IN-SITU Analysis Of The Microstructure of Thermally Treated Thin Copper Films

1993 ◽  
Vol 309 ◽  
Author(s):  
J. Nucci ◽  
H. Neves ◽  
Y. Shacham ◽  
E. Eisenbraun ◽  
B. Zheng ◽  
...  
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
Room Temperature ◽  
Thermal Evolution ◽  
Electron Beam Evaporation ◽  
Copper Films ◽  
Tem Analysis ◽  
Heat Treated ◽  
Baseline Information

AbstractCopper thin films were deposited by sputtering, electron beam evaporation, and electroless plating onto nitride membranes for TEM analysis. The samples were heat treated in-situ from room temperature to 600 °C for structural and chemical analysis. The as-deposited and heat treated microstructures were investigated. Orientation changes with heat treatment and reactions among the sample layers were analyzed by electron diffraction. This work provides baseline information for a study of the thermal evolution of copper lines.

Phase Transformations in Sol-Gel PZT Thin Films

2000 ◽  
Vol 623 ◽  
Author(s):  
D.P. Eakin ◽  
M.G. Norton ◽  
D.F. Bahr
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
Room Temperature ◽  
Structural Changes ◽  
Sol Gel ◽  
Ex Situ ◽  
Ambient Conditions ◽  
Crystalline Films ◽  
In Situ Heating

AbstractThin films of PZT were deposited onto platinized and bare single crystal NaCl using spin coating and sol-gel precursors. These films were then analyzed using in situ heating in a transmission electron microscope. The results of in situ heating are compared with those of an ex situ heat treatment in a standard furnace, mimicking the heat treatment given to entire wafers of these materials for use in MEMS and ferroelectric applications. Films are shown to transform from amorphous to nanocrystalline over the course of days when held at room temperature. While chemical variations are found between films crystallized in ambient conditions and films crystallized in the vacuum conditions of the microscope, the resulting crystal structures appear to be insensitive to these differences. Significant changes in crystal structure are found at 500°C, primarily the change from largely amorphous to the beginnings of clearly crystalline films. Crystallization does occur over the course of weeks at room temperature in these films. Structural changes are more modest in these films when heated in the TEM then those observed on actual wafers. The presence of Pt significantly influences both the resulting structure and morphology in both in situ and ex situ heated films. Without Pt present, the films appear to form small, 10 nm grains consisting of both cubic and tetragonal phases, whereas in the case of the Pt larger, 100 nm grains of a tetragonal phase are formed.

scholarly journals CHARACTERISTICS OF LITHIUM LANTHANUM TITANATE THIN FILMS MADE BY ELECTRON BEAM EVAPORATION FROM NANOSTRUCTURED La0.67-xLi 3xTiO3 TARGET

2017 ◽  
Vol 25 (2) ◽  
pp. 243-250
Author(s):  
Nguyen Nang Dinh ◽  
Le Dinh Trong ◽  
Pham Duy Long
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Ionic Conductivity ◽  
Room Temperature ◽  
Xrd Analysis ◽  
Electron Beam Evaporation ◽  
Electrochromic Devices ◽  
Lanthanum Titanate ◽  
Average Size ◽  
Beam Deposition

Bulk nanostructured perovskites of La0.67-xLi3xTiO3 (LLTO) were prepared by using thermally ball-grinding from compounds of La2O3, Li2CO3 and TiO2. From XRD analysis, it was found that LTTO materials were crystallized with nano-size grains of an average size of 30 nm. The bulk ionic conductivity was found strongly dependent on the Li+ composition, the samples with x = 0.11 (corresponding to a La0.56Li0.33TiO3 compound) have the best ionic conductivity, which is ca. 3.2 x 10-3 S/cm at room temperature. The LLTO amorphous films were made by electron beam deposition. At room temperature the smooth films have ionic conductivity of 3.5 x 10-5  S/cm and transmittance of 80%. The optical bandgap of the films was found to be of 2.3 eV. The results have shown that the perovskite La0.56Li0.33TiO3  thin films can be used for a transparent solid electrolyte in ionic battery and in all-solid-state electrochromic devices, in particular.    

