PIEZOELECTRIC PROPERTIES OF PZT FILMS PREPARED BY HYDROTHERMAL METHOD

2006 ◽  
Vol 20 (25n27) ◽  
pp. 3805-3810 ◽  
Author(s):  
NOBUYOSHI FUJIWARA ◽  
KAZUHIRO KUSUKAWA ◽  
KHAIRUNISAK ABDUL RAZAK ◽  
WEI GAO
Keyword(s):  
Hydrothermal Method ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Compressive Loading ◽  
Pure Titanium ◽  
Lead Zirconate ◽  
Loading Frequency ◽  
X Ray Diffraction ◽  
Pzt Films ◽  
Transverse Effect

Lead zirconate titanate (PZT) thin films of 5 μm thick were produced by a hydrothermal method on pure titanium substrates. ZrOCl 2-8 H 2 O , Pb ( NO 3)2 and TiO 2 were used as precursors and KOH as a promoter. The hydrothermal synthesis of PZT includes nucleation and crystal growth processes at 120°C or 140°C. The crystallization states were investigated by using scanning electron microscopy and X-Ray diffraction. Piezoelectric properties were evaluated from unimorph cantilever type actuators made of the films. The relationships between the deflection of the actuator due to piezoelectric transverse effect and applied electric field in the direction of thickness of the films showed good linearity. The output voltage from the films under cyclic compressive loading increased with increasing loading frequency, and is saturated at 10 Hz. The PZT films produced by the present methods are satisfactory as a smart material, and are better than the films produced using TiCl 4 as Ti precursor.

Characterization of PZT Thin Films Crystallographic Phases

1991 ◽  
Vol 35 (A) ◽  
pp. 159-167 ◽  
Author(s):  
Raymond P. Goehner ◽  
Michael O. Eatough ◽  
Bruce A. Tuttle ◽  
Thomas J. Headley
Keyword(s):  
Lead Zirconate Titanate ◽  
Grazing Incidence ◽  
Lead Zirconate ◽  
Crystallographic Structure ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Pzt Films ◽  
Primary Focus ◽  
Structure Versus

AbstractThe use of grazing incidence parallel beam x-ray diffraction (GIXRD) in the characterization of lead zirconate titanate (PZT) films is described. This tool has enabled us to depth profile the films. The transmission electron microscopy (TEM) results obtained from a cross section of one film are shown to compliment the GIXRD results. The variation in crystallographic structure versus depth in the film was the primary focus of this study.The insults from three PZT films having Zr/Ti ratios of 25/75, 48/52, and 75/25 are given. TEM results are reported from the sample with a Zr/Ti ratio of 48/52.

COMPARISON OF PROPERTIES OF PLZT SYSTEM WITH DIFFERENT FORMULATIONS

2006 ◽  
Vol 20 (29) ◽  
pp. 1883-1892
Author(s):  
S. K. PANDEY ◽  
O. P. THAKUR ◽  
ANSHU GOYAL ◽  
D. S. RAWAL ◽  
CHANDRA PRAKASH ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Room Temperature ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
Rhombohedral Structure ◽  
X Ray Diffraction ◽  
Sem Study ◽  
A Site ◽  
Single Phase Formation ◽  
Diffuse Phase

We report the comparison of structural, dielectric, ferroelectric and piezoelectric properties of lanthanum-modified lead zirconate titanate (PLZT) ceramics with the substitution of 7 and 8 mol% La 3+ content in PZT (65/35) by three different formulations. The three formulations are (i) cation compensated at A-site, (ii) valency compensated at A-site and (iii) all sites (A and B) compensated. Samples were prepared by solid-state reaction route. X-ray diffraction (XRD) study shows single-phase formation with rhombohedral structure in all the samples. Scanning electron microscopy (SEM) study shows variation in grain size with different formulations. Dielectric studies for all the PLZT samples have been carried out as a function of temperature (room temperature to 350°C) at few selected frequencies (0.1, 1, 10 and 100 kHz) showing characteristics of diffuse phase transition (DPT). Dielectric properties of the poled and unpoled samples at room temperature have also been compared. All these compositions show well-defined ferroelectric behavior with significant change in the coercive field (Ec). Maximum piezoelectric properties have been obtained for the PLZT system with 8 mol% La 3+ prepared by formulation (i).

