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Published By MDPI AG

2673-8023

Micro ◽  
2022 ◽  
Vol 2 (1) ◽  
pp. 54-67
Author(s):  
Richard Syms ◽  
Dixi Liu

Analytic approximations are presented for the response of buckling-mode electrothermal actuators with very slender beams with a width-to-length ratio of W/L≤0.001 of the type found in nanoelectromechanical systems (NEMS). The results are found as closed-form solutions to the Euler beam bending theory rather than by an iterative numerical solution or a time-consuming finite element analysis. Expressions for transverse deflections and stiffness are presented for actuators with the common raised cosine and chevron pre-buckled shapes. The approximations are valid when the effects of bending dominate over those of axial compression. A few higher-order approximations are also presented for less slender beams with 0.001≤W/L≤0.01.


Micro ◽  
2022 ◽  
Vol 2 (1) ◽  
pp. 23-53
Author(s):  
Fabrizio Roccaforte ◽  
Filippo Giannazzo ◽  
Giuseppe Greco

Wide band gap semiconductors such as silicon carbide (SiC) and gallium nitride (GaN) are excellent materials for the next generation of high-power and high-frequency electronic devices. In fact, their wide band gap (>3 eV) and high critical electric field (>2 MV/cm) enable superior performances to be obtained with respect to the traditional silicon devices. Hence, today, a variety of diodes and transistors based on SiC and GaN are already available in the market. For the fabrication of these electronic devices, selective doping is required to create either n-type or p-type regions with different functionalities and at different doping levels (typically in the range 1016–1020 cm−3). In this context, due to the low diffusion coefficient of the typical dopant species in SiC, and to the relatively low decomposition temperature of GaN (about 900 °C), ion implantation is the only practical way to achieve selective doping in these materials. In this paper, the main issues related to ion implantation doping technology for SiC and GaN electronic devices are briefly reviewed. In particular, some specific literature case studies are illustrated to describe the impact of the ion implantation doping conditions (annealing temperature, electrical activation and doping profiles, surface morphology, creation of interface states, etc.) on the electrical parameters of power devices. Similarities and differences in the application of ion implantation doping technology in the two materials are highlighted in this paper.


Micro ◽  
2021 ◽  
Vol 2 (1) ◽  
pp. 1-22
Author(s):  
Shao Qi Lim ◽  
James S. Williams

Over four decades ago, pulsed-laser melting, or pulsed-laser annealing as it was termed at that time, was the subject of intense study as a potential advance in silicon device processing. In particular, it was found that nanosecond laser melting of the near-surface of silicon and subsequent liquid phase epitaxy could not only very effectively remove lattice disorder following ion implantation, but could achieve dopant electrical activities exceeding equilibrium solubility limits. However, when it was realised that solid phase annealing at longer time scales could achieve similar results, interest in pulsed-laser melting waned for over two decades as a processing method for silicon devices. With the emergence of flat panel displays in the 1990s, pulsed-laser melting was found to offer an attractive solution for large area crystallisation of amorphous silicon and dopant activation. This method gave improved thin film transistors used in the panel backplane to define the pixelation of displays. For this application, ultra-rapid pulsed laser melting remains the crystallisation method of choice since the heating is confined to the silicon thin film and the underlying glass or plastic substrates are protected from thermal degradation. This article will be organised chronologically, but treatment naturally divides into the two main topics: (1) an electrical doping research focus up until around 2000, and (2) optical doping as the research focus after that time. In the first part of this article, the early pulsed-laser annealing studies for electrical doping of silicon are reviewed, followed by the more recent use of pulsed-lasers for flat panel display fabrication. In terms of the second topic of this review, optical doping of silicon for efficient infrared light detection, this process requires deep level impurities to be introduced into the silicon lattice at high concentrations to form an intermediate band within the silicon bandgap. The chalcogen elements and then transition metals were investigated from the early 2000s since they can provide the required deep levels in silicon. However, their low solid solubilities necessitated ultra-rapid pulsed-laser melting to achieve supersaturation in silicon many orders of magnitude beyond the equilibrium solid solubility. Although infrared light absorption has been demonstrated using this approach, significant challenges were encountered in attempting to achieve efficient optical doping in such cases, or hyperdoping as it has been termed. Issues that limit this approach include: lateral and surface impurity segregation during solidification from the melt, leading to defective filaments throughout the doped layer; and poor efficiency of collection of photo-induced carriers necessary for the fabrication of photodetectors. The history and current status of optical hyperdoping of silicon with deep level impurities is reviewed in the second part of this article.


Micro ◽  
2021 ◽  
Vol 1 (2) ◽  
pp. 250-266
Author(s):  
Eleni Kavetsou ◽  
Ioanna Pitterou ◽  
Annita Katopodi ◽  
Georgia Petridou ◽  
Abdelaziz Adjali ◽  
...  

