Study of SiC’s Mechanical Property Variance Caused by Film Thickness
2015 ◽
Vol 645-646
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pp. 400-404
Keyword(s):
The mechanical properties of SiC thin films deposited by chemical vapor deposition process on silicon substrate are studied using nanoindentation techniques. The SiC thin films are of three different thicknesses: 1.6μm、4.5μm、9μm. In this study, nanoindentation method is preferred due to its reliability and accuracy on determining mechanical properties from indentation load-displacement data. The mechanical properties of elastic modulus and hardness are characterized. 1.6μm SiC thin film has the following values: E=345.73Gpa, H=33.71Gpa; 4.5μm SiC thin film has the following values: E=170.18Gpa, H=10.33Gpa; 9μm SiC thin film: E=167.96Gpa, H=9.48Gpa
2009 ◽
Vol 131
(1)
◽
2010 ◽
Vol 21
(2)
◽
pp. 136-140
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2011 ◽
Vol 11
(4)
◽
pp. 1107-1110
◽
Keyword(s):
2011 ◽
Vol 129
(1-2)
◽
pp. 62-67
◽