Piezoelectric nanoindentation

2006 ◽  
Vol 21 (3) ◽  
pp. 552-556 ◽  
Author(s):  
Andrei Rar ◽  
G.M. Pharr ◽  
W.C. Oliver ◽  
E. Karapetian ◽  
Sergei V. Kalinin

Piezoelectric nanoindentation (PNI) has been developed to quantitatively address electromechanical coupling and pressure-induced dynamic phenomena in ferroelectric materials on the nanoscale. In PNI, an oscillating voltage is applied between the back side of the sample and the indenter tip, and the first harmonic of bias-induced surface displacement at the area of indenter contact is detected. PNI is implemented using a standard nanoindentation system equipped with a continuous stiffness measurement system. The piezoresponse of polycrystalline lead zirconate titanate (PZT) and BaTiO3 piezoceramics was studied during a standard nanoindentation experiment. For PZT, the response was found to be load independent, in agreement with theoretical predictions. In polycrystalline barium titanate, a load dependence of the piezoresponse was observed. The potential of piezoelectric nanoindentation for studies of phase transitions and local structure-property relations in piezoelectric materials is discussed.

2020 ◽  
Vol 225 ◽  
pp. 04012
Author(s):  
JY. Ferrandis ◽  
O. Gatsa ◽  
P. Combette ◽  
D. Fourmentel ◽  
C. Destouches ◽  
...  

In this article we present a first part of the results obtained during an irradiation campaign conducted at the Jozef Stefan Institute to observe the behaviour of piezoelectric materials under gamma and neutron flux. Specific instrumentation has been developed and has enabled the monitoring throughout the irradiation of several materials such as lead zirconate titanate (PZT) or modified Bismuth Titanate (BiT) in either massive or thick film form. Various parameters such as resonance frequency, electromechanical coupling coefficient, electrical capacitance, dielectric losses were measured as a function of the flow and dose received. The results obtained confirm that the samples work up to doses of 10 18 n°/cm2 and that the behaviour of the samples varies according to their composition and form.


IUCrJ ◽  
2018 ◽  
Vol 5 (1) ◽  
pp. 73-81 ◽  
Author(s):  
Nan Zhang ◽  
Hiroko Yokota ◽  
A. M. Glazer ◽  
D. A. Keen ◽  
Semën Gorfman ◽  
...  

Lead zirconate titanate (PZT) is one of the most widely studied piezoelectric materials, mainly because of its `mysterious' relationship between the so-called morphotropic phase boundary (MPB) and its strong piezoelectric coupling factor. Using results from a pair distribution function analysis, this paper examines how the complex local structure in PZT affects the long-range average structure across the MPB. A monoclinic M C type structure is discovered in PZT. A first-order transformation between the monoclinic M A and M C components in both the average and local structures explains the sudden change in piezoelectric effect around these compositions. The role of polarization rotation in the enhancement of the piezoelectric properties is discussed with respect to the composition of PZT. The structure–property relationship that is revealed by this study explains the unique properties of PZT, and may be applicable in the design of new MPB-type functional materials.


2002 ◽  
Vol 748 ◽  
Author(s):  
C. L. Zhao ◽  
Z. H. Wang ◽  
W. Zhu ◽  
O. K. Tan ◽  
H. H. Hng

ABSTRACTLead zirconate titanate (PZT) films are promising for acoustic micro-devices applications because of their extremely high electromechanical coupling coefficients and excellent piezoelectric response. Thicker PZT films are crucial for these acoustic applications. A hybrid sol-gel technology has been developed as a new approach to realize simple and cost-effective fabrication of high quality PZT thick films. In this paper, PZT53/47 thick films with a thickness of 5–50 μm are successfully deposited on Pt-coated silicon wafer by using the hybrid sol-gel technology. The obtained PZT thick films are dense, crack-free, and have a nano-sized microstructure. The processing parameters of this technology have been evaluated. The microstructure of the film has been observed using field-emission scanning electron microscopy and the crystallization process has been monitored by the X-ray diffraction. The thick films thus made are good candidates for fabrication of piezoelectric diaphragm which will be an essential element of microspeaker and microphone arrays.


