Pre-metal dielectric PE TEOS oxide pitting in 3D NAND: Mechanism and solutions

2021 ◽  
Author(s):  
Peizhen Hong ◽  
Qiang Xu ◽  
Jingwen Hou ◽  
Mingkai Bai ◽  
Zhiguo Zhao ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Phosphoric Acid ◽  
Hydrofluoric Acid ◽  
Low Cost ◽  
Tetraethyl Orthosilicate ◽  
Wet Etching ◽  
Staircase Structure ◽  
Process Cost ◽  
The Cost ◽  
Density Plasma

Abstract In 3D NAND, as the stack number increases, the process cost becomes higher and higher, and the stress problem becomes more and more serious. Therefore, the low cost and low stress plasma enhanced Tetraethyl orthosilicate (PE TEOS), compared to high density plasma (HDP) oxide, shows its superiority as pre-metal dielectric (PMD) oxide layer in 3D NAND. This paper explores the challenges in the application of PE TEOS in 3D NAND PMD oxide layer.In our experiments, both PE TEOS and HDP are employed as the PMD oxide for 3D NAND staircase protection. There is not any void found in the two oxide structures. However, oxide pitting is spotted in the subsequent diluted hydrofluoric acid wet etching in the PE TEOS split. Moreover, we observe that the top silicon nitride corrodes in hot phosphoric acid. We investigate the mechanism of PE TEOS oxide pitting and silicon nitride corroding, and propose two solutions: 1) HDP oxide + PE TEOS, and 2) PE TEOS + dry etching.Experimental results demonstrate that our solutions can well address the issue of PE TEOS oxide pitting and effectively protect the staircase structure. This work extends the application of PE TEOS oxide of which the cost and the stress are both low in 3D NAND.

Selective Nitride Etch by Using Fluorides in High Boiling Point Solvent

2012 ◽  
Vol 195 ◽  
pp. 50-54
Author(s):  
Hsing Chen Wu ◽  
Emanuel I. Cooper ◽  
Heng Kai Hsu
Keyword(s):  
Silicon Nitride ◽  
Phosphoric Acid ◽  
Boiling Point ◽  
Silicon Oxide ◽  
Nitride Layer ◽  
Wet Etching ◽  
High Boiling Point ◽  
Le Châtelier Principle ◽  
Le Chatelier Principle

Conventional wet etching techniques for selectively removing silicon nitride (Si3N4) have utilized hot (approximately 145-180°C) aqueous phosphoric acid (H3PO4) solutions (often referred to as hot phos). The typical Si3N4:SiO2 selectivity is about 40:1 when using 85% fresh hot phosphoric acid. Advantageously, as the nitride layer is removed, hydrated silicon oxide forms and dissolves in the etchant. Consistent with Le Chatelier principle, this inhibits the additional removal of silicon oxide from the device surface; thus selectivity gradually increases with use [.

Advance Protection for Three Phase Induction Motor using Microcontroller Atmega32

2018 ◽  
Vol 8 (1) ◽  
pp. 172
Author(s):  
Karan S Belsare ◽  
Gajanan D Patil
Keyword(s):  
Induction Motor ◽  
Low Cost ◽  
Short Circuit ◽  
Cost Factor ◽  
Protection Scheme ◽  
Three Phase ◽  
The Cost

A low cost and reliable protection scheme has been designed for a three phase induction motor against unbalance voltages, under voltage, over voltage, short circuit and overheating protection. Taking the cost factor into consideration the design has been proposed using microcontroller Atmega32, MOSFETs, relays, small CTs and PTs. However the sensitivity of the protection scheme has been not compromised. The design has been tested online in the laboratory for small motors and the same can be implemented for larger motors by replacing the i-v converters and relays of suitable ratings.

