scholarly journals Investigations in Anti-Impact Performance of TiN Coatings Prepared by Filtered Cathodic Vacuum Arc Method under Different Substrate Temperatures

Coatings ◽  
2020 ◽  
Vol 10 (9) ◽  
pp. 840
Author(s):  
Da Huang ◽  
Weifeng He ◽  
Xin Cao ◽  
Yang Jiao
Keyword(s):  
Substrate Temperature ◽  
Internal Stress ◽  
Adhesion Strength ◽  
Great Influence ◽  
High Hardness ◽  
Underlying Mechanism ◽  
Vacuum Arc ◽  
Impact Performance ◽  
Tin Coatings ◽  
Substrate Temperatures

In this study, the anti-impact performance of the TiN coatings prepared under various substrate temperatures (35, 200, 400, and 600 °C) were evaluated using a cyclic impact tester under 104 cycles. Moreover, the microstructure and anti-impact performance-related mechanical properties (adhesion strength and nano-hardness) were investigated to reveal the underlying mechanism of how the substrate temperature affects the anti-impact performance of the coatings. The results showed that the substrate temperature has a great influence on the internal stress, nano-hardness, and adhesion strength as well as the anti-impact performance of TiN coatings, and the coatings prepared under 400 °C exhibit the best impact resistance. The small internal stress, strong adhesion strength as well as high hardness and H3/E2 value for the 400 °C prepared coatings are the main contributes.

Preparation Temperature Effects in Microcrystalline Silicon Thin Film Solar Cells

2001 ◽  
Vol 664 ◽  
Author(s):  
O. Vetterl ◽  
A. Dasgupta ◽  
A. Lambertz ◽  
H. Stiebig ◽  
F. Finger ◽  
...  
Keyword(s):  
Solar Cells ◽  
Substrate Temperature ◽  
Chemical Vapor ◽  
Underlying Mechanism ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film ◽  
Preparation Temperature ◽  
Layer Material ◽  
Vapor Deposition Technique ◽  
Substrate Temperatures

ABSTRACTMicrocrystalline silicon solar cells were prepared at various substrate temperatures using a plasma enhanced chemical vapor deposition technique at 95 MHz. Devices in superstrate configuration, i.e. prepared on transparent glass/ZnO substrates with deposition sequence p-i-n, suffer from a reduction of short wavelength response upon increasing substrate temperature. As underlying mechanism adverse effects on the p-i interface region are discussed. For devices in substrate configuration (deposition sequence n-i-p on Ag/ZnO back-reflectors) a pronounced efficiency maximum with a highest value of 8.7 % is observed at substrate temperatures of about 250 °C. Comparing the dark J-V characteristics obtained for different device thicknesses at substrate temperatures of 200 °and 250 °C, respectively, improved i-layer material and transport properties are suggested in the latter case. The results illustrate the sensitivity ofmicrocrystalline silicon devices with respect to the employed substrate temperature by effects on the absorber layer material properties on the one hand and by effects related to the device design, e.g. the specific deposition sequence of the individual layers, on the other hand.

Effects of intrinsic properties of TiN coatings on acoustic emission behavior at scratch test

1992 ◽  
Vol 7 (8) ◽  
pp. 2240-2247 ◽  
Author(s):  
Shuji Yamamoto ◽  
Hiroshi Ichimura
Keyword(s):  
Acoustic Emission ◽  
Substrate Temperature ◽  
Internal Stress ◽  
Bias Voltage ◽  
Scratch Test ◽  
Intrinsic Properties ◽  
Substrate Bias Voltage ◽  
Tin Coatings ◽  
Emission Behavior ◽  
The Relationship

Acoustic emission (AE) behavior at scratch test has been studied for TiN coatings that deposited in an ion plating system. The AE intensity of the coatings measured by the scratch test depended not only on the adhesion of a coating-substrate interface but also on the intrinsic properties of a deposited film. In this work, a careful separation of coating parameters was investigated to clarify the relationship between the AE intensity and the intrinsic properties of coated films. For identical coating conditions, the AE intensity increased with coating thickness since the elastic energy released during the scratching is proportional to film thickness. It has been found that the coatings prepared at higher substrate temperature and/or at higher substrate bias voltage had a larger crystallite size and lower internal stress. With increasing bias voltage and substrate temperature, the AE intensity of TiN coatings decreased. An explanation for this behavior has been proposed in terms of the internal stress and the toughness of the deposited films.

