A New Assembling Method for Nano-sized Particles Using an Electrified Pattern Drawn by a Focused Ion Beam

2000 ◽  
Vol 636 ◽  
Author(s):  
Hiroshi Fudouzi ◽  
Mikihiko Kobayashi ◽  
Norio Shinya
Keyword(s):  
Particle Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Colloidal Suspension ◽  
Self Assembled Monolayer ◽  
Nano Structures ◽  
Aerosol Process ◽  
Suspension Process ◽  
Potential Applications ◽  
A New Technique

AbstractThis paper describes a new technique to fabricate two-dimensional microstructures assembled with nano-sized particles. The nano-sized particles attract a lot of attention because of their unique properties compared to bulk materials. Micro- and nano- structures assembled with nano-sized particles have potential applications in electronic, optical and biochemical fields. The Self-Assembled Monolayer (SAM) film patterning is one of the methods to assemble the nano-sized particles. We have proposed a new method to assemble nano-sized particles on a substrate using an electric field generated by an electrified pattern. In this study, following our methods titanium oxide (TiO2, diam.=21nm) particles were patterned on an n-type (100) silicon substrate having an oxidized layer. The particle deposition on the substrates was carried out using a colloidal suspension process and an aerosol process.

In-Situ Characterization of Nano-Structures Fabricated by Focused Ion Beam (FIB) and Nano Particle Deposition System (NPDS)

2014 ◽  
Author(s):  
Hyun-Taek Lee ◽  
Chung-Soo Kim ◽  
Hae-Sung Yoon ◽  
Ki-Hwan Jang ◽  
Jung-Oh Choi ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Mechanical Property ◽  
Particle Deposition ◽  
Focused Ion Beam ◽  
Bulk Material ◽  
Ion Beam ◽  
Test Method ◽  
Nano Particle ◽  
Nano Structures

Nano particle deposition system (NPDS) had been developed for the creation of micro/nano structures with multimaterials in order to develop the micro/nano devices on the basis of specific localized surface on the multilayer. However, micro structures fabricated by NPDS show different mechanical properties when it compared to bulk material because of its porous and uneven deposition structure. To achieve reasonable mechanical properties of the structure fabricated by nanoscale 3D printing system, it requires in-situ mechanical property test method. Herein, a new approach for in-situ nanomechanical characterization system using microforce sensor and nanomanipulator installed in focused ion beam system. In this research, experimental setup for mechanical characterization was developed and mechanical property test was done in Focused Ion Beam (FIB) system. The specimen was fabricated by FIB milling process, then manipulation and compression processes are operated by this characterization system with real time imaging. The test was done for silver microstructures fabricated by NPDS and results show weaker hardness and smaller young’s modulus than bulk material.

A method to improve the quality of 2.5 dimensional micro-and nano-structures produced by focused ion beam machining

Micron ◽  
2017 ◽  
Vol 101 ◽  
pp. 8-15 ◽  
Author(s):  
Daniele De Felicis ◽  
Muhammad Zeeshan Mughal ◽  
Edoardo Bemporad
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Nano Structures

Assessment of Deformation using the Focused Ion Beam Technique

2000 ◽  
Vol 6 (S2) ◽  
pp. 530-531
Author(s):  
M.G. Burke ◽  
P.T. Duda ◽  
G. Botton ◽  
M. W. Phaneuf
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Site Specificity ◽  
Alloy 600 ◽  
The Past ◽  
Transmission Electron ◽  
Wide Range ◽  
Potential Applications ◽  
Beam Technique ◽  
Significant Attention

