Sub-100nm Hybrid Stamp Fabrication by Hot Embossing

2006 ◽  
Vol 510-511 ◽  
pp. 462-465 ◽  
Author(s):  
Sung Hoon Hong ◽  
Ki Yeon Yang ◽  
Heon Lee
Keyword(s):  
Cost Effectiveness ◽  
Surface Energy ◽  
Nanoimprint Lithography ◽  
Low Cost ◽  
Hot Embossing ◽  
Fabrication Process ◽  
Structured Materials ◽  
Mechanical Hardness ◽  
Low Surface Energy ◽  
Uv Transmittance

The fabrication of nano-structured materials using nanoimprint lithography has become more prevalent in recent years, due to its cost effectiveness and readiness. However, One of the biggest drawback of this technique is the fabrication of the imprinting stamp, which is expensive and difficult to fabricate. This paper describes a method of replication original Si or quartz made imprinting template into a polymer stamp which has many advantages, such as the simplicity and low cost of the fabrication process and the flexibility of the resulting stamp. Using the hot embossing method, PVC based imprint stamp with sub 100nm patterns can be fabricated. Due to its high UV transmittance, reasonable mechanical hardness and low surface energy, PVC based nanosized template can be used as a stamp for UV-NIL and sub 100nm patterns were successfully transferred by the UV-NIL process with PVC based imprint stamp.

A Novel Nanoimprint Lithography Thiol-ene Resist for Sub-70 nm Nanostructures

2020 ◽  
Vol 12 (6) ◽  
pp. 779-783
Author(s):  
Man Zhang ◽  
Liang-Ping Xia ◽  
Sui-Hu Dang ◽  
A-Xiu Cao ◽  
Qi-Ling Deng ◽  
...  
Keyword(s):  
Surface Energy ◽  
Nanoimprint Lithography ◽  
Surface Oxygen ◽  
High Chemical ◽  
Uv Curable ◽  
Oxygen Inhibition ◽  
Click Polymerization ◽  
Low Viscosity ◽  
Low Surface Energy ◽  
Chemical Etch

In this paper, we propose a novel kind of UV click-polymerization thiol-ene copolymers as nanoimprint lithography resists for sub-70 nm resolution patterns. High-precision mold imprint and release are two of the most critical steps of nanoimprint lithography, which requires the resists with properties of excellent conformal replication and low surface energy. Conventional UV-curable resists used in nanoimprint lithography, such as acrylate, epoxy resin, and vinyl ether, cannot satisfy all these properties requirements because they exhibit surface oxygen inhibition during polymerization, or materials fracture and delamination during mold releasing. A novel kind of thiol-ene copolymers have been investigated in this study, which have many properties favorable for use as nanoimprint lithography resists to imprint sub-70 nm and high-aspect-ratio nanostructures. These properties include sufficiently low viscosity and high Young's modulus, low surface energy for easy demolding, polymerization in benign ambient, and in particular, high chemical-etch resistance. These excellent properties give improve nanoimprinting results.

Fabrication of Large Area, 70 nm Pitch Nanograting Patterns by Nanoimprint Lithography Using Flexible Polymer Stamp

2011 ◽  
Vol 483 ◽  
pp. 48-52
Author(s):  
Fan Tao Meng ◽  
Jin Kui Chu ◽  
Gang Luo ◽  
Zhi Tao Han ◽  
Zhi Wen Wang
Keyword(s):  
Nanoimprint Lithography ◽  
Low Cost ◽  
Industrial Applications ◽  
Inorganic Materials ◽  
Attractive Alternative ◽  
Large Area ◽  
Good Shape ◽  
Low Surface Energy ◽  
Flexible Polymer ◽  
Size Uniformity