Janus – A New Approach to Air Combat Pilot Training

2019 ◽  
Vol 2019 (4) ◽  
pp. 7-22
Author(s):  
Georges Bridel ◽  
Zdobyslaw Goraj ◽  
Lukasz Kiszkowiak ◽  
Jean-Georges Brévot ◽  
Jean-Pierre Devaux ◽  
...  
Keyword(s):  
Low Cost ◽  
Cost Effective ◽  
High Energy ◽  
Training System ◽  
Embedded Sensors ◽  
Pilot Training ◽  
New Approach ◽  
Combat Aircraft ◽  
Air Combat ◽  
The Cost

Abstract Advanced jet training still relies on old concepts and solutions that are no longer efficient when considering the current and forthcoming changes in air combat. The cost of those old solutions to develop and maintain combat pilot skills are important, adding even more constraints to the training limitations. The requirement of having a trainer aircraft able to perform also light combat aircraft operational mission is adding unnecessary complexity and cost without any real operational advantages to air combat mission training. Thanks to emerging technologies, the JANUS project will study the feasibility of a brand-new concept of agile manoeuvrable training aircraft and an integrated training system, able to provide a live, virtual and constructive environment. The JANUS concept is based on a lightweight, low-cost, high energy aircraft associated to a ground based Integrated Training System providing simulated and emulated signals, simulated and real opponents, combined with real-time feedback on pilot’s physiological characteristics: traditionally embedded sensors are replaced with emulated signals, simulated opponents are proposed to the pilot, enabling out of sight engagement. JANUS is also providing new cost effective and more realistic solutions for “Red air aircraft” missions, organised in so-called “Aggressor Squadrons”.

scholarly journals A low-cost wireless endoscope camera: a preliminary report

2021 ◽  
Vol 27 (1) ◽  
Author(s):  
J. M. Lazarus ◽  
M. Ncube
Keyword(s):  
Minimally Invasive Surgery ◽  
Minimally Invasive ◽  
Video Transmission ◽  
Low Cost ◽  
Battery Life ◽  
Resource Constrained ◽  
High Definition ◽  
Industry Standard ◽  
Constrained Environments ◽  
The Cost

Abstract Background Technology currently used for surgical endoscopy was developed and is manufactured in high-income economies. The cost of this equipment makes technology transfer to resource constrained environments difficult. We aimed to design an affordable wireless endoscope to aid visualisation during rigid endoscopy and minimally invasive surgery (MIS). The initial prototype aimed to replicate a 4-mm lens used in rigid cystoscopy. Methods Focus was placed on using open-source resources to develop the wireless endoscope to significantly lower the cost and make the device accessible for resource-constrained settings. An off the shelf miniature single-board computer module was used because of its low cost (US$10) and its ability to handle high-definition (720p) video. Open-source Linux software made monitor mode (“hotspot”) wireless video transmission possible. A 1280 × 720 pixel high-definition tube camera was used to generate the video signal. Video is transmitted to a standard laptop computer for display. Bench testing included latency of wireless digital video transmission. Comparison to industry standard wired cameras was made including weight and cost. The battery life was also assessed. Results In comparison with industry standard cystoscope lens, wired camera, video processing unit and light source, the prototype costs substantially less. (US$ 230 vs 28 000). The prototype is light weight (184 g), has no cables tethering and has acceptable battery life (of over 2 h, using a 1200 mAh battery). The camera transmits video wirelessly in near real time with only imperceptible latency of < 200 ms. Image quality is high definition at 30 frames per second. Colour rendering is good, and white balancing is possible. Limitations include the lack of a zoom. Conclusion The novel wireless endoscope camera described here offers equivalent high-definition video at a markedly reduced cost to contemporary industry wired units and could contribute to making minimally invasive surgery possible in resource-constrained environments.

scholarly journals Multi-Blockchain-Based IoT Data Processing Techniques to Ensure the Integrity of IoT Data in AIoT Edge Computing Environments

Sensors ◽  
2021 ◽  
Vol 21 (10) ◽  
pp. 3515
Author(s):  
Sung-Ho Sim ◽  
Yoon-Su Jeong
Keyword(s):  
Low Cost ◽  
Third Party ◽  
Monitoring And Control ◽  
Constant Size ◽  
Computing Environments ◽  
Iot Devices ◽  
Cloud Servers ◽  
The Cost ◽  
Processing Techniques ◽  
And Control

