Structural and Chemical Characterization of Tungsten Gate Stack for 1 Gb Dram

2000 ◽  
Vol 611 ◽  
Author(s):  
O. Gluschenkov ◽  
J. Benedict ◽  
L.A. Clevenger ◽  
P. DeHaven ◽  
C. Dziobkowski ◽  
...  

ABSTRACTMaterial interaction during integration of tungsten gate stack for 1 Gb DRAM was investigated by Transition Electron Microscopy (TEM), X-ray Diffraction analysis (XRD) and Auger Electron Spectroscopy (AES). During selective side-wall oxidation tungsten gate conductor undergoes a structural transformation. The transformation results in the reduction of tungsten crystal lattice spacing, re-crystallization of tungsten and/or growth of grains. During a highly selective oxidation process, a relatively small but noticeable amount of oxygen was incorporated into the tungsten layer. The incorporation of oxygen is attributed to the formation of a stable WO x (x<2) composite.

Materials ◽  
2021 ◽  
Vol 14 (9) ◽  
pp. 2160
Author(s):  
Alexander Bogdanov ◽  
Ekaterina Kaneva ◽  
Roman Shendrik

Elpidite belongs to a special group of microporous zirconosilicates, which are of great interest due to their capability to uptake various molecules and ions, e.g., some radioactive species, in their structural voids. The results of a combined electron probe microanalysis and single-crystal X-ray diffraction study of the crystals of elpidite from Burpala (Russia) and Khan-Bogdo (Mongolia) deposits are reported. Some differences in the chemical compositions are observed and substitution at several structural positions within the structure of the compounds are noted. Based on the obtained results, a detailed crystal–chemical characterization of the elpidites under study was carried out. Three different structure models of elpidite were simulated: Na2ZrSi6O15·3H2O (related to the structure of Russian elpidite), partly Ca-replaced Na1.5Ca0.25ZrSi6O15·2.75H2O (close to elpidite from Mongolia), and a hypothetical CaZrSi6O15·2H2O. The vibration spectra of the models were obtained and compared with the experimental one, taken from the literature. The strong influence of water molecule vibrations on the shape of IR spectra of studied structural models of elpidite is discussed in the paper.


2014 ◽  
Vol 805 ◽  
pp. 343-349
Author(s):  
Carine F. Machado ◽  
Weber G. Moravia

This work evaluated the influence of additions of the ceramic shell residue (CSR), from the industries of Lost Wax Casting, in the modulus of elasticity and porosity of concrete. The CSR was ground and underwent a physical, chemical, and microstructural characterization. It was also analyzed, the environmental risk of the residue. In the physical characterization of the residue were analyzed, the surface area, and particle size distribution. In chemical characterization, the material powder was subjected to testing of X-ray fluorescence (XRF). Microstructural characterization was performed by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The residue was utilized like addition by substitution of cement in concrete in the percentages of 10% and 15% by weight of Portland cement. It was evaluated properties of concrete in the fresh and hardened state, such as compressive strength, modulus of elasticity, absorption of water by total immersion and by capillarity. The results showed that the residue can be used in cement matrix and improve some properties of concrete. Thus, the CSR may contribute to improved sustainability and benefit the construction industry.


Clay Minerals ◽  
2018 ◽  
Vol 53 (3) ◽  
pp. 459-470
Author(s):  
Mouhssin El Halim ◽  
Lahcen Daoudi ◽  
Meriam El Ouahabi ◽  
Valérie Rousseau ◽  
Catherine Cools ◽  
...  

ABSTRACTTextural, mineralogical and chemical characterization of archaeological ceramics (zellige) from El Badi Palace (Marrakech, Morocco), the main Islamic monument from the Saadian period (sixteenth century), has been performed to enhance restoration and to determine the technology of manufacturing. A multi-analytical approach based on optical and scanning electron microscopy, cathodoluminescence, X-ray fluorescence and X-ray diffraction was used. Re-firing tests on ceramic supports were also performed to determine the firing temperatures used by the Saadian artisans. A calcareous clay raw material was used to manufacture these decorative ceramics. The sherds were fired at a maximum temperature of 800°C in oxidizing atmosphere. The low firing temperature for ‘zellige’ facilitates cutting of the pieces, but also causes fragility in these materials due to the absence of vitreous phases.


2010 ◽  
Vol 667-669 ◽  
pp. 737-741
Author(s):  
Jian Hua Jiang ◽  
Yi Ding ◽  
Ai Dang Shan

The effects of asymmetric and symmetric rolling at room temperature on mechanical properties and microstructure of the commercial purity Ti were investigated by means of mechanical test, optical microscopy, X-ray diffraction and transition electron microscopy. The results show that through asymmetric and symmetric rolling processes the ultimate tensile strength is substantially increased from 450 MPa to 960 MPa. Microstructure observation illustrates this variation in mechanical property is caused by the grain refinement and work hardening.


Mining Revue ◽  
2021 ◽  
Vol 27 (4) ◽  
pp. 78-82
Author(s):  
Nurudeen Salahudeen ◽  
Aminat Oluwafisayo Abodunrin

Abstract Local clay mineral was mined from Okpella Town, Etsako Local Government Area of Edo State, Nigeria. Mineralogical characterization of the clay was carried out using X-ray diffraction analyzer. Chemical characterization of the clay was carried out using X-ray fluorescence analyzer and the pH analysis of the clay was carried out using pH meter. The mineralogical analysis revealed that the clay was majorly a dolomite mineral having 72% dolomite. The impurities present are 18% cristobalite, 4.1% garnet, 5% calcite and 1% quicklime. The pH analysis of the clay revealed that the clay was acidic having average pH value of 3.9. The pH determined for the 1:1, 1:2, 1:4, 1:8 and 1:10 samples were 3.61, 3.85, 3.85, 4.05 and 4.09, respectively.