In situ X-ray diffraction study of crystallization process of GeSbTe thin films during heat treatment

2005 ◽  
Vol 244 (1-4) ◽  
pp. 281-284 ◽  
Author(s):  
Naohiko Kato ◽  
Ichiro Konomi ◽  
Yoshiki Seno ◽  
Tomoyoshi Motohiro
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
Diffraction Study ◽  
Crystallization Process ◽  
X Ray Diffraction ◽  
X Ray

In-Situ Tem Investigation During Thermal Cycling of thin Copper Films

1996 ◽  
Vol 436 ◽  
Author(s):  
R.-M. Keller ◽  
W. Sigle ◽  
S. P. Baker ◽  
O. Kraft ◽  
E. Arzt
Keyword(s):  
Grain Growth ◽  
Room Temperature ◽  
Dislocation Motion ◽  
In Situ Tem ◽  
Copper Films ◽  
Stress Evolution ◽  
Cu Films ◽  
Transmission Electron ◽  
Insight Into

AbstractIn-situ transmission electron microscopy (TEM) was performed to study grain growth and dislocation motion during temperature cycles of Cu films with and without a cap layer. In addition, the substrate curvature method was employed to determine the corresponding stresstemperature curves from room temperature up to 600°C. The results of the in-situ TEM investigations provide insight into the microstructural evolution which occurs during the stress measurements. Grain growth occurred continuously throughout the first heating cycle in both cases. The evolution of dislocation structure observed in TEM supports an explanation of the stress evolution in both capped and uncapped films in terms of dislocation effects.

Copper-alumina materials made by infiltration in boehmite

1995 ◽  
Vol 10 (9) ◽  
pp. 2271-2276 ◽  
Author(s):  
V. Pierre ◽  
D. Pierre ◽  
A.C. Pierre
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
Phase Transformation ◽  
Sandwich Structures ◽  
Sol Gel ◽  
Copper Acetate ◽  
New Materials ◽  
Heat Treated ◽  
Direct Infiltration

New materials were made by infiltration of sol-gel boehmite thin films with copper acetate. The structure and phase transformation of these materials during heat treatment were studied. It was found that infiltration in the boehmite state did not end up in the same material as direct infiltration in the θ-alumina derived from boehmite, even after both types of materials were heat-treated at 900 °C. Infiltration in boehmite makes it possible to synthesize sandwich structures comprised of alternate layers of CuO and of γ-alumina.

scholarly journals In situ deformation of nanocrystalline Al2O3 thin films at room temperature

2016 ◽  
pp. 195-196
Author(s):  
Erkka Frankberg ◽  
Lucile Joly-Pottuz ◽  
Francisco Garcia ◽  
Turkka Salminen ◽  
Thierry Douillard ◽  
...  
Keyword(s):  
Thin Films ◽  
Room Temperature ◽  
In Situ Deformation

Effect of heat treatment and heat treatment in combination with lignosulfonate on in situ rumen degradability of canola cake crude protein, lysine, and methionine

2020 ◽  
Vol 100 (1) ◽  
pp. 165-174 ◽  
Author(s):  
Piotr Micek ◽  
Katarzyna Słota ◽  
Paweł Górka
Keyword(s):  
Heat Treatment ◽  
High Temperature ◽  
Crude Protein ◽  
Dry Matter ◽  
Increased Temperature ◽  
Heat Treated ◽  
Cold Pressed ◽  
Temperature Heating ◽  
High Temperature Heating