Flexible polymer stamps are considered as an attractive alternative to rigid, brittle and expensive stamps made of inorganic materials because of their low cost and ease of fabrication. In this paper, we present a nanoimprint process to fabricate large area, high-resolution nanograting patterns using flexible polymer stamp made from fluoropolymer. The flexibility and low surface energy of polymer stamp provide a clean release without fracture or deformation of the stamp and of the replicated nanograting. Large-area, high-density nanograting patterns with good shape homogeneity and size uniformity have been successfully fabricated using the flexible polymer stamp with advantages of its good conformal contact and low adhesion. Using flexible polymer stamps can resolve many serious issues in NIL and therefore can bring it to real industrial applications.

scholarly journals Conductive-perovskite LaNiO3 thin films prepared by using solution process for electrode application

2018 ◽  
Vol 34 (2) ◽  
Author(s):  
TRINH BUI
Keyword(s):  
Thin Films ◽  
Low Cost ◽  
Solution Process ◽  
Fabrication Process ◽  
Cross Sectional ◽  
Structured Materials ◽  
Lanthanum Nickel Oxide ◽  
Dense Microstructure ◽  
Saturated Polarization ◽  
Ferroelectric Layer

Lanthanum nickel oxide LaNiO3 (LNO) is extensively known as one of typical perovskite-structured materials with metallic conductivity, which is suitable for the electrode application in electronic devices such as transistors or solar cells. Since LNO is a low-cost material and a simple fabrication process, it has been attracted much attention for commercialization. In this paper, we have focused on optimizing the fabrication process of LNO thin films on SiO2/Si substrate and Al foil by using a solution process. The crystal structure and surface morphology were characterized by using X-ray diffraction and field-emission scanning electron microscopy (FE-SEM), respectively. It was found that the LNO thin films annealed in range of 550-700oC for 30 min exhibited a well-formed crystallization and a dense microstructure. According to the SEM cross-sectional observation, the thickness of LNO thin films was estimated about 80 nm. Also, from the four-probe measurement method, the electrical resistivity of LNO thin film annealed at 600oC had a minimum value of 0.42 × 10-2 Ωcm, which was possibly comparable to conventional conductive oxides. As a result, the capacitor using Pb1.2(Zr0.4Ti0.6)O3 ferroelectric layer annealed at 600oC and LNO bottom electrode provided an interesting ferroelectricity, which included a remnant polarization of 21 µC/cm2 and a saturated polarization of 35 µC/cm2. Moreover, the leakage current density was lower than 2 × 10-5 A/cm2.

A titanium-nickel composite mold with low surface energy for thermal nanoimprint lithography

2020 ◽  
Vol 260 ◽  
pp. 126867
Author(s):  
Xinxin Fu ◽  
Wenting Yang ◽  
Mengjia He ◽  
Yang Li ◽  
Zongbin Hao ◽  
...  
Keyword(s):  
Surface Energy ◽  
Nanoimprint Lithography ◽  
Low Surface Energy ◽  
Titanium Nickel

scholarly journals Nanofabrication of Diamond-like Carbon Templates for Nanoimprint Lithography

2006 ◽  
Vol 956 ◽  
Author(s):  
L. Tao ◽  
S. Ramachandran ◽  
C. T. Nelson ◽  
L. J. Overzet ◽  
M. J. Goeckner ◽  
...  
Keyword(s):  
Surface Energy ◽  
Nanoimprint Lithography ◽  
Inductively Coupled Plasma ◽  
Chemical Vapor ◽  
Contact Angles ◽  
Angle Measurement ◽  
High Wear Resistance ◽  
Diamond Like Carbon ◽  
Water Contact ◽  
Low Surface Energy

