Correlations between active species density and iron nitride layer growth in Ar-N2-H2microwave post-discharges
1994 ◽
Vol 27
(6)
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pp. 1328-1332
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1994 ◽
Vol 163-165
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pp. 707-712
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2015 ◽
Vol 69
(1)
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pp. 10801
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2010 ◽
Vol 97-101
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pp. 737-742
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2016 ◽
Vol 96
(14)
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pp. 1369-1385
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2011 ◽
Vol 690
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pp. 91-94
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2017 ◽
Vol 899
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pp. 436-441
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