The aim of this study was to determine the effect of heat treatment alone or in combination with the addition of lignosulfonate (LSO3) on canola cake protein, lysine, and methionine degradation in the rumen. Cold-pressed canola cake was left untreated, heated at 90, 110, 130, or 150 °C, or processed with 5% of LSO3 (in dry matter) and then heated. Effective rumen degradability of crude protein (CP), lysine, and methionine was less for treated than untreated canola cake (P < 0.05) and decreased with increased temperature of heating, but particularly when canola cake was heated at 150 °C (quadratic, P < 0.01). In general, effective rumen degradability of CP, lysine, and methionine was less for canola cake heated at 130 °C in combination with LSO3 compared with canola cake heat treated only (quadratic × LSO3 interaction, P ≤ 0.07). Results of this study indicate that high temperature heating (130 °C or greater for 60 min) may be necessary to protect canola cake protein from degradation in the rumen, and the combination of heat treatment and LSO3 may be more effective in protecting canola cake protein, lysine, and methionine from degradation in the rumen than the use of heat treatment only.

Effect of adding lignosulfonate and heat to canola screenings on ruminal and intestinal disappearance of dry matter and crude protein

2000 ◽  
Vol 80 (1) ◽  
pp. 215-219 ◽  
Author(s):  
Marina A. G. von Keyserlingk ◽  
E. Weurding ◽  
Mary Lou Swift ◽  
C. F. Wright ◽  
J. A. Shelford ◽  
...  
Keyword(s):  
Heat Treatment ◽  
Gastrointestinal Tract ◽  
Key Words ◽  
Crude Protein ◽  
Dry Matter ◽  
Holstein Cows ◽  
Lower Gastrointestinal Tract ◽  
Rumen Degradation ◽  
Heat Treated

The effect of adding 5% calcium lignosulfonate (LSO3) and heat to canola screenings on in situ ruminal and intestinal dry matter (DM) and crude protein (CP) disappearance in Holstein cows was investigated. Treatments consisted of untreated canola screenings, canola screenings that had been heated to 100 °C for 30 or 60 min and canola screenings that had 5% (wt wt−1) LSO3 added and were subsequently heated at 100 °C for 0, 30 or 60 min. Results indicate that treatment of canola screenings with 5% LSO3 and heated to 100 °C for 60 min was effective in reducing rumen degradation of DM and CP with a corresponding increase in disappearance in the lower gastrointestinal tract when compared to untreated and heat-treated canola screenings. Key words: Canola screenings, rumen by-pass protein, heat treatment, lignosulfonate

Chemistry, microstructure, and electrical properties at interfaces between thin films of titanium and alpha (6H) silicon carbide (0001)

1995 ◽  
Vol 10 (3) ◽  
pp. 668-679 ◽  
Author(s):  
L.M. Porter ◽  
R.F. Davis ◽  
J.S. Bow ◽  
M.J. Kim ◽  
R.W. Carpenter ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Photoelectron Spectroscopy ◽  
Room Temperature ◽  
Electron Beam Evaporation ◽  
Epitaxial Thin Films ◽  
Interfacial Chemistry ◽  
Barrier Heights ◽  
High Resolution Tem ◽  
Reaction Zones

Epitaxial thin films (4–1000 Å) of Ti contacts have been deposited via UHV electron beam evaporation at room temperature on monocrystalline, n-type, alpha (6H)-SiC(0001). The interfacial chemistry and microstructure, and the electrical properties, were investigated at room temperature and after annealing at 700 °C up to 60 min. High resolution TEM analyses revealed the formation during annealing of reaction zones consisting of Ti5Si3 and TiC. The corresponding electrical properties exhibited considerable stability except after an initial 20 min anneal. Current-voltage (I-V) measurements showed that the Ti contacts were rectifying with low ideality factors (n < 1.09) and typical leakage currents of 5 × 10−7 A/cm2 at −10 V. The Schottky barrier heights calculated from x-ray photoelectron spectroscopy and I-V and V-V measurements were between 0.79 and 0.88 eV for the as-deposited contacts and between 0.86 and 1.04 eV for the annealed contacts.

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