ABSTRACTDiamond like carbon (DLC) films were deposited on Si and then patterned to form 40 nm features as nanoimprint templates. A plasma enhanced chemical vapor deposition (PECVD) system with CH4 precursor was used to deposit DLC films on Si and quartz substrates. Then these films were characterized using Raman spectroscopy, atomic force microscopy (AFM), nanoindentation, and contact angle measurement. By varying the RF power and pressure of the PECVD, DLC films with good uniformity, smooth surfaces (<0.2 nm RMS), low surface energy (∼40 mJ/m2), and high hardness (∼22 GPa) were achieved. Nanoimprint lithography and liftoff process were used to pattern Cr mask on DLC films. An inductively coupled plasma (ICP) etching process was performed with CF4 to transfer the patterns into the DLC films to form nanostructured template for nanoimprint. Water contact angles on the patterned DLC templates were measured and it was stable at about 70° under thermal annealing at 180 °C for more than 12 hours. With these DLC templates, UV and reversal UV nanoimprint lithography were carried out on SU-8 at typical imprint conditions and then the fidelity of pattern-transfer was investigated. These experimental results indicate that DLC is an excellent material for nanoimprint templates because of its high wear resistance, robust low surface energy, UV transparency, and ease of patterning.

Cytocompatibility of Carbon Nanofiber Materials for Neural Applications

2003 ◽  
Vol 774 ◽  
Author(s):  
Janice L. McKenzie ◽  
Michael C. Waid ◽  
Riyi Shi ◽  
Thomas J. Webster
Keyword(s):  
Carbon Fiber ◽  
Surface Energy ◽  
Carbon Nanofibers ◽  
Carbon Fibers ◽  
Carbon Nanofiber ◽  
Fiber Composite ◽  
Scar Tissue ◽  
Pc 12 Cells ◽  
Low Surface Energy ◽  
Poly Carbonate

AbstractSince the cytocompatibility of carbon nanofibers with respect to neural applications remains largely uninvestigated, the objective of the present in vitro study was to determine cytocompatibility properties of formulations containing carbon nanofibers. Carbon fiber substrates were prepared from four different types of carbon fibers, two with nanoscale diameters (nanophase, or less than or equal to 100 nm) and two with conventional diameters (or greater than 200 nm). Within these two categories, both a high and a low surface energy fiber were investigated and tested. Astrocytes (glial scar tissue-forming cells) and pheochromocytoma cells (PC-12; neuronal-like cells) were seeded separately onto the substrates. Results provided the first evidence that astrocytes preferentially adhered on the carbon fiber that had the largest diameter and the lowest surface energy. PC-12 cells exhibited the most neurites on the carbon fiber with nanodimensions and low surface energy. These results may indicate that PC-12 cells prefer nanoscale carbon fibers while astrocytes prefer conventional scale fibers. A composite was formed from poly-carbonate urethane and the 60 nm carbon fiber. Composite substrates were thus formed using different weight percentages of this fiber in the polymer matrix. Increased astrocyte adherence and PC-12 neurite density corresponded to decreasing amounts of the carbon nanofibers in the poly-carbonate urethane matrices. Controlling carbon fiber diameter may be an approach for increasing implant contact with neurons and decreasing scar tissue formation.

Corrigendum to “Fabrication superhydrophobic composite membranes with hierarchical geometries and low-surface-energy modifications” [Polymer 211 (2020) 123097]

Polymer ◽  
2021 ◽  
Vol 217 ◽  
pp. 123481
Author(s):  
Zhanhui Gan ◽  
Deyu Kong ◽  
Qianqian Yu ◽  
Yifan Jia ◽  
Xue-Hui Dong ◽  
...  
Keyword(s):  
Surface Energy ◽  
Composite Membranes ◽  
Low Surface Energy

scholarly journals Automated pick-and-place of single nanoparticle using electrically controlled low-surface energy nanotweezer

AIP Advances ◽  
2021 ◽  
Vol 11 (3) ◽  
pp. 035219
Author(s):  
Ya-Kun Lyu ◽  
Zuo-Tao Ji ◽  
Tao He ◽  
Zhenda Lu ◽  
Weihua Zhang
Keyword(s):  
Surface Energy ◽  
Low Surface Energy ◽  
Single Nanoparticle ◽  
Pick And Place

scholarly journals Costs and Cost-Effectiveness of User-Testing of Health Professionals’ Guidelines to Reduce the Frequency of Intravenous Medicines Administration Errors by Nurses in the United Kingdom: A Probabilistic Model Based on Voriconazole Administration

