A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror
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A new hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror is proposed, a mirror array with 19 elements is fabricated by a surface micromachining process. This design has a good fitting capability and a fast dynamic response. The fabricated sample is tested by an optical profiler. Simulation and test results indicate that it has a small aperture size, a high fill factor, a fast response time and a high working bandwidth. This new device provides a possibility of manufacturing a large-actuator-count DM for high speed wavefront control.
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2011 ◽
Vol 52-54
◽
pp. 2021-2026
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