Исследование упругих свойств пленок SiC, синтезированных на подложках Si методом замещения атомов
Keyword(s):
The elastic properties of a nanoscale film of silicon carbide grown on a silicon substrate by atom substitution are studied. For the first time, the Young's modulus of nanoscale silicon carbide was measured by nanoindentation. Using optical profilometry and spectral ellipsometry, the structural characteristics of a silicon carbide film on silicon were studied, namely, the film roughness and its thickness were calculated.
Keyword(s):
2020 ◽
Vol 46
(15)
◽
pp. 36
Keyword(s):
Keyword(s):
2017 ◽
Vol 31
(02)
◽
pp. 1650263