2012 ◽  
Vol 05 ◽  
pp. 188-195
Author(s):  
M. Golmohammad ◽  
A. Nemati ◽  
M. A. Faghihi Sani

Ba 0.7 Sr 0.3 TiO 3 was prepared via simple sol-gel method by using titanium tetrabutoxide, barium and strontium carbonates, citric acid and ethylene glycol as starting materials. Simultaneous Thermal Analysis (STA) was used to examine thermal behavior of xerogel. The crystallite size of BST was about 21nm calculated by X-Ray diffraction (XRD) and confirmed by transition electron microscopy (TEM). Using these nanocrystalline powders, BST pellets were prepared and sintered in various temperatures. The grain size effect on electrical properties was studied and found that as the grain size decreased, the dielectric constant decreased too.


Clay Minerals ◽  
2019 ◽  
Vol 54 (3) ◽  
pp. 283-291
Author(s):  
Victor Matheus Joaquim Salgado Campos ◽  
Luiz Carlos Bertolino ◽  
Luana Caroline Silveira Nascimento ◽  
José Yvan Pereira Leite ◽  
Vitor Schwenk Brandão ◽  
...  

AbstractThis research presents the mineralogical and chemical characterization and beneficiation study of two kaolin deposits from the Borborema Pegmatite Province, Brazil. Seven samples were collected and treated in two different beneficiation routes involving magnetic separation and chemical bleaching. The fractions obtained were studied by X-ray diffraction, X-ray fluorescence spectrometry, scanning electron microscopy, particle-size analyses, electron paramagnetic resonance and determination of optical properties. The samples are composed mainly of subhedral kaolinite in the form of booklets, as well as muscovite, quartz, microcline and illite impurities. The kaolinite structural formulae indicated significant replacement of Si4+ by Al3+ in tetrahedral sites and low replacement of Fe3+ by Al3+ in the octahedral sites. The first 30 min of chemical bleaching improved significantly the optical properties of kaolin, indicating that the process is more efficient than magnetic separation.


2013 ◽  
Vol 755 ◽  
pp. 163-169
Author(s):  
D.L. Sánchez Juárez ◽  
G. Martínez Montes ◽  
E. Rubio Rosas

In this work orange pollen grains (Helianthus annuus) were immersed in a supersaturated ionic solution (similar to human extracellular fluid) during different times at 37 °C, atmospheric pressure and pH of 7.4. By Fourier transform infrared spectroscopy (FT-IR) we confirmed the presence of the functional groups carbonyl, amide I, amide II, carboxyl and phosphate in both samples. Nevertheless, yellow pollen owns a greater amount of phosphate groups than orange pollen. By scanning electron microscopy (SEM), differences in the morphology, shape and size of both samples were not observed. In orange pollen grains, amorphous agglomerates can be observed for periods smaller to 14 days and spherical structures formed by nanocrystals of laminar form were observed on their surface at 17 days. By energy dispersive spectroscopy (EDS) confirms the presence of calcium and phosphorous in the agglomerates with different Ca/P ratio and by X-ray diffraction (XRD) the hydroxyapatite (HAp) phase was verified.


2016 ◽  
Vol 1813 ◽  
Author(s):  
M. Rendón Belmonte ◽  
A. Palomo Sánchez ◽  
A. Fernández Jiménez ◽  
A. Torres Acosta ◽  
M. Martínez Madrid ◽  
...  

ABSTRACTThis paper focus on evaluating the ability to use Mexican fly ash (FA) and copper slag (CS) to produce alkali cements (0% OPC) or hybrid cements (20% OPC + 80% fly ash). The alkali activators used were two: 8 M NaOH solution for alkali cements and NaCl with sodium silicate for hybrid cement (HYC). Results of mechanical testing and characterization of the reaction products formed after 2 and 28 days are presented and discussed. Mechanical strength in some cases exceeded 20 MPa, at 2 days curing. The chemical characterization techniques used were X-Ray Diffraction (XRD) and scanning electron microscopy (SEM).


1997 ◽  
Vol 495 ◽  
Author(s):  
Kirsty A. Fleeting ◽  
Tony C. Jones ◽  
Tim Leedham ◽  
M. Azad Malik ◽  
Paul O'brien ◽  
...  

ABSTRACTMOCVD is a useful method for the deposition of thin films of lead zirconium titanate, PZT, because of its good step coverage and control of composition. Results are herein presented on a number of novel compounds which are potential MOCVD precursors. The compounds studied include Pb(tmhd)2, Zr(OBu')4 and Ti(OPr')4. Another commonly utilized precursor Zr(tmhd)4, is not ideal, in that it is a high melting point solid, and hence requires high substrate temperatures. We have sought to modify Zr precursors through chemical methods and have synthesized a number of novel, more volatile, and less intrinsically thermally stable MOCVD precursors. Full chemical characterization of the Zr precursors (NMR, IR, MS, CHN, TGA/DSC, Single Crystal X-ray diffraction) has been undertaken. We also present structural results on some related lead precursors.


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