The aim of the present study was the encapsulation of cedar (Juniperus phoenicea) essential oil (CEO) of Greek origin in β-cyclodextrin (β-CD) through the formation of inclusion complexes (ICs) using the co-precipitation method with different β-CD-to-CEO weight ratios (90:10, 85:15, 80:20, 70:30 (w/w)). The encapsulation of CEO in β-CD through host–guest interactions was confirmed by Nuclear Magnetic Resonance (NMR) spectroscopy, FT-IR spectroscopy, Differential Scanning Calorimetry (DSC) and Thermogravimetric Analysis (TGA). The obtained ICs exhibited nanoscale size (315.9 nm to 769.6 nm),Polydispersity Index from 0.326 to 0.604 and satisfactory stability in suspension (−37.0 mV to −17.0 mV). The process yield was satisfactory, ranging between 65% and 78%, while the inclusion efficiency ranged from 10% to 27%. The in vitro release study conducted for the IC with the optimal characteristics (β-CD:CEO 80:20 (w/w)) exhibited a sustained release profile, with an initial burst effect in the first 5 h. The release profile could be well expressed by the Higuchi equation: Q = 18.893 t1/2 + 9.5919, R2 = 0.8491. The cedar EO presented significant acetylcholinesterase inhibition (IC50 37 μg/mL), which was prolonged by its encapsulation into the β-CD cavity.


Micro ◽  
2021 ◽  
Vol 1 (2) ◽  
pp. 242-249
Author(s):  
Julia Eckert ◽  
Yasmine Abouleila ◽  
Thomas Schmidt ◽  
Alireza Mashaghi

Mechanotransduction, the ability of cells to sense and respond to the mechanical cues from their microenvironment, plays an important role in numerous cellular processes, ranging from cell migration to differentiation. Several techniques have been developed to investigate the underlying mechanisms of mechanotransduction, in particular, force measurement-based techniques. However, we still lack basic single cell quantitative comparison on the mechanical properties of commonly used cell types, such as endothelial and fibroblast cells. Such information is critical to provide a precedent for studying complex tissues and organs that consist of various cell types. In this short communication, we report on the mechanical characterization of the commonly used endothelial and fibroblast cells at the single cell level. Using a micropillar-based assay, we measured the traction force profiles of these cells. Our study showcases differences between the two cell types in their traction force distribution and morphology. The results reported can be used as a reference and to lay the groundwork for future analysis of numerous disease models involving these cells.


Micro ◽  
2021 ◽  
Vol 1 (2) ◽  
pp. 228-241
Author(s):  
Benjamin Richstein ◽  
Lena Hellmich ◽  
Joachim Knoch

Problems with doping in nanoscale devices or low temperature applications are widely known. Our approach to replace the degenerate doping in source/drain (S/D)-contacts is silicon nitride interface engineering. We measured Schottky diodes and MOSFETs with very thin silicon nitride layers in between silicon and metal. Al/SiN/p-Si diodes show Fermi level depinning with increasing SiN thickness. The diode fabricated with rapid thermal nitridation at 900 ∘C reaches the theoretical value of the Schottky barrier to the conduction band ΦSB,n=0.2 eV. As a result, the contact resistivity decreases and the ambipolar behavior can be suppressed. Schottky barrier MOSFETs with depinned S/D-contacts consisting of a thin silicon nitride layer and contact metals with different work functions are fabricated to demonstrate unipolar behavior. We presented n-type behavior with Al and p-type behavior with Co on samples which only distinguish by the contact metal. Thus, the thermally grown SiN layers are a useful method suppress Fermi level pinning and enable reconfigurable contacts by choosing an appropriate metal.


Micro ◽  
2021 ◽  
Vol 1 (2) ◽  
pp. 194-214
Author(s):  
Raili Koivuniemi ◽  
Qian Xu ◽  
Jasmi Snirvi ◽  
Irene Lara-Sáez ◽  
Arto Merivaara ◽  
...  

Nanofibrillar cellulose (NFC)-derived dressings such as films, hydrogels, and aerogels are one of the favorable materials for wound healing due to their proper mechanical properties and water holding ability. However, the therapeutic differences between native and anionic NFC materials are rarely studied. In this report, we compared the differences and addressed the regenerative potential of native and anionic wood-derived NFC hydrogels for wound treatment. In vitro characteristics of the hydrogels were detected using scanning electron microscopy, rheological measurements, and swelling and hemolytic activity assays. Skin regeneration at an early stage after hydrogel treatment was analyzed using an in vivo splinted excisional full-thickness skin wound model in C57BL/6 mice. Both native NFC and anionic NFC (ANFC) hydrogel with differing mechanical and surface properties were shown to be biocompatible. Surprisingly, wounds treated with NFC and ANFC hydrogel did not show any statistical difference compared with control wounds and progressed through normal wound closure, inflammatory response, re-epithelialization, vascularization, and tissue maturation with no signs of fibrosis. The data show here for the first time the therapeutic performance of native and anionic NFC hydrogel in a wound mimicking human wound healing mechanisms. The mechanical properties of native and anionic NFC hydrogels such as the capability to modify material stiffness may also prove to be valuable in the management of wounds in the future.