2021 ◽  
Vol 9 (1) ◽  
pp. 1321-1328
Author(s):  
Abdul Aziz Khan J , Shanmugaraja P , Kannan S

MEMS Energy Harvesting(EH) devices are excepted to grow in the upcoming years, due to the increasing aspects of MEMS EH devices in vast applications. In Recent advancements in energy harvesting (EH) technologies wireless sensor devices play a vital role to extend their lifetime readily available in natural resources. In this paper the design of MEMS Cantilever at low frequency (100Hz) with different piezoelectric materials Gallium Arsenide (GaAs), Lead Zirconate Titanate (PZT-8), Tellurium Dioxide (TeO2), Zinc oxide (ZnO) is simulated and performance with different materials are compared. The results are analyzed with various parameters such as electric potential voltage, von mises stress, displacement. The paper discusses the suitability of the piezoelectric material for MEMS fully cochlear implantable sensor application.


Author(s):  
Ryan Rudy ◽  
Adam J. Cohen ◽  
Jeffrey S. Pulskamp ◽  
Ronald G. Polcawich ◽  
Kenn R. Oldham

Terrestrial and other millimeter-scale autonomous micro-robots face significant challenges in surveying their environment, due to small power budgets and payload capacities. One low-power, low-mass form of obstacle detection is tactile sensing of contact with other surfaces. In this-paper, a tactile sensor inspired by insect antennae is described, based on thin-film lead-zirconate-titanate (PZT) transduction. Thin-film piezoelectric materials permit actuation and sensing mechanisms to be coupled in very small, compact structures, as well as complement previously developed microrobotic leg mechanisms. Key design parameters for the tactile sensor are introduced and analyzed in terms of sweep frequency and range of motion, and signals from sensor impact are predicted. Experimental results with partially-released prototype actuators show respectable agreement with modeled behavior for dynamic motion, though impact detection is hampered by large feedthrough disturbances. Completed sensors range from 2 to 4 mm in length and are approximately 500 μm in width, with a sweep range of nearly 1 mm demonstrated from a 2 mm long prototype.


2011 ◽  
Vol 22 (16) ◽  
pp. 1879-1886 ◽  
Author(s):  
Clark Andrews ◽  
Yirong Lin ◽  
Haixiong Tang ◽  
Henry A. Sodano

Piezoelectric ceramics offer exceptional sensing and actuation properties, however, they are prone to breakage and are difficult to apply to curved surfaces in their monolithic form. One method to alleviate these issues is through the use of 0–3 active composites, which are formed by embedding piezoelectric particles into a polymer matrix that protects the ceramic from breaking under mechanical loading. This class of material offers certain advantages over monolithic materials; however, they have seen little use due to the low electromechanical coupling offered by these materials. Here, we demonstrate that by controlling the aspect ratio of the filler, the electromechanical coupling coefficient can be significantly improved. For all volume fractions tested, nanocomposites with high aspect ratio lead nanowires filler had higher coupling with increases as large as 2.3 times. Furthermore, the nanocomposite’s coupling was more than 50% of the piezoceramic fillers’ when nanowires were used.


2003 ◽  
Vol 782 ◽  
Author(s):  
M. C. Robinson ◽  
J. C. Raupp ◽  
I. Demir ◽  
C. D. Richards ◽  
R. F. Richards ◽  
...  

ABSTRACTPiezoelectric materials can convert mechanical and electrical energy, a particularly useful tool in developing micro and nanoscale systems. Characterizing the electromechanical behavior is essential to the design and optimization of the material's and device's performance. This paper examines the influence of boundary (clamping) conditions, relative thickness variations between the active one to two micron thick piezoelectric membrane and underlying passive support structure, and the electrode coverage on the electromechanical behavior. Membranes were fabricated with silicon and lead zirconate titanate (PZT) with a ratio of Zr to Ti of 40:60 that provide thickness ratios between 1:2 and 2:1 by depositing the PZT using sequential solution deposition. PZT films contain a tensile stress that accumulates during processing, therefore a compressive stressed layer of tungsten was sputtered on bulk micromachined membranes to produce a near zero net residual stress. A nonlinear finite element numerical simulation technique is utilized for the analysis of the composite thin film. A comparison between the behavioral trends determined by simulation and experimental methods will be discussed.


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