Characterization of Lead Zirconate Titanate Powders Prepared by a Hydrothermal Method

2005 ◽  
Vol 902 ◽  
Author(s):  
Lingjuan Che ◽  
Yongping Ding ◽  
Jinrong Cheng ◽  
Chao Chen ◽  
Zhongyan Meng
Keyword(s):  
Electron Microscopy ◽  
Hydrothermal Method ◽  
Lead Zirconate Titanate ◽  
Fourier Transformation ◽  
Lead Zirconate ◽  
X Ray Diffraction ◽  
X Ray ◽  
Zirconate Titanate ◽  
Scanning Electron

AbstractLead Zirconate Titanate (PZT) powders have been synthesized by a hydrothermal method at the processing temperatures of 120-220 °C for 1.5-50 hours, based on the reaction of Pb(CH3COOH)2·3H2O, ZrOCl2·8H2O, Ti(C4H9O)4 and KOH. Hydrothermally treated PZT powders were characterized using X-ray diffraction (XRD), scanning electron microscopy (SEM), and Fourier transformation infrared (FTIR) techniques respectively. The influences of hydrothermal synthesize conditions on the crystalline structure and the morphology of PZT particles were investigated. Crystallized PZT powders could be synthesized at the KOH concentration of >2.5 mol/l.

Effect of Processing Conditions on the Piezoelectric Properties of Sol-gel Derived Pb(Zr,Ti)O3 Films for Micromechanical Applications

2005 ◽  
Vol 20 (6) ◽  
pp. 1428-1435 ◽  
Author(s):  
J. Pérez ◽  
P.M. Vilarinho ◽  
A.L. Kholkin ◽  
J. Manuel Herrero ◽  
C. Zaldo
Keyword(s):  
Lead Zirconate Titanate ◽  
Annealing Temperature ◽  
Piezoelectric Properties ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Piezoelectric Response ◽  
Preparation Conditions ◽  
Sol Gel Process ◽  
Pzt Films ◽  
Interface Effects

Lead zirconate titanate (PZT) films of composition close to the morphotropic phase boundary were deposited onto standard Si/SiO2/Ti/Pt substrates using a modified sol-gel process. The preparation conditions were optimized to obtain high-quality films at sufficiently low temperature (Ta - 500 °C). The dielectric, ferroelectric, and piezoelectric properties of the films were then measured as a function of the annealing temperature and the number of distillations to evaluate their suitability for micromechanical applications. The maximum values of the longitudinal charge and voltage piezoelectric coefficients were d33 ∼ 65 pm/V and g33 ∼ 4 × 10−3 Vm/N, respectively. The results indicate that the piezoelectric properties improved and became saturated with increasing number of distillations and are almost independent on Ta. Only moderate decrease of the piezoelectric response with frequency suggests that the investigated PZT films can be used in high-frequency piezoelectric applications. The results are discussed in terms of the microstructure and interface effects on the piezoelectric deformation in ferroelectric thin films.

DEVELOPMENT OF PEROVSKITE INPrSUBSTITUTEDPb(Zr0.52Ti0.48)O3AND DIELECTRIC CHARACTERISTIC

2006 ◽  
Vol 20 (21) ◽  
pp. 3071-3080 ◽  
Author(s):  
N. UDOMKAN ◽  
P. LIMSUWAN ◽  
P. WINOTAI ◽  
T. TUNKASIRI
Keyword(s):  
Lead Zirconate Titanate ◽  
Ferroelectric Property ◽  
Piezoelectric Properties ◽  
Pyrochlore Phase ◽  
Hysteresis Loops ◽  
Lead Zirconate ◽  
X Ray Diffraction ◽  
Scanning Calorimetry ◽  
Dopant Content ◽  
X Ray

The purpose of this research is to investigate the structure of lead zirconate titanate ceramics ( Zr:Ti =52:48) when doped with Pr2O3and the corresponding properties such as micro-structural properties, physical properties, dielectric constant (εr), piezoelectric properties (kp, Qm, and d33), and the ferroelectric property. The materials were prepared via conventional mixed oxide method and sintered at 1200°C. The Rietveld refinement of X-ray diffraction patterns and combination of both patterns revealed the tetragonal structure for all samples to have space group of P4mm. For higher dopant content (10 mol%), the pyrochlore phase of Pr2O3also appeared in the respective samples. These pyrochlore phases caused the detriment of dielectric and piezoelectric properties. For those with lower dopant content (1.00 mol%), the Pr ion substituted at the A and B sites with isovalent dopant effects, i.e. a lower value of εr, and kp. The hysteresis loops indicated the ferroelectric property for all samples. The microstructure showed dense grain according to a high density and the additional phases of Pr2O3were clearly observed for 10 mol% doping. The Curie temperature decreased with increasing dopant content, as determined from high temperature X-ray diffraction and differential scanning calorimetry.

