Silicided silicon-sidewall source and drain (S/sup 4/D) structure for high-performance 75-nm gate length pMOSFETs

Author(s):  
T. Yoshitomi ◽  
M. Saito ◽  
T. Ohguro ◽  
M. Ono ◽  
H.S. Momose ◽  
...  
Keyword(s):  
2021 ◽  
Vol 5 (1) ◽  
Author(s):  
Aryan Afzalian

AbstractUsing accurate dissipative DFT-NEGF atomistic-simulation techniques within the Wannier-Function formalism, we give a fresh look at the possibility of sub-10-nm scaling for high-performance complementary metal oxide semiconductor (CMOS) applications. We show that a combination of good electrostatic control together with high mobility is paramount to meet the stringent roadmap targets. Such requirements typically play against each other at sub-10-nm gate length for MOS transistors made of conventional semiconductor materials like Si, Ge, or III–V and dimensional scaling is expected to end ~12 nm gate-length (pitch of 40 nm). We demonstrate that using alternative 2D channel materials, such as the less-explored HfS2 or ZrS2, high-drive current down to ~6 nm is, however, achievable. We also propose a dynamically doped field-effect transistor concept, that scales better than its MOSFET counterpart. Used in combination with a high-mobility material such as HfS2, it allows for keeping the stringent high-performance CMOS on current and competitive energy-delay performance, when scaling down to virtually 0 nm gate length using a single-gate architecture and an ultra-compact design (pitch of 22 nm). The dynamically doped field-effect transistor further addresses the grand-challenge of doping in ultra-scaled devices and 2D materials in particular.


This work investigates the performance of SiGe Hybrid JunctionLess FinFET (HJLFinFET) on insulator with different mole fraction x. The band gap difference for different mole fractions are explored. Impact of electrical characteristics and SCE of HJLFinFET are analyzed with fin width 10nm and varying gate length from 5nm-40nm for different mole fraction. Synopsys Sentaurus TCAD tool(sprocess and sdevice) are used in Device modelling and device simulation. Simulation results shows improvement in On current, DIBL and SS. For high performance application SiGe with mole fraction less than 0.3 at channel length less than 10nm are suitable because of the bandgap value is similar to silicon.


Nanoscale ◽  
2020 ◽  
Vol 12 (28) ◽  
pp. 15443-15452
Author(s):  
Ying Guo ◽  
Feng Pan ◽  
Gaoyang Zhao ◽  
Yajie Ren ◽  
Binbin Yao ◽  
...  

ML GeSe field-effect transistors have an excellent device performance, even at the 1 nm gate-length. The on-state current of the devices can fulfill the requirements of the International Technology Roadmap for Semiconductors (2013 version).


2002 ◽  
Vol 743 ◽  
Author(s):  
Jennifer A. Bardwell ◽  
Ying Liu ◽  
James B. Webb ◽  
Haipeng Tang ◽  
Stephen J. Rolfe ◽  
...  

ABSTRACTAlGaN/GaN two dimensional electron gas (2DEG) heterostructures were grown by ammonia-MBE on sapphire and SiC substrates. Devices fabricated from these optimized HFET layers, with optically defined gates showed excellent characteristics, e.g. a maximum drain current density of 1.3 A/mm, maximum transconductance of 220 mS/mm, fT of 15.6 GHz and fMAX of 58.1 GHz was measured for devices with 0.9 μm gate length and 40 μm gate width. Shorter gate length devices exhibited higher frequency responses: fT of 68 GHz and fMAX of 125 GHz for 0.25 μm gate length and fT of 103 GHz and fMAX of 170 GHz for 0.15 μm gate length. However, these devices showed “current collapse” when subjected to load pull measurements. Current collapse was also observed in sequentially repeated DC measurements in the dark, both on sapphire and SiC substrates, although the degree of collapse varied greatly from one wafer to another. One method of reducing the current collapse was to apply a thin (100 - 6000 Å) magnetron sputtered AlN passivation layer (over the gates) or a 500 Å layer under the gates so that MISFET devices were obtained. The electrical characteristics of the passivated and unpassivated devices are discussed.


2005 ◽  
Vol 26 (11) ◽  
pp. 823-825 ◽  
Author(s):  
Yu-Ming Lin ◽  
J. Appenzeller ◽  
Zhihong Chen ◽  
Zhi-Gang Chen ◽  
Hui-Ming Cheng ◽  
...  

2002 ◽  
Vol 49 (12) ◽  
pp. 2263-2270 ◽  
Author(s):  
S. Inaba ◽  
K. Okano ◽  
S. Matsuda ◽  
M. Fujiwara ◽  
A. Hokazono ◽  
...  

2002 ◽  
Vol 38 (5) ◽  
pp. 252 ◽  
Author(s):  
V. Kumar ◽  
W. Lu ◽  
F.A. Khan ◽  
R. Schwindt ◽  
A. Kuliev ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document