scholarly journals Режимы роста пленок нитрида алюминия на гибридных подложках SiC/Si(111)

2022 ◽  
Vol 64 (1) ◽  
pp. 117
Author(s):  
А.А. Корякин ◽  
С.А. Кукушкин ◽  
А.В. Осипов ◽  
Ш.Ш. Шарофидинов
Keyword(s):  
Aluminum Nitride ◽  
Growth Mechanism ◽  
Layer Growth ◽  
Nucleation Mechanism ◽  
Hydride Vapor Phase Epitaxy ◽  
Nitride Film ◽  
Layer By Layer ◽  
Initial Growth ◽  
Island Growth ◽  
Hybrid Substrates

The nucleation mechanism of aluminum nitride films grown by the method of hydride vapor phase epitaxy on hybrid substrates 3C-SiC/Si(111) is theoretically analyzed. The temperature regions and vapor pressure regions of components are determined in which the island growth mechanism and the layer-by-layer growth mechanism are realized. The theoretical conclusions are compared with the experimental data. The morphology of aluminum nitride film on 3C-SiC/Si(111) at the initial growth stage is investigated by the method of scanning electron microscopy. The methods of controlling the change of the growth mechanism from the island growth to the layer-by-layer growth are proposed.

scholarly journals Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO

Crystals ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 291
Author(s):  
Alberto Perrotta ◽  
Julian Pilz ◽  
Roland Resel ◽  
Oliver Werzer ◽  
Anna Maria Coclite
Keyword(s):  
Atomic Layer ◽  
Layer Growth ◽  
Growth Mode ◽  
Ex Situ ◽  
Native Oxide ◽  
Layer By Layer ◽  
Initial Growth ◽  
Island Growth ◽  
X Ray ◽  
Crystallization Onset

Direct plasma enhanced-atomic layer deposition (PE-ALD) is adopted for the growth of ZnO on c-Si with native oxide at room temperature. The initial stages of growth both in terms of thickness evolution and crystallization onset are followed ex-situ by a combination of spectroscopic ellipsometry and X-ray based techniques (diffraction, reflectivity, and fluorescence). Differently from the growth mode usually reported for thermal ALD ZnO (i.e., substrate-inhibited island growth), the effect of plasma surface activation resulted in a substrate-enhanced island growth. A transient region of accelerated island formation was found within the first 2 nm of deposition, resulting in the growth of amorphous ZnO as witnessed with grazing incidence X-ray diffraction. After the islands coalesced and a continuous layer formed, the first crystallites were found to grow, starting the layer-by-layer growth mode. High-temperature ALD ZnO layers were also investigated in terms of crystallization onset, showing that layers are amorphous up to a thickness of 3 nm, irrespective of the deposition temperature and growth orientation.

Initial Growth and morphology of Ultrathin Magnetic Films Studied Using Scanning Tunneling Microscopy.

1993 ◽  
Vol 313 ◽  
Author(s):  
David D. Chambliss ◽  
K.E. Johnson ◽  
K. Kalki ◽  
S. Chiang ◽  
R.J. Wilson
Keyword(s):  
Magnetic Films ◽  
Layer Growth ◽  
Scanning Tunneling ◽  
Layer By Layer ◽  
Initial Growth ◽  
Island Growth ◽  
Tunneling Microscopy ◽  
High Coverage ◽  
Local Structures ◽  
Low Coverage

ABSTRACTThe room-temperature growth of Fe on Cu(100) has been studied using the scanning tunneling Microscope (STM) to determine low-coverage growth mode and local structures related to the FCC-BCC structural transformation. Results for submonolayer deposition demonstrate an initial interchange of deposited Fe atoms with substrate Cu. This leads to a highly rough Fe-Cu interface and growth characteristics that for different experimental techniques can resemble 3-D island growth or layer-by-layer growth. For a thickness ∼14 Monolayers, the FCC-BCC transition is observed to occur via the formation of fairly large martensitic grains, rather than by a change in atomic aggregation. The implications of the instability of FCC-Fe, as evident in both low- and high-coverage data, are considered.

