The anomalous threshold voltage shift of N- and P-MOSFET under flow and reflow of BPSG film with RTA and/or furnace
1994 ◽
Vol 41
(3)
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pp. 458-460
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2011 ◽
Vol 32
(7)
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pp. 910-912
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2008 ◽
Vol 47
(4)
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pp. 2103-2107
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2008 ◽
Vol 47
(4)
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pp. 3189-3192
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2009 ◽
Vol 53
(2)
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pp. 140-144
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2013 ◽
Vol 60
(5)
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pp. 1689-1694
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