Bias voltage effect on magnetron sputtered titanium aluminum nitride TiAlN thin films properties

2019 ◽  
Vol 86 (3) ◽  
pp. 30301 ◽  
Author(s):  
Zouina Amina Ait-Djafer ◽  
Nadia Saoula ◽  
Daniel Wamwangi ◽  
Noureddine Madaoui ◽  
Hamid Aknouche
Keyword(s):  
Thin Films ◽  
Stainless Steel ◽  
Corrosion Resistance ◽  
Bias Voltage ◽  
Steel Substrate ◽  
Rf Magnetron Sputtering ◽  
Substrate Bias Voltage ◽  
Tialn Coating ◽  
Fcc Phase ◽  
Steel Substrates

In this study, a negative substrate bias voltage is used to tune the structural, morphological, mechanical and electrochemical properties of TiAlN coatings fundamental for protective coating applications. TiAlN thin films have been deposited on glass, (001)Si and stainless steel substrates by RF magnetron sputtering at a power density of 4.41 W/cm2. The deposition rate was determined from X-ray reflectivity measurements to 7.00 ± 0.05 nm/min. TiAlN films used in this work were deposited for 60 min to yield a film thickness of 420 nm. Structural analysis has shown that TiAlN coating forms a cubic (fcc) phase with orientations in (111), (200), (220) and (222) planes. The deposited coatings present maximum hardness (H = 37.9 GPa) at −75 V. The dependence of hardness and Young's modulus and corrosion resistance on microstructure has been established. Electrochemical studies by potentiodynamic polarization in aggressive environment (3.5 wt.% NaCl) have revealed that stainless steel substrate with TiAlN coating exhibits excellent corrosion resistance.

scholarly journals The Effects of Substrate Bias on the Properties of HfC Coatings Deposited by RF Magnetron Sputtering

Coatings ◽  
2021 ◽  
Vol 11 (8) ◽  
pp. 963
Author(s):  
Di Pei ◽  
Li Wang ◽  
Ming-hui Ding ◽  
Zhao-nan Hu ◽  
Jun-yu Zhao ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Corrosion Resistance ◽  
Bias Voltage ◽  
316L Stainless Steel ◽  
Steel Substrate ◽  
Rf Magnetron Sputtering ◽  
Substrate Bias ◽  
Stainless Steel 316L ◽  
Transmission Electron

In the paper, by using radio frequency (RF) magnetron sputter technology, the HfC coating grew on a 316L stainless steel substrate in an Ar atmosphere at various substrate bias voltages from 0 to −200 V. From the X-ray diffraction (XRD) and transmission electron microscopy (TEM) experiments, the HfC coatings were well crystallized and (111) preferential growth had been successfully obtained by controlling bias voltage at −200 V. Nanoindentation experimental results for the prepared HfC coatings indicated that they possessed the maximum nanohardness due to the formation of the (111) orientation. The results of electrochemical measurements displayed that 316L stainless steel (316L) coated with the HfC coatings had better corrosion resistance than bare 316L. With the bias voltage increasing to −200 V, adhesion of the 316L substrate with the HfC coating could be greatly improved, as well as corrosion resistance. The antithrombogenicity of the HfC coatings was identified by platelet adhesive and hemolytic ratio assay in vitro. It was shown that the hemocompatibility of coated 316L had been improved greatly compared with bare 316L and the HfC coatings possessed better antithrombogenicity with the bias voltage elevating above −150 V.

scholarly journals Fabrication and Characterization of Zein/Hydroxyapatite Composite Coatings for Biomedical Applications

Surfaces ◽  
2020 ◽  
Vol 3 (2) ◽  
pp. 237-250 ◽  
Author(s):  
Yusra Ahmed ◽  
Muhammad Yasir ◽  
Muhammad Atiq Ur Rehman
Keyword(s):  
Stainless Steel ◽  
Corrosion Resistance ◽  
Biomedical Applications ◽  
Steel Substrate ◽  
Composite Coatings ◽  
Sem Images ◽  
Taguchi Design Of Experiments ◽  
Hydrophilic Nature ◽  
Strong Adhesion ◽  
Steel Substrates