Synthesis and Characterization of Zn Oxide Hexagonal Nano-Pole Films on Quartz Glass Substrate

2009 ◽  
Vol 7 (1) ◽  
Author(s):  
Jie Chen ◽  
Jun Wang
Keyword(s):  
Growth Mechanism ◽  
Quartz Glass ◽  
Photoelectron Spectroscopy ◽  
Glass Substrate ◽  
Sol Gel ◽  
Layer Growth ◽  
Layer By Layer ◽  
Quartz Glass Substrate ◽  
Wurtzite Phase ◽  
X Ray

Hexagon-shaped Zn oxide nano-pole films with terraces and steps have been successfully fabricated by means of a combined approach involving sol-gel process, high-temperature heat treatment, and the hydrothermal method. The surface chemistry and morphological features of the films were characterized by means of x-ray photoelectron spectroscopy and scanning electron microcopy. All the diffraction peaks in x-ray diffraction pattern match with those of the hexagonal wurtzite phase of Zn oxide. Transmittance measurements show that the optical transmittance of the sample synthesized at 520°C on quartz glass substrate is the highest, reaching about 65% in the visible-light region. Based on the detailed structural characterization and the nucleation-growth kinetics, we find that the whole crystallization process of wurtzite Zn oxide nano-poles includes nanocatalysis and layer-by-layer growth mechanism. The present study provides an important understanding of the growth mechanism for nano-pole synthesis of Zn oxide and related materials.

Layer-by-layer growth mechanism of AlxGa1-xP grown by gas-source MBE

1993 ◽  
Vol 127 (1-4) ◽  
pp. 213-216 ◽  
Author(s):  
Toshinari Fujimori ◽  
Satoru Nagao ◽  
Hideki Gotoh
Keyword(s):  
Growth Mechanism ◽  
Layer Growth ◽  
Layer By Layer ◽  
Gas Source ◽  
Gas Source Mbe

Growth Stress of Thin Ti-, Al- and TiAlx-Films Deposited Under UHV-conditions and its Dependence on Substrate Temperature

1999 ◽  
Vol 580 ◽  
Author(s):  
St. Lackner ◽  
R. Abermann
Keyword(s):  
Substrate Temperature ◽  
Room Temperature ◽  
Metal Films ◽  
Growth Stress ◽  
Layer Growth ◽  
Film Stress ◽  
Layer By Layer ◽  
Island Growth ◽  
Aluminum Films ◽  
Beam Technique

AbstractThe growth stress of metal films was measured continuously both during as well as after their deposition under UHV-conditions with a cantilever beam technique. The metal films were deposited onto 10 rim thick alumina substrate films prepared by reactive evaporation of Al in an oxygen atmosphere. The substrate temperature for the metal deposition was varied from -20°C to 500°C.The growth stress of both titanium and aluminum films deposited at room temperature and above is characteristic of island growth and the formation of a polycrystalline film. The film stress built up in these films decreases with increasing substrate temperature. Below RT the growth stress of titanium films indicates a transition from island growth to layer by layer growth due to a reduced adatom mobility. The temperature range in which this transition in the growth mode occurs is strongly affected by impurities in the Ti-evaporation source material and gas ambient.In the last part of this paper we present results of experiments in which the above metals were evaporated simultaneously from separate sources to form alloy films with TiAl3-stoichiometry. Sudden changes in the incremental film stress are tentatively attributed to segregation and phase formation phenomena.

Relationship Between Crystal Defects, Ge Outdiffusion and V/III Ratio in MOVPE Grown (001) GaAs/Ge

1993 ◽  
Vol 319 ◽  
Author(s):  
C. Frigeri ◽  
G. Atrolini ◽  
C. Pelosi ◽  
F. Longo
Keyword(s):  
Stacking Faults ◽  
Layer Growth ◽  
Crystal Defects ◽  
Misfit Dislocations ◽  
Layer By Layer ◽  
Island Growth ◽  
Planar Defects ◽  
Fault Density ◽  
Unintentional Doping ◽  
Enhanced Mobility

AbstractTwo regimes of defect generation have been found in MOVPE GaAs/Ge layers upon changing the V/III ratio between 1.3 and 11.8. For low V/III ratio the layers contained misfit dislocations along with stacking faults that had been generated by dissociation of the misfit dislocations. The stacking fault density increased with decreasing V/III ratio. This might be explained by an enhanced mobility of the dissociated partials due the reduced unintentional doping of the layer caused by reduced Ge outdiffusion from the substrate when V/III is small. The secon regime corresponds to high V/III ratios and is characterized by the absence of misfit dislocations and the presence of a high density of planar defects. This means that breakdown of the 2D layer-by-layer growth occurred and 3D island growth prevailed.