As the development of IoT technologies has progressed rapidly recently, most IoT data are focused on monitoring and control to process IoT data, but the cost of collecting and linking various IoT data increases, requiring the ability to proactively integrate and analyze collected IoT data so that cloud servers (data centers) can process smartly. In this paper, we propose a blockchain-based IoT big data integrity verification technique to ensure the safety of the Third Party Auditor (TPA), which has a role in auditing the integrity of AIoT data. The proposed technique aims to minimize IoT information loss by multiple blockchain groupings of information and signature keys from IoT devices. The proposed technique allows IoT information to be effectively guaranteed the integrity of AIoT data by linking hash values designated as arbitrary, constant-size blocks with previous blocks in hierarchical chains. The proposed technique performs synchronization using location information between the central server and IoT devices to manage the cost of the integrity of IoT information at low cost. In order to easily control a large number of locations of IoT devices, we perform cross-distributed and blockchain linkage processing under constant rules to improve the load and throughput generated by IoT devices.

scholarly journals Design and Adoption of Low-Cost Point-of-Care Diagnostic Devices: Syrian Case

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 882
Author(s):  
M. Munzer Alseed ◽  
Hamzah Syed ◽  
Mehmet Cengiz Onbasli ◽  
Ali K. Yetisen ◽  
Savas Tasoglu
Keyword(s):  
Civil Wars ◽  
Healthcare Workers ◽  
New Technologies ◽  
Point Of Care ◽  
Low Cost ◽  
Healthcare Services ◽  
Efficient Solutions ◽  
Humanitarian Crises ◽  
Technology Experience ◽  
The Cost

Civil wars produce immense humanitarian crises, causing millions of individuals to seek refuge in other countries. The rate of disease prevalence has inclined among the refugees, increasing the cost of healthcare. Complex medical conditions and high numbers of patients at healthcare centers overwhelm the healthcare system and delay diagnosis and treatment. Point-of-care (PoC) testing can provide efficient solutions to high equipment cost, late diagnosis, and low accessibility of healthcare services. However, the development of PoC devices in developing countries is challenged by several barriers. Such PoC devices may not be adopted due to prejudices about new technologies and the need for special training to use some of these devices. Here, we investigated the concerns of end users regarding PoC devices by surveying healthcare workers and doctors. The tendency to adopt PoC device changes is based on demographic factors such as work sector, education, and technology experience. The most apparent concern about PoC devices was issues regarding low accuracy, according to the surveyed clinicians.

scholarly journals Longevity of Raw and Lyophilized Crude Urease Extracts

2021 ◽  
Vol 2 (2) ◽  
pp. 325-334
Author(s):  
Neda Javadi ◽  
Hamed Khodadadi Tirkolaei ◽  
Nasser Hamdan ◽  
Edward Kavazanjian
Keyword(s):  
Crude Extract ◽  
Room Temperature ◽  
Low Cost ◽  
Extraction Process ◽  
Crude Extracts ◽  
Simple Extraction ◽  
Commercial Applications ◽  
Stable Source ◽  
The Stability ◽  
The Cost

The stability (longevity of activity) of three crude urease extracts was evaluated in a laboratory study as part of an effort to reduce the cost of urease for applications that do not require high purity enzyme. A low-cost, stable source of urease will greatly facilitate engineering applications of urease such as biocementation of soil. Inexpensive crude extracts of urease have been shown to be effective at hydrolyzing urea for carbonate precipitation. However, some studies have suggested that the activity of a crude extract may decrease with time, limiting the potential for its mass production for commercial applications. The stability of crude urease extracts shown to be effective for biocementation was studied. The crude extracts were obtained from jack beans via a simple extraction process, stored at room temperature and at 4 ℃, and periodically tested to evaluate their stability. To facilitate storage and transportation of the extracted enzyme, the longevity of the enzyme following freeze drying (lyophilization) to reduce the crude extract to a powder and subsequent re-hydration into an aqueous solution was evaluated. In an attempt to improve the shelf life of the lyophilized extract, dextran and sucrose were added during lyophilization. The stability of purified commercial urease following rehydration was also investigated. Results of the laboratory tests showed that the lyophilized crude extract maintained its activity during storage more effectively than either the crude extract solution or the rehydrated commercial urease. While incorporating 2% dextran (w/v) prior to lyophilization of the crude extract increased the overall enzymatic activity, it did not enhance the stability of the urease during storage.

