scholarly journals Structural and optical properties of GaN laterally overgrown on Si(111) by metalorganic chemical vapor deposition using an AlN buffer layer

1999 ◽  
Vol 4 (1) ◽  
Author(s):  
H. Marchand ◽  
N. Zhang ◽  
L. Zhao ◽  
Y. Golan ◽  
S.J. Rosner ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Buffer Layer ◽  
Chemical Vapor ◽  
Silicon Substrates ◽  
Seed Region ◽  
Threading Dislocations ◽  
Transmission Electron ◽  
Aln Buffer ◽  
Image Position ◽  
Cathodoluminescence Imaging

Lateral epitaxial overgrowth (LEO) on Si(111) substrates using an AlN buffer layer is demonstrated and characterized using scanning electron microscopy, atomic force microscopy, transmission electron microscopy, x-ray diffraction, photoluminescence spectroscopy, and cathodoluminescence imaging. The <100>-oriented LEO GaN stripes grown on silicon substrates are shown to have similar structural properties as LEO GaN grown on GaN/Al2O3 substrates: the surface topography is characterized by continuous crystallographic steps rather than by steps terminated by screw-component threading dislocations; the density of threading dislocations is <106 cm−2; the LEO regions exhibit crystallographic tilt (0.7-4.7°) relative to the seed region. The AlN buffer thickness affects the stripe morphology and, in turn, the microstructure of the LEO GaN. The issues of chemical compability and thermal expansion mismatch are discussed.

scholarly journals Growth and Mechanism of MoS2Nanoflowers with Ultrathin Nanosheets

2017 ◽  
Vol 2017 ◽  
pp. 1-6 ◽  
Author(s):  
Yifei Guo ◽  
Xiuli Fu ◽  
Zhijian Peng
Keyword(s):  
Electron Microscopy ◽  
Vapor Deposition ◽  
Optoelectronic Devices ◽  
Chemical Vapor ◽  
Silicon Substrates ◽  
Optical And Electrical Properties ◽  
Two Dimensional ◽  
Ultrathin Nanosheets ◽  
Transmission Electron ◽  
Composition And Structure

Two-dimensional molybdenum disulfide (MoS2) with few layers, due to their excellent optical and electrical properties, has great potential for applications in electronic and optoelectronic devices. In this work, flower-like MoS2nanostructures with ultrathin nanosheets (petals) were successfully deposited onto silicon substrates by a facile process based on chemical vapor deposition via using MoO3and S powders as starting materials. Their composition and structure were explored by field emission scanning electron microscopy, transmission electron microscopy, Raman spectroscopy, and photoluminescence. The reported nanoflowers vertically and separately stood on the substrates, consisting of several bonded MoS2nanosheets with a thickness of 10–30 nm and high crystallinity. On the basis of these results, a growth mechanism for the MoS2nanoflowers was proposed.

Microstructures of GaN Films Grown on a LiGaO2 New Substrate by Metalorganic Chemical Vapor Deposition

1997 ◽  
Vol 468 ◽  
Author(s):  
Jing-Hong Li ◽  
Olga M. Kryliouk ◽  
Paul H. Holloway ◽  
Timothy J. Anderson ◽  
Kevin S. Jones
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Lattice Mismatch ◽  
Chemical Vapor ◽  
Threading Dislocations ◽  
Transmission Electron ◽  
Metalorganic Chemical

ABSTRACTMicrostructures of GaN films grown on the LiGaO2 by metalorganic chemical vapor deposition (MOCVD) have been characterized by transmission electron microscopy (TEM) and high resolution transmission electron microscopy (HRTEM). TEM and HRTEM results show that high quality single-crystal wurtzite GaN films have been deposited on the LiGaO2 and that the GaN film and the LiGaO2 have the following orientation relationship: (2110)(0002)GaN ̂ (002)LiGaO2 ^ 5–8°. A higher density of threading dislocations and stacking faults have been observed near the GáN/LiGaO2 interface, even though the lattice mismatch of GaN to LiGaO2 is only ∼1%. Threading dislocations with burgers vector b=<0001> and b=a/3<1120> are predominant in the GaN films. Also the GaN films contain some columnar inversion domain boundaries (IDBs). Both TEM and HRTEM results reveal that there is an unexpected amorphous or nano-crystalline inter-layer between the GaN and the LiGaO2 with a thickness of 50–100 nm.