Surface Microstructures of Ferroelectric SrBi2Ta2O9, BaTiO3 and Metallic SrRuO3 Epitaxial Thin Films

1997 ◽  
Vol 493 ◽  
Author(s):  
Q. D. Jiang ◽  
Z. J. Huang ◽  
C. L. Chen ◽  
A. Brazdeikis ◽  
P. Jin ◽  
...  
Keyword(s):  
Thin Films ◽  
Scanning Probe Microscopy ◽  
Layer Growth ◽  
Scanning Probe ◽  
Layer By Layer ◽  
Epitaxial Thin Films ◽  
Island Growth ◽  
Surface Microstructures ◽  
Atomically Flat ◽  
2D To 3D

ABSTRACTWe have made a comparative invetigation of the surface microstructures of epitaxially grown ferroelectric SrBi2Ta2O9, BaTiO3 films, and metallic SrRuO3 films, using scanning probe microscopy. Though their lattices (or pseudotetrogonal lattices) match closely with SrTiO3 (001) substrates, SPM results show very different surface microstructures. The surfaces of SrRuO3 films display atomically flat terraces of 90° oriented step edges. The size of steps is about 6 Å. The surface of BaTiO3 films deposited at various temperatures displays uniform rectangular islands. Different stages of SrBi2Ta2O9 epitaxial growth have been studied on thickness gradient films, which show clearly 2D nucleation and layer-by-layer growth, following a transition from 2D to 3D island growth. It finally develops into a surface exhibiting round hills consisting of curved terraces with size of steps ranging from 6 Å to 12.5 Å.

Oxygen Pressure Dependence of Morphology of Morphology of La2-xSrxCuO4 Ultra-Thin Films

1997 ◽  
Vol 11 (21n22) ◽  
pp. 981-987
Author(s):  
H. Q. Yin ◽  
T. Arakawa ◽  
Y. Kaneda ◽  
T. Yoshikawa ◽  
N. Haneji ◽  
...  
Keyword(s):  
Thin Films ◽  
Pressure Dependence ◽  
Film Growth ◽  
Ambient Pressure ◽  
High Energy ◽  
Layer Growth ◽  
Growth Mode ◽  
Layer By Layer ◽  
Island Growth ◽  
Experimental Conditions

La 2-x Sr x CuO 4 ultra-thin films with thickness 200 Å were fabricated by pulsed laser deposition method in oxygen ( O 2) atmosphere. The morphology of deposited films was investigated by reflection high energy electron diffraction (RHEED), atomic force microscopy (AFM) and scanning electronic microscopy (SEM). The strong oxygen ambient pressure dependence of film morphology was observed. In high oxygen ambient pressure, the film growth is dominated by island growth mode. The results imply that the experimental conditions of oxygen ambient pressure and substrate temperature are critical for the layer-by-layer growth mode.

Initial Growth of Co on Cu{001} Studied with LEED I(V)

2003 ◽  
Vol 10 (04) ◽  
pp. 641-648 ◽  
Author(s):  
J. Sainio ◽  
E. Alshamaileh ◽  
J. Lahtinen ◽  
C. J. Barnes
Keyword(s):  
Layer Growth ◽  
Layer By Layer ◽  
Initial Growth ◽  
Matrix Approximation ◽  
Low Energy Electron Diffraction ◽  
Disordered Alloys ◽  
Random Alloy ◽  
Low Energy Electron ◽  
Temperature Programmed ◽  
Model Structures

The initial growth of Co deposited at room temperature on Cu{001} was studied with low energy electron diffraction (LEED) and temperature-programmed desorption (TPD). Measured I(V) spectra were compared with calculated spectra from several model structures, including substitutionally disordered alloys. The averaged T-matrix approximation (ATA) was used to model the random alloy layers. According to the I(V) analysis, alloying occurs in the first stages of the growth. TPD of CO indicates that both large areas of Co and areas of a surface alloy are already present at the lowest coverage. Both methods show that a transition to layer-by-layer growth occurs as the coverage increases.

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