Stainless steel is renowned for its wide use as a biomaterial, but its relatively high corrosion rate in physiological environments restricts many of its clinical applications. To overcome the corrosion resistance of stainless steel bio-implants in physiological environments and to improve its osseointegration behavior, we have developed a unique zein/hydroxyapatite (HA) composite coating on a stainless steel substrate by Electrophoretic Deposition (EPD). The EPD parameters were optimized using the Taguchi Design of experiments (DoE) approach. The EPD parameters, such as the concentration of bio-ceramic particles in the polymer solution, applied voltage and deposition time were optimized on stainless steel substrates by applying a mixed design orthogonal Taguchi array. The coatings were characterized by using scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDX) and wettability studies. SEM images and EDX results indicated that the zein/HA coating was successfully deposited onto the stainless steel substrates. The wettability and roughness studies elucidated the mildly hydrophilic nature of the zein/HA coatings, which confirmed the suitability of the developed coatings for biomedical applications. Zein/HA coatings improved the corrosion resistance of bare 316L stainless steel. Moreover, zein/HA coatings showed strong adhesion with the 316L SS substrate for biomedical applications. Zein/HA developed dense HA crystals upon immersion in simulated body fluid, which confirmed the bone binding ability of the coatings. Thus the zein/HA coatings presented in this study have a strong potential to be considered for orthopedic applications.

scholarly journals A study of properties of ZrO2 thin films deposited by magnetron sputtering under different plasma parameters: Biomedical application

2019 ◽  
Vol 70 (7) ◽  
pp. 117-121 ◽  
Author(s):  
Hind Zegtouf ◽  
Nadia Saoula ◽  
Mourad Azibi ◽  
Larbi Bait ◽  
Noureddine Madaoui ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Bias Voltage ◽  
Biomedical Application ◽  
Steel Substrate ◽  
Substrate Bias ◽  
X Rays ◽  
Plasma Parameters ◽  
Substrate Bias Voltage ◽  
Deposited Films

Abstract ZrO2 thin films were deposited on 316L stainless steel substrate by a radio-frequency magnetron sputtering system. The substrate bias voltage, the working gas rate and the reactive gas fraction in the gas mixture were varied. These variations produce a variation in the deferent properties of the obtained films. The deposited films were characterized by X-Rays Diffraction, Atomic Force Microscopy, nano-indentation and potentiodynamic polarization. The experimental results show that the film thickness and the roughness of the films are highly influenced by the plasma parameters. XRD results show that the monoclinic phase is predominant in unbiased deposited films. The best anti-corrosion performance and hardness were obtained for ZrO2 deposited with a substrate bias voltage of −75 V, Ar rate of 6 sccm and oxygen fraction of 25%.

Characterization of Pb(Zr,Ti)O3 thin films deposited on stainless steel substrates by RF-magnetron sputtering for MEMS applications

2006 ◽  
Vol 125 (2) ◽  
pp. 382-386 ◽  
Author(s):  
Takaaki Suzuki ◽  
Isaku Kanno ◽  
Jacob J. Loverich ◽  
Hidetoshi Kotera ◽  
Kiyotaka Wasa
Keyword(s):  
Thin Films ◽  
Stainless Steel ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Steel Substrates

Effects of Substrates on the Composition and Microstructure of TiO2 Thin Films Prepared by the LPD Method

2007 ◽  
Vol 280-283 ◽  
pp. 795-800 ◽  
Author(s):  
Huogen Yu ◽  
Jia Guo Yu ◽  
Bei Cheng ◽  
C.H. Ao ◽  
S.C. Lee
Keyword(s):  
Thin Films ◽  
Stainless Steel ◽  
Photoelectron Spectroscopy ◽  
Steel Substrate ◽  
Precursor Solution ◽  
Soda Lime ◽  
Soda Lime Glass ◽  
Tio2 Thin Films ◽  
X Ray ◽  
Steel Substrates

TiO2 thin films were prepared on soda lime glass, fused quartz and stainless steel substrates by liquid phase deposition (LPD) method from a (NH4)2TiF6 aqueous solution upon the addition of boric acid (H3BO3), and then calcined at 500oC for 2 h. The prepared films were characterized with X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). It was found that the substrates obviously influenced the element composition and microstructure of TiO2 thin films. Except Ti, O and a small amount of F and N elements, which came from the precursor solution, some Si (or Fe) element in the thin films deposited on soda lime glass and quartz substrates (or on stainless steel substrate) was confirmed. The Si (or Fe) element in the thin films could be attributed to two sources. One was from the SiF6 2- ions (or FeF6 2- ions) formed by a reaction between the treatment solution and soda lime glass or quartz (or stainless steel) substrates. The other was attributed to the diffusion of Si (or Fe) from the surface of substrates into the TiO2 thin films after calcination at 500oC. The Si (or Fe) element in the TiO2 thin films could behave as a dopant and resulted in the formation of composite SiO2/TiO2 (or Fe2O3/TiO2) thin films on the substrates.