Aligned Carbon Nanotubes Via Microwave Plasma Enhanced Chemical Vapor Deposition

1999 ◽  
Vol 593 ◽  
Author(s):  
H. Cui ◽  
D. Palmer ◽  
O. Zhou ◽  
B. R. Stoner
Keyword(s):  
Electron Microscopy ◽  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Silicon Substrates ◽  
Multi Wall Carbon Nanotubes ◽  
Field Emission Properties ◽  
Transmission Electron

ABSTRACTAligned multi-wall carbon nanotubes have been grown on silicon substrates by microwave plasma enhanced chemical vapor deposition using methane/ammonia mixtures. The concentration ratio of methane/ammonia in addition to substrate temperature was varied. The morphology, structure and alignment of carbon nanotubes were studied by scanning electron microscopy and transmission electron microscopy. Both concentric hollow and bamboo-type multi-wall carbon nanotubes were observed. Growth rate, size distribution, alignment, morphology, and structure of carbon nanotubes changed with methane/ammonia ratio and growth temperature. Preliminary results on field emission properties are also presented.

scholarly journals Structural Property Study for GeSn Thin Films

Materials ◽  
2020 ◽  
Vol 13 (16) ◽  
pp. 3645
Author(s):  
Liyao Zhang ◽  
Yuxin Song ◽  
Nils von den Driesch ◽  
Zhenpu Zhang ◽  
Dan Buca ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Transmission Electron Microscopy ◽  
Molecular Beam ◽  
Chemical Vapor ◽  
Threading Dislocations ◽  
X Ray Diffraction ◽  
Cross Sectional ◽  
X Ray ◽  
Transmission Electron

The structural properties of GeSn thin films with different Sn concentrations and thicknesses grown on Ge (001) by molecular beam epitaxy (MBE) and on Ge-buffered Si (001) wafers by chemical vapor deposition (CVD) were analyzed through high resolution X-ray diffraction and cross-sectional transmission electron microscopy. Two-dimensional reciprocal space maps around the asymmetric (224) reflection were collected by X-ray diffraction for both the whole structures and the GeSn epilayers. The broadenings of the features of the GeSn epilayers with different relaxations in the ω direction, along the ω-2θ direction and parallel to the surface were investigated. The dislocations were identified by transmission electron microscopy. Threading dislocations were found in MBE grown GeSn layers, but not in the CVD grown ones. The point defects and dislocations were two possible reasons for the poor optical properties in the GeSn alloys grown by MBE.

Annihilation of Threading Dislocations in Regrown GaN on Electrochemically Etched Nanoporous GaN Template with Optimization of Buffer Layer Growth

2007 ◽  
Vol 31 ◽  
pp. 227-229
Author(s):  
C.B. Soh ◽  
H. Hartono ◽  
S.Y. Chow ◽  
Soo Jin Chua
Keyword(s):  
Electron Microscopy ◽  
Buffer Layer ◽  
Electrochemical Etching ◽  
Layer Growth ◽  
Device Fabrication ◽  
Buffer Layers ◽  
Threading Dislocations ◽  
High Quality ◽  
Transmission Electron ◽  
Gan Buffer Layer

Nanoporous GaN template has been fabricated by electrochemical etching to give hexagonal pits with nano-scale pores of size 20-50 nm in the underlying grains. Electrochemical etching at The effect of GaN buffer layer grown at various temperatures from 650°C to 1015°C on these as-fabricated nano-pores templates are investigated by transmission electron microscopy. The buffer layer grown at the optimized temperature of 850°C partially fill up the pores and voids with annihilation of threading dislocations, serving as an excellent template for high-quality GaN growth. This phenomenon is, however not observed for the samples grown with other temperature buffer layers. The PL spectrum for the regrowth GaN on nanoporous GaN template also shows an enhancement of PL intensity for GaN peak compared to as-grown GaN template, which is indicative of its higher crystal quality. This makes it as a suitable template for subsequent device fabrication.

Role of Si1−xGex Buffer Layer in Determining Electrical Characteristics of Modulation-Doped p-Si0. 5Ge0.5/Ge/Si1−xGex Heterostructures

1990 ◽  
Vol 198 ◽  
Author(s):  
Eiichi Murakami ◽  
Hiroyuki Etoh ◽  
Akio Nishida ◽  
Kiyokazu Nakagawa ◽  
Masanobu Miyao
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Raman Spectroscopy ◽  
Buffer Layer ◽  
Hole Mobility ◽  
Threading Dislocations ◽  
Electrical Characteristics ◽  
Transmission Electron

ABSTRACTElectrical characteristics of modulation-doped p-Si0.5Ge0.5/Ge/Si1−x Gex heterostructures are examined in relation to Si fraction (1−X) and thickness (dB)of the buffer layer (Si1−xGex), using Raman spectroscopy and transmission electron microscopy. Strain-induced enhancement of hole mobility and concentration is observed in 1-X≦0.25. However, their decrease in 1-X≦0.25 and for small dB values is also observed, which is attributed to the increase in threading dislocations. As a result, a maximum hole mobility of 7600 cm2/Vs at 77 K is obtained at 1-X=0.25 and dB=1μm.

