Silicided silicon-sidewall source and drain (S/sup 4/D) structure for high-performance 75-nm gate length pMOSFETs
2019 ◽
Vol 8
(12S2)
◽
pp. 61-66
Keyword(s):
2005 ◽
Vol 26
(11)
◽
pp. 823-825
◽
2002 ◽
Vol 49
(12)
◽
pp. 2263-2270
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