Micro ◽  
2021 ◽  
Vol 1 (2) ◽  
pp. 215-227
Author(s):  
Jenny L. N. Boane ◽  
Pedro Centeno ◽  
Ana Mouquinho ◽  
Miguel Alexandre ◽  
Tomás Calmeiro ◽  
...  

Microstructured transparent conductive oxides (TCOs) have shown great potential as photonic electrodes in photovoltaic (PV) applications, providing both optical and electrical improvements in the solar cells’ performance due to: (1) strong light trapping effects that enhance broadband light absorption in PV material and (2) the reduced sheet resistance of the front illuminated contact. This work developed a method for the fabrication and optimization of wavelength-sized indium zinc oxide (IZO) microstructures, which were soft-patterned on flexible indium tin oxide (ITO)-coated poly(ethylene terephthalate) (PET) substrates via a simple, low-cost, versatile, and highly scalable colloidal lithography process. Using this method, the ITO-coated PET substrates patterned with IZO micro-meshes provided improved transparent electrodes endowed with strong light interaction effects—namely, a pronounced light scattering performance (diffuse transmittance up to ~50%). In addition, the photonic-structured IZO mesh allowed a higher volume of TCO material in the electrode while maintaining the desired transparency, which led to a sheet resistance reduction (by ~30%), thereby providing further electrical benefits due to the improvement of the contact conductance. The results reported herein pave the way for a new class of photonic transparent electrodes endowed with mechanical flexibility that offer strong potential not only as advanced front contacts for thin-film bendable solar cells but also for a much broader range of optoelectronic applications.


Micro ◽  
2021 ◽  
Vol 1 (2) ◽  
pp. 181-193
Author(s):  
Kouki Inomata ◽  
Michiyo Honda

Microvessels in bone are indispensable for maintaining bone homeostasis based on a dynamic remodeling system. In cell-based tissue engineering, vascularization into the regenerative bone is a key strategy to avoid hypoxia and necrosis around re-implanted tissues. Previous studies have shown that direct contact between osteoblasts and endothelial cells stimulates differentiation of both cell types. However, no studies have revealed the dominant/submissive relationship. In the present study, we examined the effect of hypothermia on monoculture and co-culture to assess which cells tightly coordinated osteogenesis and angiogenesis in the co-culture system. As for osteoblasts, exposure to hypothermia suppressed cellular proliferation, migration, and differentiation. Evaluation of the behavior of endothelial cells showed that hypothermia should not affect basic functions such as proliferation and migration. Under co-culture conditions, both osteogenic differentiation and the formation of vessel-like angiogenic structures were suppressed by hypothermia, but the spatial organization of alkaline phosphatase-positive cell clusters, which tend to localize around microvascular lumens, was not altered. These data suggest that hypothermia attenuates heterotypic intercellular crosstalk which robustly depends on osteoblasts to inhibit both osteogenesis and angiogenesis in the co-culture system. Taken together, this approach will provide new insights into the relationship between osteoblasts and endothelial cells in tissue engineering.


Micro ◽  
2021 ◽  
Vol 1 (2) ◽  
pp. 164-180
Author(s):  
Ada-Ioana Bunea ◽  
Nuria del Castillo Iniesta ◽  
Ariadni Droumpali ◽  
Alexandre Emmanuel Wetzel ◽  
Einstom Engay ◽  
...  

3D printing by two-photon polymerization enables the fabrication of microstructures with complex shapes and critical dimensions of a few hundreds of nanometers. On state-of-the art commercial two-photon polymerization systems, an immense 3D design freedom can be put into practice by direct laser writing using a precise fabrication technology, which makes this approach highly attractive for different applications on the microscale, such as microrobotics, micro-optics, or biosensing. However, navigating the different possible configurations and selecting the optimal parameters for the fabrication process often requires intensive testing and optimization. In addition to the more established acrylate-based resins, there is a growing interest in the use of soft materials. In this paper, we demonstrate the fabrication of various microscale structures by two-photon polymerization using a Nanoscribe Photonic Professional GT+ commercial system. Furthermore, we describe the different configurations of the system and parameter selection, as well as commercial resins and their chemical and mechanical properties. Finally, we provide a short guide aiming to serve as starting point for the two-photon polymerization-based fabrication of various microscale architectures with distinct characteristics.


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