Dynamics Modeling and Identification of a Dual-Blade Wafer Handling Robot
2013 ◽
Keyword(s):
This paper presents the dynamics modeling and dynamic identification of a dual-blade wafer handling robot. An explicit form dynamic model for this 8-link parallel robot is proposed. The dynamic model is transformed into a decoupled form to enable dynamic parameters identification with least-square regression. A well conditioned trajectory is chosen for identification experiment. Both viscous friction and Coulomb friction are considered to make the model more reliable. Model has been validated by experiments.
Keyword(s):
2011 ◽
Vol 121-126
◽
pp. 2006-2010
Keyword(s):
2014 ◽
Vol 624
◽
pp. 461-469
◽
2018 ◽
Vol 1
(1)
◽
pp. 52
◽
2020 ◽
Vol 27
(35)
◽
pp. 43439-43451
◽
2013 ◽
Vol 82
◽
pp. 27-40
◽
2021 ◽
Vol 667
(1)
◽
pp. 012058