Bonding and Release of Hydrogen in a-Si:C:H Alloys
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AbstractHydrogen evolution and infrared absorption studies of a-Si:C:H films prepared from mixtures of hydrocarbon (CH4' C2H6' C2H4) and silane gases (SiH4 'Si2H6)by the glow-discharge process show that both the absolute hydrogen content and the hydrogen bonding is uniquely determined by the carbon content. Up to a carbon concentration of ∼45 % the widening of the optical gap is mainly due to an increase of the hydrogen content. For a hydrogen density NH > 1- 2x1022cm-3 the incorporated hydrogen atoms lead to the formation of voids, resulting in thermal instability of the bonded hydrogen and in a deterioration of the electronic quality of the amorphous material.
2016 ◽
Vol 846
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pp. 528-533
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1977 ◽
Vol 32
(11)
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pp. 1358-1359
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1938 ◽
Vol 60
(10)
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pp. 2528-2531
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1998 ◽
Vol 02
(03)
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pp. 273-284
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2015 ◽
Vol 79
(2)
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pp. 321-335
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