scholarly journals FEM Modeling of the Temperature Influence on the Performance of SAW Sensors Operating at GigaHertz Frequency Range and at High Temperature Up to 500 °C

Sensors ◽  
2020 ◽  
Vol 20 (15) ◽  
pp. 4166
Author(s):  
Jean Claude Asseko Ondo ◽  
Eloi Jean Jacques Blampain ◽  
Gaston N’Tchayi Mbourou ◽  
Stephan Mc Murtry ◽  
Sami Hage-Ali ◽  
...  

In this work, we present a two-dimensional Finite Element Method (2D-FEM) model implemented on a commercial software, COMSOL Multiphysics, that is used to predict the high temperature behavior of surface acoustic wave sensors based on layered structures. The model was validated by using a comparative study between experimental and simulated results. Here, surface acoustic wave (SAW) sensors consist in one-port synchronous resonators, based on the Pt/AlN/Sapphire structure and operating in the 2.45-GHz Industrial, scientific and medical (ISM) band. Experimental characterizations were carried out using a specific probe station that can perform calibrated measurements from room temperature to 500 °C. In our model, we consider a pre-validated set of physical constants of AlN and Sapphire and we take into account the existence of propagation losses in the studied structure. Our results show a very good agreement between the simulation and experiments in the full range of investigated temperatures, and for all key parameters of the SAW sensor such as insertion losses, resonance frequency, electromechanical factor of the structure (k2) and quality factor (Q). Our study shows that k2 increases with the temperature, while Q decreases. The resonance frequency variation with temperature shows a good linearity, which is very useful for temperature sensing applications. The measured value of the temperature coefficient of frequency (TCF) is equal to −38.6 ppm/°C, which is consistent with the numerical predictions.

2021 ◽  
Vol 2071 (1) ◽  
pp. 012022
Author(s):  
A M Noor ◽  
A N Norali ◽  
Z Zakaria ◽  
M Mazalan ◽  
Y Wahab

Abstract A surface acoustic wave (SAW) sensor detects changes in physical properties such as mass and density on its surface. Compared to other types of sensors, SAW sensor have a good stability, high selectivity and sensitivity, fast response, and low-cost. On the other hand, to design and optimize a SAW biosensor requires a long process including time and cost using conventional methods. Therefore, numerical simulation and computational modelling are useful and efficiently conduct analysis for the SAW biosensor. In this paper, a numerical simulation technique is used to analyse the SAW device sensitivity for the application of gas detection. The SAW biosensor can detect very small mass loading by changing its sensor resonance frequency. The two-dimensional (2D) device model is based on a two-port SAW resonator with a gas sensing layer. We made two design of SAW biosensor device with frequency of 872 MHz and 1.74 GHz. A gas with vary concentration from 1 to 100 ppm were used to determine the change of the device resonance frequency. As a result, the high frequency (1.74 GHz) device, shows that the resonance frequency is shifted larger than to the low frequency (872 MHz) device. In addition, the high frequency device offers five times more sensitivity than the low frequency device. By changing the sensor design, the sensor characteristics such as sensitivity can be altered to meet certain sensing requirements. Numerical simulation provides advantages for sensor optimization and useful for nearly representing the real condition.


Crystals ◽  
2021 ◽  
Vol 11 (12) ◽  
pp. 1576
Author(s):  
Rishikesh Srinivasaraghavan Govindarajan ◽  
Eduardo Rojas-Nastrucci ◽  
Daewon Kim

A surface acoustic wave (SAW), device composed of polymer and ceramic fillers, exhibiting high piezoelectricity and flexibility, has a wide range of sensing applications in the aerospace field. The demand for flexible SAW sensors has been gradually increasing due to their small size, wireless capability, low fabrication cost, and fast response time. This paper discusses the structural, thermal, and electrical properties of the developed sensor, based on different micro- and nano-fillers, such as lead zirconate titanate (PZT), calcium copper titanate (CCTO), and carbon nanotubes (CNTs), along with polyvinylidene fluoride (PVDF) as a polymer matrix. The piezocomposite substrate of the SAW sensor is fabricated using a hot press, while interdigital transducers (IDTs) are deposited through 3D printing. The piezoelectric properties are also enhanced using a non-contact corona poling technique under a high electric field to align the dipoles. Results show that the developed passive strain sensor can measure mechanical strains by examining the frequency shifts of the detected wave signals.


2014 ◽  
Vol 28 (07) ◽  
pp. 1450056 ◽  
Author(s):  
Hua-Lin Cai ◽  
Yi Yang ◽  
Yi-Han Zhang ◽  
Chang-Jian Zhou ◽  
Cang-Ran Guo ◽  
...  

In this paper, a surface acoustic wave (SAW) biosensor with gold delay area on LiNbO 3 substrate detecting DNA sequences is proposed. By well-designed device parameters of the SAW sensor, it achieves a high performance for highly sensitive detection of target DNA. In addition, an effective biological treatment method for DNA immobilization and abundant experimental verification of the sensing effect have made it a reliable device in DNA detection. The loading mass of the probe and target DNA sequences is obtained from the frequency shifts, which are big enough in this work due to an effective biological treatment. The experimental results show that the biosensor has a high sensitivity of 1.2 pg/ml/Hz and high selectivity characteristic is also verified by the few responses of other substances. In combination with wireless transceiver, we develop a wireless receiving and processing system that can directly display the detection results.


2021 ◽  
pp. 129768
Author(s):  
Xinyu Song ◽  
Hao Jin ◽  
Shurong Dong ◽  
Miling Zhang ◽  
Jikai Zhang ◽  
...  

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