scholarly journals Corrosion Resistant TiTaN and TiTaAlN Thin Films Grown by Hybrid HiPIMS/DCMS Using Synchronized Pulsed Substrate Bias with No External Substrate Heating

Coatings ◽  
2019 ◽  
Vol 9 (12) ◽  
pp. 841
Author(s):  
Yuri Chipatecua Godoy ◽  
Olof Tengstrand ◽  
Jairo Olaya Florez ◽  
Ivan Petrov ◽  
Erika Bustos ◽  
...  
Keyword(s):  
Thin Films ◽  
Stainless Steel ◽  
Corrosion Resistance ◽  
Film Growth ◽  
Electrochemical Impedance ◽  
Ion Irradiation ◽  
304 Stainless Steel ◽  
High Deposition Rate ◽  
Substrate Heating ◽  
Steel Substrates

Ti0.92Ta0.08N and Ti0.41Al0.51Ta0.08N thin films grown on stainless-steel substrates, with no external heating, by hybrid high-power impulse and dc magnetron sputtering (HiPIMS/DCMS), were investigated for corrosion resistance. The Ta target was operated in HiPIMS mode to supply pulsed Ta-ion fluxes, while two Ti (or Ti and Al) targets were operated in DCSM mode in order to provide a high deposition rate. Corrosion resistance was investigated using potentiodynamic polarization and electrochemical impedance spectroscopy employing a 3.5% NaCl solution at room temperature. The 300-nm-thick transition-metal nitride coatings exhibited good corrosion resistance due to film densification resulting from pulsed heavy Ta-ion irradiation during film growth. Corrosion protective efficiencies were above 99.8% for both Ti0.41Al0.51Ta0.08N and Ti0.92Ta0.08N, and pore resistance was apparently four orders of magnitude higher than for bare 304 stainless-steel substrates.

Corrosion Resistance and Electrical Conductivity of TiN/CrN Multilayer Coated Stainless Steel

2011 ◽  
Vol 214 ◽  
pp. 291-295
Author(s):  
Wei Yu Ho ◽  
Chung Hsien Yang ◽  
Wei Che Huang ◽  
Woei Yun Ho
Keyword(s):  
Electrical Conductivity ◽  
Stainless Steel ◽  
Corrosion Resistance ◽  
Steel Substrate ◽  
Bipolar Plate ◽  
Layered Coatings ◽  
Cathodic Arc Deposition ◽  
Metallic Bipolar Plate ◽  
Cell Test ◽  
Steel Substrates

In this study, various multilayered TiN/CrN coatings were deposited on the SS316L stainless steel substrates by the cathodic arc deposition technique. By varying the turntable rotation speed, the multilayered coatings with different periodic layer thickness were obtained. The main target of this study is to enhance the corrosion resistance and electrical conductivity of the stainless steel for potential application of metallic bipolar plate of PEMFC. The results showed that all of the TiN/CrN coated samples presented a better corrosion resistance than the bare stainless steel substrate. The multi-layered coatings deposited at the 2 rpm provided the best corrosion resistance of the coated stainless steels when they were subjected to polarization test in 1M H2SO4 solution. The result of single fuel cell test shows that the TiN/CrN multi-layered coating with the best corrosion resistance is considered to be a candidate for PEMFC bipolar plate application in this study.

scholarly journals Experimental Investigation on Mechanical Properties of TiAlN Thin Films Deposited by RF Magnetron Sputtering

2021 ◽  
Vol 2021 ◽  
pp. 1-7
Author(s):  
L. Natrayan ◽  
S. Balaji ◽  
G. Bharathiraja ◽  
S. Kaliappan ◽  
Dhinakaran Veeman ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Wear Resistance ◽  
Magnetron Sputtering ◽  
Steel Substrate ◽  
Substrate Surface ◽  
Wear Test ◽  
Rf Magnetron Sputtering ◽  
Pin On Disk ◽  
Steel Substrates

The mechanical properties of TiAlN deposited on the steel are explained in this study. Thin films are deposited by RF magnetron sputtering on the steel substrates to improve the wear resistance and hardness of the samples. Due to their improved microstructure and nanograins, the nanofilms have improved the mechanical properties of the steel substrate surface. The thin film deposited has improved the wear resistance by 80% and has improved the hardness by 95%. The deposited thin films are tested for hardness by nanoindentation and wear test by the pin-on-disk test. SEM has tested films for their microstructure and adhesion by nanoscratch test.

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