scholarly journals Comparison of Luminescence and Physical Morphologies of GaN Epilayers

1997 ◽  
Vol 2 ◽  
Author(s):  
Carol Trager-Cowan ◽  
P. G. Middleton ◽  
K. P. O'Donnell ◽  
S. Ruffenach-Clur ◽  
Olivier Briot
Keyword(s):  
Optical Properties ◽  
Buffer Layer ◽  
Layer Thickness ◽  
Cathodoluminescence Spectroscopy ◽  
Buffer Layer Thickness ◽  
Circular Island ◽  
Aln Buffer ◽  
Image Position ◽  
Cathodoluminescence Imaging ◽  
Excitonic Luminescence

In this paper we examine a series of four GaN epilayers grown by MOVPE on sapphire substrates with different AlN buffer layer thicknesses. We examine the effect of the buffer layer thickness on the physical and optical properties of the samples via optical microscopy, cathodoluminescence imaging and photoluminescence and cathodoluminescence spectroscopy. While the morphological and optical properties of all the films (excepting that with the thinnest buffer layer of 30 nm) are good, i.e., the films are smooth and the luminescence is dominated by excitonic luminescence, a number of circular island like features are observed in all the films whose density decrease with increasing buffer layer thickness. A large circular island present on the sample with the thinnest buffer layer and surrounded by cracks in the directions, displays some interesting acceptor related luminescence.

Growth and Characterization of Epitaxial GaN Thin Films on 4H-SiC (11.0) Substrates

2003 ◽  
Vol 798 ◽  
Author(s):  
Brian P. Wagner ◽  
E. A. Preble ◽  
Z. J. Reitmeier ◽  
R. F. Davis ◽  
D. N. Zakharov ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Buffer Layer ◽  
Oriented Growth ◽  
Transmission Electron Microscopy Analysis ◽  
Plan View ◽  
X Ray ◽  
Transmission Electron ◽  
Electron Microscopy Analysis ◽  
Aln Buffer

ABSTRACTGaN thin films were grown via metalorganic vapor phase epitaxy on a-plane 4H-SiC substrates on which had been deposited an AlN buffer layer. Atomic force microscopy images revealed that the microstructure of the AlN buffer layer and the subsequently deposited GaN had a highly oriented growth structure where parallel growth features propagated in the [1–1.0] direction. Scanning electron microscopy showed that the interfaces between the substrate, buffer layer, and epi-layer were continuous. Cracking was observed in GaN films having a thickness greater than 800 nm. Plan-view transmission electron microscopy analysis revealed stacking faults and threading dislocations with densities of ∼1.6×106cm-1 and ∼ 3.3×1010cm-1, respectively. X-ray diffraction confirmed that the GaN was deposited epitaxially in the same orientation as the substrate. The average on- and off-axis x-ray full-width half-maxima of the (11.0) and the (10.0) reflections were 948 arcsec and 5448 arcsec, respectively.

TEM characterization of Au/Polysilicon interactions

1990 ◽  
Vol 48 (4) ◽  
pp. 650-651
Author(s):  
N. David Theodore ◽  
Leslie H. Allen ◽  
C. Barry Carter ◽  
James W. Mayer
Keyword(s):  
Solid Phase ◽  
Single Crystal Silicon ◽  
Chemical Vapor ◽  
Electrical Contacts ◽  
Silicon Substrates ◽  
Crystal Silicon ◽  
Transmission Electron ◽  
Polysilicon Films ◽  
The Stability

Metal/polysilicon investigations contribute to an understanding of issues relevant to the stability of electrical contacts in semiconductor devices. These investigations also contribute to an understanding of Si lateral solid-phase epitactic growth. Metals such as Au, Al and Ag form eutectics with Si. reactions in these metal/polysilicon systems lead to the formation of large-grain silicon. Of these systems, the Al/polysilicon system has been most extensively studied. In this study, the behavior upon thermal annealing of Au/polysilicon bilayers is investigated using cross-section transmission electron microscopy (XTEM). The unique feature of this system is that silicon grain-growth occurs at particularly low temperatures ∽300°C).Gold/polysilicon bilayers were fabricated on thermally oxidized single-crystal silicon substrates. Lowpressure chemical vapor deposition (LPCVD) at 620°C was used to obtain 100 to 400 nm polysilicon films. The surface of the polysilicon was cleaned with a buffered hydrofluoric acid solution. Gold was then thermally evaporated onto the samples.

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