Work function stability of thermal ALD Ta(Si)N gate electrodes on HfO/sub 2/ [CMOS device applications]

Author(s):  
J.C. Hooker ◽  
N. Perez ◽  
P. Alen ◽  
M. Ritala ◽  
M. Leskela ◽  
...  
Nanomaterials ◽  
2021 ◽  
Vol 11 (12) ◽  
pp. 3166
Author(s):  
Sayed Md Tariful Azam ◽  
Abu Saleh Md Bakibillah ◽  
Md Tanvir Hasan ◽  
Md Abdus Samad Kamal

In this study, we theoretically investigated the effect of step gate work function on the InGaAs p-TFET device, which is formed by dual material gate (DMG). We analyzed the performance parameters of the device for low power digital and analog applications based on the gate work function difference (∆ϕS-D) of the source (ϕS) and drain (ϕD) side gate electrodes. In particular, the work function of the drain (ϕD) side gate electrodes was varied with respect to the high work function of the source side gate electrode (Pt, ϕS = 5.65 eV) to produce the step gate work function. It was found that the device performance varies with the variation of gate work function difference (∆ϕS-D) due to a change in the electric field distribution, which also changes the carrier (hole) distribution of the device. We achieved low subthreshold slope (SS) and off-state current (Ioff) of 30.89 mV/dec and 0.39 pA/µm, respectively, as well as low power dissipation, when the gate work function difference (∆ϕS-D = 1.02 eV) was high. Therefore, the device can be a potential candidate for the future low power digital applications. On the other hand, high transconductance (gm), high cut-off frequency (fT), and low output conductance (gd) of the device at low gate work function difference (∆ϕS-D = 0.61 eV) make it a viable candidate for the future low power analog applications.


2002 ◽  
Vol 81 (22) ◽  
pp. 4192-4194 ◽  
Author(s):  
Tae-Ho Cha ◽  
Dae-Gyu Park ◽  
Tae-Kyun Kim ◽  
Se-Aug Jang ◽  
In-Seok Yeo ◽  
...  

2001 ◽  
Vol 4 (11) ◽  
pp. G85 ◽  
Author(s):  
Pushkar Ranade ◽  
Hideki Takeuchi ◽  
Tsu-Jae King ◽  
Chenming Hu

2006 ◽  
Vol 27 (4) ◽  
pp. 228-230 ◽  
Author(s):  
Bei Chen ◽  
R. Jha ◽  
H. Lazar ◽  
N. Biswas ◽  
Jaehoon Lee ◽  
...  

2001 ◽  
Vol 670 ◽  
Author(s):  
Pushkar Ranade ◽  
Ronald Lin ◽  
Qiang Lu ◽  
Yee-Chia Yeo ◽  
Hideki Takeuchi ◽  
...  

ABSTRACTContinued scaling of CMOS technology beyond the 100 nm technology node will rely on fundamental changes in transistor gate stack materials [1]. Refractory metals and their metallic derivatives are among the only candidates suitable for use as transistor gate electrodes. In earlier publications, Mo has been proposed as a potential candidate for use as a MOSFET gate electrode and the implantation of nitrogen ions into the Mo film has been observed to lower the interfacial work function of Mo [2,3]. This observation indicates the potential application of Mo as a CMOS gate electrode. In this paper, the dependence of the interfacial work function on the nitrogen implant parameters (viz. energy and dose) is discussed. In general, metal work functions at dielectric interfaces depend on the permittivity of the dielectric [3,4,5]. This dependence of the gate work function on dielectric permittivity presents a significant challenge for the integration of metal gate electrodes into future CMOS technology. In light of this, the ability to engineer the Mo gate work function over a relatively large range makes it an attractive candidate for this application.


2009 ◽  
Vol 30 (9) ◽  
pp. 925-927 ◽  
Author(s):  
M.E. Grubbs ◽  
M. Deal ◽  
Y. Nishi ◽  
B.M. Clemens

2005 ◽  
Vol 26 (7) ◽  
pp. 445-447 ◽  
Author(s):  
Ching-Huang Lu ◽  
G.M.T. Wong ◽  
M.D. Deal ◽  
W. Tsai ◽  
P. Majhi ◽  
...  

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