Observations on the growth of barium bismuth oxide thin films

1992 ◽  
Vol 50 (1) ◽  
pp. 76-77
Author(s):  
M G. Norton ◽  
E.S. Hellman ◽  
E.H. Hartford ◽  
C.B. Carter
Keyword(s):  
Substrate Temperature ◽  
Deposition Process ◽  
Nucleation Layer ◽  
Second Stage ◽  
Device Applications ◽  
High Transition ◽  
Substrate Temperatures ◽  
Oriented Material ◽  
Barium Bismuth ◽  
Superconductor Device

The bismuthates (for example, Ba1-xKxBiO3) represent a class of high transition temperature superconductors. The lack of anisotropy and the long coherence length of the bismuthates makes them technologically interesting for superconductor device applications. To obtain (100) oriented Ba1-xKxBiO3 films on (100) oriented MgO, a two-stage deposition process is utilized. In the first stage the films are nucleated at higher substrate temperatures, without the potassium. This process appears to facilitate the formation of the perovskite (100) orientation on (100) MgO. This nucleation layer is typically between 10 and 50 nm thick. In the second stage, the substrate temperature is reduced and the Ba1-xKxBiO3 is grown. Continued growth of (100) oriented material is possible at the lower substrate temperature.

Properties of carbon films deposited by pulsed laser vaporization from pyrolytic graphite

1989 ◽  
Vol 4 (5) ◽  
pp. 1238-1242 ◽  
Author(s):  
A. P. Malshe ◽  
S. M. Chaudhari ◽  
S. M. Kanetkar ◽  
S. B. Ogale ◽  
S. V. Rajarshi ◽  
...  
Keyword(s):  
Substrate Temperature ◽  
Pyrolytic Graphite ◽  
Carbon Films ◽  
Laser Vaporization ◽  
Film Properties ◽  
Amorphous Carbon Films ◽  
Resistivity Measurements ◽  
Laser Raman ◽  
Quartz Substrates ◽  
Substrate Temperatures

Amorphous carbon films have been deposited on silicon 〈111〉 and quartz substrates by pulsed ruby laser vaporization from pyrolytic graphite. Depositions have been carried out at different substrate temperatures, and the properties of the deposited carbon films have been studied using IR and UV–VIS transmission, ellipsometry, and laser-Raman spectroscopies. Chemical and electrical resistivity measurements have also been performed. It is shown that the film properties depend critically on the substrate temperature and that at the substrate temperature of 50 °C films with substantial proportion of sp3 hybridized orbitals are obtained.

scholarly journals Simulation of Mechanical Deformation and Tribology of Nano-Thin Amorphous Hydrogenated Carbon (a:Ch) Films Using Molecular Dynamics

1996 ◽  
Vol 436 ◽  
Author(s):  
J. N. Glosli ◽  
M. R. Philpott ◽  
J. Belak
Keyword(s):  
Molecular Dynamics ◽  
Substrate Temperature ◽  
Computer Simulations ◽  
Mechanical Deformation ◽  
Porous Graphite ◽  
Pure Carbon ◽  
Substrate Temperatures ◽  
Amorphous Hydrogenated Carbon ◽  
Deposition Energy

AbstractMolecular dynamics computer simulations are used to study the effect of substrate temperature on the microstructure of deposited amorphous hydrogenated carbon (a:CH) films. A transition from dense diamond-like films to porous graphite-like films is observed between substrate temperatures of 400K and 600K for a deposition energy of 20 eV. The dense a:CH film grown at 300K and 20 eV has a hardness (˜50 GPa) about half that of a pure carbon (a:C) film grown under the same conditions.

