Identification of Critical Parameters for Plasma Process-Induced Damage in 130 and 100 nm CMOS Technologies
1998 ◽
Vol 282-283
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pp. 57-64
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2010 ◽
Vol 14
(1-2)
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pp. 11-27
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2019 ◽
2020 ◽
Vol 26
(40)
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pp. 5188-5204