scholarly journals Low-Cost Calibration of Matching Error between Lidar and Motor for a Rotating 2D Lidar

2021 ◽  
Vol 11 (3) ◽  
pp. 913
Author(s):  
Chang Yuan ◽  
Shusheng Bi ◽  
Jun Cheng ◽  
Dongsheng Yang ◽  
Wei Wang
Keyword(s):  
Point Cloud ◽  
Low Cost ◽  
Shape Error ◽  
3D Point Cloud ◽  
Motor Shaft ◽  
Matching Error ◽  
Triangular Plate ◽  
Attitude Error ◽  
Shaft Angle ◽  
The Cost

For a rotating 2D lidar, the inaccurate matching between the 2D lidar and the motor is an important error resource of the 3D point cloud, where the error is shown both in shape and attitude. Existing methods need to measure the angle position of the motor shaft in real time to synchronize the 2D lidar data and the motor shaft angle. However, the sensor used for measurement is usually expensive, which can increase the cost. Therefore, we propose a low-cost method to calibrate the matching error between the 2D lidar and the motor, without using an angular sensor. First, the sequence between the motor and the 2D lidar is optimized to eliminate the shape error of the 3D point cloud. Next, we eliminate the attitude error with uncertainty of the 3D point cloud by installing a triangular plate on the prototype. Finally, the Levenberg–Marquardt method is used to calibrate the installation error of the triangular plate. Experiments verified that the accuracy of our method can meet the requirements of the 3D mapping of indoor autonomous mobile robots. While we use a 2D lidar Hokuyo UST-10LX with an accuracy of ±40 mm in our prototype, we can limit the mapping error within ±50 mm when the distance is no more than 2.2996 m for a 1 s scan (mode 1), and we can limit the mapping error within ±50 mm at the measuring range 10 m for a 16 s scan (mode 7). Our method can reduce the cost while the accuracy is ensured, which can make a rotating 2D lidar cheaper.

scholarly journals Research on Sapphire Deep Cavity Corrosion and Mask Selection Technology

Micromachines ◽  
2021 ◽  
Vol 12 (2) ◽  
pp. 136
Author(s):  
Yiingqi Shang ◽  
Hongquan Zhang ◽  
Yan Zhang
Keyword(s):  
Silicon Nitride ◽  
Silicon Dioxide ◽  
Chemical Vapor ◽  
Nitride Layer ◽  
Wet Etching ◽  
Silicon Dioxide Layer ◽  
Etching Depth ◽  
Deep Cavity ◽  
Mask Layer ◽  
Layer Composite

Aimed at the problem of the small wet etching depth in sapphire microstructure processing technology, a multilayer composite mask layer is proposed. The thickness of the mask layer is studied, combined with the corrosion rate of different materials on sapphire in the sapphire etching solution, different mask layers are selected for the corrosion test on the sapphire sheet, and then the corrosion experiment is carried out. The results show that at 250 °C, the choice is relatively high when PECVD (Plasma Enhanced Chemical Vapor Deposition) is used to make a double-layer composite film of silicon dioxide and silicon nitride. When the temperature rises to 300 °C, the selection ratio of the silicon dioxide layer grown by PECVD is much greater than that of the silicon nitride layer. Therefore, under high temperature conditions, a certain thickness of silicon dioxide can be used as a mask layer for deep cavity corrosion.

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