Hydrothermal epitaxy of lead free (Na,K)NbO3-based piezoelectric films

2013 ◽  
Vol 1547 ◽  
pp. 45-52
Author(s):  
Albertus D. Handoko ◽  
Gregory K. L. Goh
Keyword(s):  
Thin Films ◽  
Solid Solution ◽  
Phase Boundary ◽  
Hydrothermal Method ◽  
Morphotropic Phase Boundary ◽  
Solid Solutions ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
Lead Free

ABSTRACTLead free niobate solid solutions can exhibit piezoelectric properties comparable to that of lead zirconate titanate piezoelectrics in the vicinity of its morphotropic phase boundary (MPB). Here we describe how (Na,K)NbO3 and (Na,K)NbO3-LiTaO3 solid solution thin films can be grown epitaxially by the hydrothermal method at temperatures of 200 °C or below in water and be made ferro- and piezoelectrically active by a simple 2 step post growth treatment.

scholarly journals Piezoelectric Properties of Pb1−xLax(Zr0.52Ti0.48)1−x/4O3 Thin Films Studied by In Situ X-ray Diffraction

Materials ◽  
2020 ◽  
Vol 13 (15) ◽  
pp. 3338
Author(s):  
Thomas W. Cornelius ◽  
Cristian Mocuta ◽  
Stéphanie Escoubas ◽  
Luiz R. M. Lima ◽  
Eudes B. Araújo ◽  
...  
Keyword(s):  
Thin Films ◽  
Electric Fields ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
X Ray Diffraction ◽  
X Ray ◽  
Ac Electric Fields ◽  
Zirconate Titanate

The piezoelectric properties of lanthanum-modified lead zirconate titanate Pb1−xLax(Zr0.52Ti0.48)1−x/4O3 thin films, with x = 0, 3 and 12 mol% La, were studied by in situ synchrotron X-ray diffraction under direct (DC) and alternating (AC) electric fields, with AC frequencies covering more than four orders of magnitude. The Bragg reflections for thin films with low lanthanum concentration exhibit a double-peak structure, indicating two contributions, whereas thin films with 12% La possess a well-defined Bragg peak with a single component. In addition, built-in electric fields are revealed for low La concentrations, while they are absent for thin films with 12% of La. For static and low frequency AC electric fields, all lanthanum-modified lead zirconate titanate thin films exhibit butterfly loops, whereas linear piezoelectric behavior is found for AC frequencies larger than 1 Hz.

Thickness Dependence of the Electrical Properties of Sol-Gel Derived Lead Zirconate Titanate Thin Films with (111) and (100) Texture

1997 ◽  
Vol 493 ◽  
Author(s):  
F. Chu ◽  
F. Xu ◽  
J. Shepard ◽  
S. Trolier-McKinstry
Keyword(s):  
Dielectric Constant ◽  
Lead Zirconate Titanate ◽  
Remanent Polarization ◽  
Critical Thickness ◽  
Piezoelectric Properties ◽  
Sol Gel ◽  
Precursor Solution ◽  
Lead Zirconate ◽  
Thickness Dependence ◽  
Pzt Films

ABSTRACTCrack-free (111) and (100)-textured Pb(Zr0.52Ti0.48)O3 films with thicknesses ranging from 0.25 to 2.5 μm were prepared using a methoxyethanol-based precursor solution, multiple spin-coating and multiple crystallization steps. The thickness dependence of the dielectric, ferroelectric and piezoelectric properties were investigated on both (111) and (100) oriented PZT films. In both cases, the degree of preferred orientation did not change with thickness. It is found that the dielectric constant, remanent polarization and piezoelectric coefficients (d33 and d31) increase with increasing film thickness. The (100)-textured film showed higher dielectric constant but lower remanent polarization relative to (111) textured film. 1 μm was identified to be a critical thickness that marks the change of dielectric, ferroelectric and piezoelectric behaviors as a function of thickness.

Lead Zirconate Titanate (PZT) Films Deposited by a Hydrothermal Method.

ChemInform ◽  
2004 ◽  
Vol 35 (7) ◽  
Author(s):  
Sebastien Euphrasie ◽  
Sylvie Daviero-Minaud ◽  
Philippe Pernod
Keyword(s):  
Hydrothermal Method ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Pzt Films

Lead Zirconate Titanate Films Produced by Pulsed Laser Deposition

1990 ◽  
Vol 200 ◽  
Author(s):  
K. L. Saenger ◽  
R. A. Roy ◽  
K. F. Etzold ◽  
J. J. Cuomo
Keyword(s):  
Pulsed Laser Deposition ◽  
Lead Zirconate Titanate ◽  
Pulsed Laser ◽  
Lead Zirconate ◽  
Laser Deposition ◽  
X Ray Diffraction ◽  
Electrical Measurements ◽  
Zirconate Titanate ◽  
Pzt Films ◽  
Before And After

ABSTRACTThe synthesis of ferroelectric lead zirconate titanate (PZT) films by pulsed laser deposition at 248 nm is described. This study has focused on producing thin (≲ 0.6μm) PZT films on bare and platinum coated MgO < 100 > substrates. Deposition was in an oxygen gas ambient (30 mTorr) at temperatures typically ∼ 525 °C. Rutherford Backscattering Spectroscopy (RBS) was used to evaluate film composition. Film lead content was found to decrease both with increasing laser fluence, and increasing substrate temperature. Film microstructure was evaluated by x-ray diffraction. Electrical measurements were made on the films before and after annealing to determine the dielectric constant and polarization. Properties after annealing were substantially improved, with dielectric permittivity values comparable to bulk PZT.

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