Lattice constant variation in GaN:Si layers grown by HVPE
Keyword(s):
X Ray
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ABSTRACTThe structural, optical, and electrical properties of HVPE-grown GaN-on-sapphire templates were studied. The c and a lattice constants of the GaN layers were measured by x-ray diffraction. It was observed that the c and a lattice constants vary non-monotonically with Si-doping. The proper selection of Si-doping level and growth conditions resulted in controllable strain relaxation, and thus, influenced defect formation in GaN-on-sapphire templates. It was also observed that HVPE homoepitaxial GaN layers grown on the templates have better crystal quality and surface morphology than the initial templates.
2007 ◽
Vol 22
(4)
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pp. 838-844
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2011 ◽
Vol 415-417
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pp. 1979-1982
1998 ◽
Vol 264-268
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pp. 437-440
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2007 ◽
Vol 561-565
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pp. 2163-2166
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