2021 ◽  
Author(s):  
Matthew D. Jones ◽  
Bryony Dean Franklin ◽  
D. K. Raynor ◽  
Howard Thom ◽  
Margaret C. Watson ◽  
...  
Keyword(s):  
Cost Effectiveness ◽  
Medication Error ◽  
Low Cost ◽  
Cost Savings ◽  
Credible Interval ◽  
Probability Of Detection ◽  
Sensitivity Analyses ◽  
Decision Analytic Model ◽  
Published Data ◽  
User Testing

Abstract Aim In the UK, injectable medicines are often prepared and administered by nurses following the Injectable Medicines Guide (IMG). Our earlier study confirmed a higher frequency of correct administration with user-tested versus standard IMG guidelines. This current study aimed to model the cost-effectiveness of user-testing. Methods The costs and cost-effectiveness of user-testing were explored by modifying an existing probabilistic decision-analytic model. The adapted model considered administration of intravenous voriconazole to hospital inpatients by nurses. It included 11 error types, their probability of detection and level of harm. Model inputs (including costs) were derived from our previous study and other published data. Monte Carlo simulation using 20,000 samples (sufficient for convergence) was performed with a 5-year time horizon from the perspective of the 121 NHS trusts and health boards that use the IMG. Sensitivity analyses were undertaken for the risk of a medication error and other sources of uncertainty. Results The net monetary benefit at £20,000/quality-adjusted life year was £3,190,064 (95% credible interval (CrI): −346,709 to 8,480,665), favouring user-testing with a 96% chance of cost-effectiveness. Incremental cost-savings were £240,943 (95% CrI 43,527–491,576), also favouring user-tested guidelines with a 99% chance of cost-saving. The total user testing cost was £6317 (95% CrI 6012–6627). These findings were robust to assumptions about a range of input parameters, but greater uncertainty was seen with a lower medication error risk. Conclusions User-testing of injectable medicines guidelines is a low-cost intervention that is highly likely to be cost-effective, especially for high-risk medicines.

scholarly journals Fabrication of Porous Silicon Based Humidity Sensing Elements on Paper

2015 ◽  
Vol 2015 ◽  
pp. 1-10 ◽  
Author(s):  
Tero Jalkanen ◽  
Anni Määttänen ◽  
Ermei Mäkilä ◽  
Jaani Tuura ◽  
Martti Kaasalainen ◽  
...  
Keyword(s):  
Porous Silicon ◽  
Smart Cities ◽  
Low Cost ◽  
Electrical Characterization ◽  
Fabrication Process ◽  
Sensing Element ◽  
Paper Substrate ◽  
Roll To Roll ◽  
Silver Electrodes ◽  
Silicon Based

A roll-to-roll compatible fabrication process of porous silicon (pSi) based sensing elements for a real-time humidity monitoring is described. The sensing elements, consisting of printed interdigitated silver electrodes and a spray-coated pSi layer, were fabricated on a coated paper substrate by a two-step process. Capacitive and resistive responses of the sensing elements were examined under different concentrations of humidity. More than a three orders of magnitude reproducible decrease in resistance was measured when the relative humidity (RH) was increased from 0% to 90%. A relatively fast recovery without the need of any refreshing methods was observed with a change in RH. Humidity background signal and hysteresis arising from the paper substrate were dependent on the thickness of sensing pSi layer. Hysteresis in most optimal sensing element setup (a thick pSi layer) was still noticeable but not detrimental for the sensing. In addition to electrical characterization of sensing elements, thermal degradation and moisture adsorption properties of the paper substrate were examined in connection to the fabrication process of the silver electrodes and the moisture sensitivity of the paper. The results pave the way towards the development of low-cost humidity sensors which could be utilized, for example, in smart packaging applications or in smart cities to monitor the environment.

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