Focused Ion Beam (FIB) micromachining techniques have gained significant attention over the past few years as a promising method for the preparation of a variety of metallic and nonmetallic materials for subsequent characterization using transmission electron microscopy (TEM) The advantage of the FIB in terms of site specificity and speed for the preparation of uniform electron transparent sections has opened a wide range of potential applications in materials characterization. The ability to image the sample in the FIB can also provide important microstructural data for materials analysis. In this study, both conventionally electropolished and FIB-ed specimens were prepared in order to characterize the microstructure of a commercially-produced tube of Alloy 600 (approximately Ni-15 Cr-10 Fe- 0.05 C). The electropolished samples were prepared using a solution of 20% HClO4 - 80% CH3OH at ∼-40°C. The FIB sections were obtained from a cross-section of the tube that had been mechanically thinned to ∼100 μm. The section was thinned in a Micrion 2500 FIB system with a Ga ion beam at 50 kV accelerating voltage.

scholarly journals FIB-SEM Three-Dimensional Tomography for Characterization of Carbon-Based Materials

2019 ◽  
Vol 2019 ◽  
pp. 1-8 ◽  
Author(s):  
Nan Nan ◽  
Jingxin Wang
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
3D Tomography ◽  
Tomography System ◽  
Internal Structures ◽  
Potential Applications ◽  
Scanning Electron ◽  
Carbon Based

A review on the recent advances of the three-dimensional (3D) characterization of carbon-based materials was conducted by focused ion beam-scanning electron microscope (FIB-SEM) tomography. Current studies and further potential applications of the FIB-SEM 3D tomography technique for carbon-based materials were discussed. The goal of this paper is to highlight the advances of FIB-SEM 3D reconstruction to reveal the high and accurate resolution of internal structures of carbon-based materials and provide suggestions for the adoption and improvement of the FIB-SEM tomography system for a broad carbon-based research to achieve the best examination performances and enhance the development of innovative carbon-based materials.

scholarly journals The Fabrication of Micro/Nano Structures by Laser Machining

Nanomaterials ◽  
2019 ◽  
Vol 9 (12) ◽  
pp. 1789 ◽  
Author(s):  
Liangliang Yang ◽  
Jiangtao Wei ◽  
Zhe Ma ◽  
Peishuai Song ◽  
Jing Ma ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Piezoelectric Materials ◽  
Ion Beam ◽  
New Technology ◽  
Laser Machining ◽  
Step Method ◽  
Surface Plasma Resonance ◽  
Nano Structure ◽  
Nano Structures ◽  
Wide Range

Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers’ findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.

A Direct and Quantitative Three-Dimensional Reconstruction of the Internal Structure of Disordered Mesoporous Carbon with Tailored Pore Size

2013 ◽  
Vol 19 (3) ◽  
pp. 745-750 ◽  
Author(s):  
Juan Balach ◽  
Flavio Soldera ◽  
Diego F. Acevedo ◽  
Frank Mücklich ◽  
César A. Barbero
Keyword(s):  
Pore Size ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Quantitative Characterization ◽  
Resorcinol Formaldehyde ◽  
Dual Beam ◽  
Dimensional Reconstruction ◽  
A New Technique

AbstractA new technique that allows direct three-dimensional (3D) investigations of mesopores in carbon materials and quantitative characterization of their physical properties is reported. Focused ion beam nanotomography (FIB-nt) is performed by a serial sectioning procedure with a dual beam FIB-scanning electron microscopy instrument. Mesoporous carbons (MPCs) with tailored mesopore size are produced by carbonization of resorcinol-formaldehyde gels in the presence of a cationic surfactant as a pore stabilizer. A visual 3D morphology representation of disordered porous carbon is shown. Pore size distribution of MPCs is determined by the FIB-nt technique and nitrogen sorption isotherm methods to compare both results. The obtained MPCs exhibit pore sizes of 4.7, 7.2, and 18.3 nm, and a specific surface area of ca. 560 m2/g.

