T-Gate shaped AlN/β-Ga2O3 HEMT for RF and High Power Nanoelectronics
In this paper, we report record DC and RF performance in β-Ga<sub>2</sub>O<sub>3</sub> High Electron Mobility Transistor (HEMT) with field-plate T-gate using 2-D simulations. The T gate with head-length L<sub>HL</sub> of 180 nm and foot-length L<sub>FL</sub> of 120 nm is used in the highly scaled device with an aspect ratio (L<sub>G</sub>/t<sub>barrier</sub>) of ~ 5. The proposed device takes advantage of a highly polarized Aluminum Nitride (AlN) barrier layer to achieve high Two-Dimensional Electron Gas (2DEG) density in the order of 2.3 × 10<sup>13</sup> cm<sup>-2</sup>, due to spontaneous as well as piezoelectric polarization components. In the depletion mode operation, maximum drain current I<sub>D,MAX</sub> of 1.32 A/mm, and relatively flat transconductance characteristics with a maximum value of 0.32 S/mm are measured. The device with source-drain distance L<sub>SD</sub> of 1.9 µm exhibits record low specific-on resistance R<sub>ON,sp</sub> of 0.136 mΩ-cm<sup>–2</sup>, and off-state breakdown voltage of 403 V, which correspond to the record power figure-of-merit (PFoM) of ~ 1194 MW/cm<sup>2</sup>. Additionally, current gain cut-off frequency f<sub>T</sub> and maximum oscillation frequency f<sub>MAX</sub> of 48 and 142 GHz are estimated. The obtained results show the potential of Ga<sub>2</sub>O<sub>3</sub> HEMT for futuristic power devices.