ABSTRACTThe fabrication of thin-film batteries has been achieved for more than a decade (Energizer1, Oak Ridge2, Seoul National Univ.3). The inventor of the process was K. Kanehori(ndeI u 1) The processes utilized; sputtering, vapor deposition, solvent coating of electrolyte, have succeeded in laboratory trials in making working cells. No large commercial process nor application has developed to date though pilot plant capability exists4. Performance characteristics of microbatteries are sufficient to easily power micro-sensors and CMOS microelectronics. On chip carrier power capability could be realized. The materials of today's microbattery are detrimental to silicon technology which can be a draw back to commercialization. New materials and processes need to be investigated.
On-chip solid-state cooling for integrated circuits using thin-film microrefrigerators