Focused Ion Beam Nano-Machined Structures For Strain Analysis By A Moiré Technique

2002 ◽  
Vol 761 ◽  
Author(s):  
Biao Li ◽  
Huimin Xie ◽  
Xin Zhang
Keyword(s):  
Focused Ion Beam ◽  
Microelectromechanical Systems ◽  
Ion Beam ◽  
Accurate Determination ◽  
Strain Analysis ◽  
Local Strain ◽  
Ion Milling ◽  
Nano Fabrication ◽  
In Situ Deposition ◽  
Potential Applications

ABSTRACTThe accurate determination of residual stress/strain in thin films is especially important in the emerging field of MicroElectroMechanical Systems (MEMS). In this article, a focused ion beam (FIB) moiré method is proposed and demonstrated to measure the strain in MEMS structures. This technique is based on the advantages of the FIB system in nano-fabrication, imaging, in-situ deposition, and fine adjustment. Nano-grating lines with 70 nm width and 140 nm spacing are directly written on the top of the MEMS structures by ion milling without the requirement of an etch mask. The FIB moiré pattern is formed by the interference between a prepared specimen grating and FIB raster scan lines. The strain of the MEMS structures is derived by calculating the average spacing of moiré fringes. Since the local strain of a MEMS structure itself can be monitored during the process, the FIB moiré technique has many potential applications in the mechanical metrology of MEMS. As an example, the strain distribution along the sticking MEMS structures, and the contribution of surface oxidization and mass loading to the cantilever strain is determined by this FIB moiré technique.

A New Technique For Visualizing The Displacement Field Of Indentations: The Case Of A Soft Film On A Hard Substrate

1997 ◽  
Vol 505 ◽  
Author(s):  
Joost J. Vlassak ◽  
T. Y. Tsui ◽  
W. D. Nix
Keyword(s):  
Titanium Nitride ◽  
Displacement Field ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Grain Structure ◽  
New Technique ◽  
Hard Substrate ◽  
Film Material ◽  
Pile Up ◽  
A New Technique

ABSTRACTWe have developed a new technique for visualizing displacement fields of indentations in thin films. In this technique, the indented film consists of alternating layers of two different materials. One of the materials serves as a marker for visualizing the plastic flow induced by the indentation. Focused Ion Beam (FIB) milling is used to cross-section the indentation, revealing the deformed layers. This technique can be used to study how the presence of the substrate affects the plastic displacement field around the indentation. The technique is applied to a multilayered film of aluminum and titanium nitride on a silicon substrate. The titanium nitride layers are much thinner than the aluminum layers and serve the function of marker. Pile-up of the film material around the indenter and the effect of the hard substrate are easily revealed and a mechanism for pile-up is suggested. The technique also shows that the grain structure in the deformed zone around the indentation is altered profoundly.

In-Situ Frequency Tuning of Electrostatically Actuated Vibrating Nano Structures Using Focused Ion Beam

2006 ◽  
Author(s):  
Jiyoung Chang ◽  
Jongbaeg Kim ◽  
Byung-Kwon Min ◽  
Sang Jo Lee ◽  
Liwei Lin
Keyword(s):  
Resonant Frequency ◽  
Focused Ion Beam ◽  
Frequency Tuning ◽  
Electrostatic Force ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Fem Analysis ◽  
Experimental Result ◽  
Nano Structures

Schemes for in-situ resonant frequency tuning of nano scale vibrating structures using Focused Ion Beam (FIB) sputtering and FIB-Chemical Vapor Deposition (CVD) are presented. This approach introduces precisely controlled permanent increase or decrease of resonant frequencies on processed nano structures, enabling the frequency adjustment when the desired resonant frequency is higher or lower than the actual frequency of the fabricated resonators. The vibration is induced by electrostatic force between resonator and stator using 0~10V AC input and all the processes including fabrication of nanostructure, electrostatic actuation, vibration observation and frequency tuning in either higher or lower direction were successfully conducted in single FIB chamber. The range of the frequency tuned from 600kHz initial resonant frequency is +6kHz with -1.9μm and -65kHz with +1.1μm length change of the nano-resonator respectively. Structural FEM analysis result is compared with the experimental result.

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