Application of optical microscopy for the qualitative and quantitative analysis of the solid surface
2020 ◽
Vol 20
(2)
◽
pp. 41-64
Keyword(s):
The possibilities of optical microscopy for preliminary and complex analysis of structures, which are used mainly in microelectronics and micromechanics, are demonstrated. Specific examples of the use of optical microscopy for qualitative and quantitative analysis, development of technological processes, control of defects, analysis of surface relief, determination of the parameters of structures are given. Surface measurements are performed in reflected and transmitted light, using bright and dark field modes.
2012 ◽
Vol 468-471
◽
pp. 1104-1109
1973 ◽
Vol 51
(23)
◽
pp. 3901-3904
◽
2013 ◽
Vol 96
(5)
◽
pp. 942-946
◽
2017 ◽
Vol 94
(8)
◽
pp. 1129-1132
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