Buckling Electrothermal NEMS Actuators: Analytic Design for Very Slender Beams
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Analytic approximations are presented for the response of buckling-mode electrothermal actuators with very slender beams with a width-to-length ratio of W/L≤0.001 of the type found in nanoelectromechanical systems (NEMS). The results are found as closed-form solutions to the Euler beam bending theory rather than by an iterative numerical solution or a time-consuming finite element analysis. Expressions for transverse deflections and stiffness are presented for actuators with the common raised cosine and chevron pre-buckled shapes. The approximations are valid when the effects of bending dominate over those of axial compression. A few higher-order approximations are also presented for less slender beams with 0.001≤W/L≤0.01.
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2001 ◽
Vol 215
(2)
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pp. 211-226
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Keyword(s):
2012 ◽
Vol 588-589
◽
pp. 420-423
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2011 ◽
Vol 101-102
◽
pp. 1114-1118
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