Properties of Al Films Depend on Substrate Temperature by DC Magnetron Sputter Deposition

2013 ◽  
Vol 662 ◽  
pp. 413-416
Author(s):  
Yi Shen ◽  
Ruo He Yao
Keyword(s):  
Grain Size ◽  
Film Thickness ◽  
Substrate Temperature ◽  
Sheet Resistance ◽  
Cross Section ◽  
Sputter Deposition ◽  
Surface Profiling ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Substrate Temperatures

Al films were prepared by DC magnetron sputter deposition at different substrate temperatures. The sheet resistance of the films was measured by four point probe sheet resistance meter, and the film thickness, which was obtained by surface profiling system. The surface and cross-section morphology of the films was observed by AFM and FESEM. As a result, the resistivity of the films decreases obviously as the substrate temperature increases gradually. The higher substrate temperature is, the rougher the films surface is and the larger the grain size is.

Precision Coating of ta-C Films on Quartz Surfaces

2020 ◽  
Author(s):  
Kotaro Kawai ◽  
Yuki Hirata ◽  
Hiroki Akasaka ◽  
Naoto Ohtake
Keyword(s):  
Cutting Tools ◽  
Three Dimensional ◽  
High Hardness ◽  
Carbon Films ◽  
Vacuum Arc ◽  
High Wear Resistance ◽  
Chemical Inertness ◽  
Filtered Cathodic Vacuum Arc ◽  
Surface Morphologies

Abstract Diamond-like carbon (DLC) films have excellent properties such as high hardness, low friction coefficient, high wear resistance, chemical inertness and so on. Because DLC film is considered as an effective coating material to improve their surface properties, this films are used in various applications such as parts for automobiles engines, hard disk surfaces, cutting tools and dies, and so on. DLC films consist of a mixture of sp2 bonded carbon atoms and sp3 bonded carbon atoms. Among them, ta-C film is known as the hardest and strongest film since it mainly consists of sp3 bonded carbon atoms. One of deposition methods to form ta-C is Filtered Cathodic Vacuum Arc (FCVA). The characteristic of this method is that it is possible to remove the droplets and form a high-quality film.. However, even though lots of mechanical components which require ta-C coating have three-dimensionally shapes, it is difficult to coat ta-C film three dimensionally by using FCVA process. At present, researches on 3D deposition of amorphous carbon films on three dimensional components is still insufficient, and investigation reports on the deposition mechanism and characterization of the deposited films are even more limited. In this study, we tried to deposit films on 3D components by the FCVA method and evaluated the microstructure and surface morphologies of films. Although films were coated successfully in the entire surfaces, different properties were showed depending on the location of components. These properties were investigated by Raman spectroscopy and laser microscope.

scholarly journals Fabrication of Ni-Mn Microprobe Structure with Low Internal Stress and High Hardness by Employing DC Electrodeposition

2014 ◽  
Vol 2014 ◽  
pp. 1-6 ◽  
Author(s):  
Kuan-Hui Cheng ◽  
Fu-Je Chen ◽  
Chun-Ying Lee ◽  
Chao-Sung Lin ◽  
Jung-Tang Huang ◽  
...  
Keyword(s):  
Internal Stress ◽  
Current Density ◽  
High Hardness ◽  
Power Source ◽  
Manganese Sulphate ◽  
Microelectronic Devices ◽  
Dc Power ◽  
Coating Composition ◽  
Mn Content ◽  
Columnar Grain

Due to its widely tunable mechanical property and incompatibility with most solders, Ni-Mn alloy can become a viable candidate in the fabrication of testing probe for microelectronic devices. In this study, the electrodeposition of Ni-Mn alloy in nickel sulphamate electrolyte with the addition of manganese sulphate was investigated under direct current (DC) power source. The effects of current density and Mn2+concentration in the electrolyte on the coating composition, cathodic efficiency, microstructure and mechanical properties were explored. The results showed that the raise of the Mn2+concentration in the electrolyte alone did not effectively increase the Mn content in the coating but reduce the cathodic efficiency. On the other hand, increasing the current density facilitated the codeposition of the Mn and rendered the crystallite from coarse columnar grain to the refined one. Thus, both hardness and internal stress of the coating increased. The fabrication of testing probes at 1 A/dm2was shown to satisfy the high hardness, low internal stress, reasonable fatigue life, and nonsticking requirements for this microelectronic application.

Sign in / Sign up

Export Citation Format

Share Document