavelength.

Download Full-text

Anisotropic excitation of surface plasmon polaritons on a metal film by a scattering-type scanning near-field microscope with a non-rotationally-symmetric probe tip

Nanophotonics ◽

10.1515/nanoph-2017-0042 ◽

2018 ◽

Vol 7 (1) ◽

pp. 269-276 ◽

Cited By ~ 7

Author(s):

Frederik Walla ◽

Matthias M. Wiecha ◽

Nicolas Mecklenbeck ◽

Sabri Beldi ◽

Fritz Keilmann ◽

...

Keyword(s):

Surface Plasmon ◽

Surface Plasmon Polaritons ◽

Metal Film ◽

Near Infrared ◽

Near Field ◽

Optical Microscope ◽

Anisotropic Surface ◽

Surface Wave Propagation ◽

Rotationally Symmetric ◽

Plasmon Polaritons

AbstractWe investigated the excitation of surface plasmon polaritons on gold films with the metallized probe tip of a scattering-type scanning near-field optical microscope (s-SNOM). The emission of the polaritons from the tip, illuminated by near-infrared laser radiation, was found to be anisotropic and not circularly symmetric as expected on the basis of literature data. We furthermore identified an additional excitation channel via light that was reflected off the tip and excited the plasmon polaritons at the edge of the metal film. Our results, while obtained for a non-rotationally-symmetric type of probe tip and thus specific for this situation, indicate that when an s-SNOM is employed for the investigation of plasmonic structures, the unintentional excitation of surface waves and anisotropic surface wave propagation must be considered in order to correctly interpret the signatures of plasmon polariton generation and propagation.

Download Full-text