IN SITU HALL MEASUREMENTS OF MACROSCOPIC ELECTRICAL PROPERTIES OF CHROMIUM-COVERED Si(111) SURFACES
The first in situ Hall measurements of the ordered chromium surface phases on Si(111) substrate and CrSi(111) epitaxial films after their formation are presented. Formation of Si (111)-(1× 1)- Cr (0.1 nm Cr) and Si(111)-[([Formula: see text])/30°]-Cr (0.3 nm Cr) surface phases results in an increase in the sheet resistivity of Si(111)-Cr surface phase samples. The conductivities along the surface phases at these chromium thicknesses are very low. The conductivity decrease is caused by a decrease in the electron mobility in the surface phase layers. Formation of an epitaxial CrSi(111) layer with averaged Hall parameters (hole mobility of 440 cm 2· V -1· s -1, sheet resistivity of 2.2·104 Ω-1 and sheet hole concentration of 0.65·1012 cm -2) has been observed at 1.5–1.8 nm of chromium thickness.